4/4/2012	9:18:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	9:18:48 AM	Recipe started at 9:18 AM
4/4/2012	9:18:48 AM	Helium valve closed
4/4/2012	9:18:48 AM	H2 valve closed
4/4/2012	9:18:48 AM	BCl3 valve closed
4/4/2012	9:18:48 AM	PH3 valve closed
4/4/2012	9:18:48 AM	SiCl4 pre valve closed
4/4/2012	9:18:48 AM	SiCl4 post valve closed
4/4/2012	9:18:48 AM	Main Vac valve closed
4/4/2012	9:18:48 AM	Bypass valve closed
4/4/2012	9:18:48 AM	Bubbler valve closed
4/4/2012	9:18:48 AM	Helium MFC set to  0.000000
4/4/2012	9:18:48 AM	H2 MFC set to  0.000000
4/4/2012	9:18:48 AM	BCl3 MFC set to  0.000000
4/4/2012	9:18:48 AM	PH3 MFC set to  0.000000
4/4/2012	9:18:48 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:18:48 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:18:48 AM	Tube furnace set to 0
4/4/2012	9:18:51 AM	H2 valve closed
4/4/2012	9:18:51 AM	BCl3 valve closed
4/4/2012	9:18:51 AM	PH3 valve closed
4/4/2012	9:18:51 AM	SiCl4 pre valve closed
4/4/2012	9:18:51 AM	SiCl4 post valve closed
4/4/2012	9:18:51 AM	Main Vac valve closed
4/4/2012	9:18:51 AM	Bypass valve closed
4/4/2012	9:18:51 AM	Bubbler valve closed
4/4/2012	9:18:51 AM	Helium valve opened
4/4/2012	9:18:51 AM	Helium MFC set to  500.000000
4/4/2012	9:18:51 AM	H2 MFC set to  0.000000
4/4/2012	9:18:51 AM	BCl3 MFC set to  0.000000
4/4/2012	9:18:51 AM	PH3 MFC set to  0.000000
4/4/2012	9:18:51 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:18:51 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:18:51 AM	Tube furnace set to 0
4/4/2012	9:19:56 AM	Helium valve closed
4/4/2012	9:19:56 AM	H2 valve closed
4/4/2012	9:19:56 AM	BCl3 valve closed
4/4/2012	9:19:56 AM	PH3 valve closed
4/4/2012	9:19:56 AM	SiCl4 pre valve closed
4/4/2012	9:19:56 AM	SiCl4 post valve closed
4/4/2012	9:19:56 AM	Main Vac valve closed
4/4/2012	9:19:56 AM	Bypass valve closed
4/4/2012	9:19:56 AM	Bubbler valve closed
4/4/2012	9:19:56 AM	Helium MFC set to  0.000000
4/4/2012	9:19:56 AM	H2 MFC set to  0.000000
4/4/2012	9:19:56 AM	BCl3 MFC set to  0.000000
4/4/2012	9:19:56 AM	PH3 MFC set to  0.000000
4/4/2012	9:19:56 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:19:56 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:19:56 AM	Tube furnace set to 0
4/4/2012	9:19:57 AM	Run finished at 9:19 AM
4/4/2012	9:19:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	9:34:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	9:34:03 AM	Recipe started at 9:34 AM
4/4/2012	9:34:03 AM	Helium valve closed
4/4/2012	9:34:03 AM	H2 valve closed
4/4/2012	9:34:03 AM	BCl3 valve closed
4/4/2012	9:34:03 AM	PH3 valve closed
4/4/2012	9:34:03 AM	SiCl4 pre valve closed
4/4/2012	9:34:03 AM	SiCl4 post valve closed
4/4/2012	9:34:03 AM	Main Vac valve closed
4/4/2012	9:34:03 AM	Bubbler valve closed
4/4/2012	9:34:03 AM	Bypass valve opened
4/4/2012	9:34:03 AM	Helium MFC set to  0.000000
4/4/2012	9:34:03 AM	H2 MFC set to  0.000000
4/4/2012	9:34:03 AM	BCl3 MFC set to  0.000000
4/4/2012	9:34:03 AM	PH3 MFC set to  0.000000
4/4/2012	9:34:03 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:34:03 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:34:03 AM	Tube furnace set to 0
4/4/2012	9:35:08 AM	Helium valve closed
4/4/2012	9:35:08 AM	H2 valve closed
4/4/2012	9:35:08 AM	BCl3 valve closed
4/4/2012	9:35:08 AM	PH3 valve closed
4/4/2012	9:35:08 AM	SiCl4 pre valve closed
4/4/2012	9:35:08 AM	SiCl4 post valve closed
4/4/2012	9:35:08 AM	Main Vac valve closed
4/4/2012	9:35:08 AM	Bubbler valve closed
4/4/2012	9:35:08 AM	Bypass valve opened
4/4/2012	9:35:08 AM	Helium MFC set to  0.000000
4/4/2012	9:35:08 AM	H2 MFC set to  0.000000
4/4/2012	9:35:08 AM	BCl3 MFC set to  0.000000
4/4/2012	9:35:08 AM	PH3 MFC set to  0.000000
4/4/2012	9:35:08 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:35:08 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:35:08 AM	Tube furnace set to 0
4/4/2012	9:36:08 AM	Helium valve closed
4/4/2012	9:36:08 AM	H2 valve closed
4/4/2012	9:36:08 AM	BCl3 valve closed
4/4/2012	9:36:08 AM	PH3 valve closed
4/4/2012	9:36:08 AM	SiCl4 pre valve closed
4/4/2012	9:36:08 AM	SiCl4 post valve closed
4/4/2012	9:36:08 AM	Bypass valve closed
4/4/2012	9:36:08 AM	Bubbler valve closed
4/4/2012	9:36:08 AM	Main Vac valve opened
4/4/2012	9:36:08 AM	Helium MFC set to  0.000000
4/4/2012	9:36:08 AM	H2 MFC set to  0.000000
4/4/2012	9:36:08 AM	BCl3 MFC set to  0.000000
4/4/2012	9:36:08 AM	PH3 MFC set to  0.000000
4/4/2012	9:36:08 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:36:08 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:36:09 AM	Tube furnace set to 0
4/4/2012	9:36:10 AM	Run finished at 9:36 AM
4/4/2012	9:36:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	9:40:44 AM	Main Vac valve closed
4/4/2012	9:40:46 AM	Main Vac valve opened
4/4/2012	9:42:43 AM	Main Vac valve closed
4/4/2012	9:42:49 AM	Main Vac valve opened
4/4/2012	9:43:22 AM	Recipe started at 9:43 AM
4/4/2012	9:43:22 AM	Helium valve closed
4/4/2012	9:43:22 AM	H2 valve closed
4/4/2012	9:43:22 AM	BCl3 valve closed
4/4/2012	9:43:22 AM	PH3 valve closed
4/4/2012	9:43:22 AM	SiCl4 pre valve closed
4/4/2012	9:43:22 AM	SiCl4 post valve closed
4/4/2012	9:43:22 AM	Bypass valve closed
4/4/2012	9:43:22 AM	Bubbler valve closed
4/4/2012	9:43:22 AM	Main Vac valve opened
4/4/2012	9:43:22 AM	Helium MFC set to  0.000000
4/4/2012	9:43:22 AM	H2 MFC set to  0.000000
4/4/2012	9:43:22 AM	BCl3 MFC set to  0.000000
4/4/2012	9:43:22 AM	PH3 MFC set to  0.000000
4/4/2012	9:43:22 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:43:22 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:43:22 AM	Tube furnace set to 0
4/4/2012	9:43:52 AM	H2 valve closed
4/4/2012	9:43:52 AM	BCl3 valve closed
4/4/2012	9:43:52 AM	PH3 valve closed
4/4/2012	9:43:52 AM	SiCl4 pre valve closed
4/4/2012	9:43:52 AM	SiCl4 post valve closed
4/4/2012	9:43:52 AM	Bypass valve closed
4/4/2012	9:43:52 AM	Bubbler valve closed
4/4/2012	9:43:52 AM	Helium valve opened
4/4/2012	9:43:52 AM	Main Vac valve opened
4/4/2012	9:43:52 AM	Helium MFC set to  20.000000
4/4/2012	9:43:52 AM	H2 MFC set to  0.000000
4/4/2012	9:43:52 AM	BCl3 MFC set to  0.000000
4/4/2012	9:43:52 AM	PH3 MFC set to  0.000000
4/4/2012	9:43:52 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:43:52 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:43:53 AM	Tube furnace set to 0
4/4/2012	9:44:23 AM	Helium valve closed
4/4/2012	9:44:23 AM	H2 valve closed
4/4/2012	9:44:23 AM	BCl3 valve closed
4/4/2012	9:44:23 AM	PH3 valve closed
4/4/2012	9:44:23 AM	SiCl4 pre valve closed
4/4/2012	9:44:23 AM	SiCl4 post valve closed
4/4/2012	9:44:23 AM	Bypass valve closed
4/4/2012	9:44:23 AM	Bubbler valve closed
4/4/2012	9:44:23 AM	Main Vac valve opened
4/4/2012	9:44:23 AM	Helium MFC set to  0.000000
4/4/2012	9:44:23 AM	H2 MFC set to  0.000000
4/4/2012	9:44:23 AM	BCl3 MFC set to  0.000000
4/4/2012	9:44:23 AM	PH3 MFC set to  0.000000
4/4/2012	9:44:23 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:44:23 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:44:23 AM	Tube furnace set to 0
4/4/2012	9:44:53 AM	H2 valve closed
4/4/2012	9:44:53 AM	BCl3 valve closed
4/4/2012	9:44:53 AM	PH3 valve closed
4/4/2012	9:44:53 AM	SiCl4 pre valve closed
4/4/2012	9:44:53 AM	SiCl4 post valve closed
4/4/2012	9:44:53 AM	Bypass valve closed
4/4/2012	9:44:53 AM	Bubbler valve closed
4/4/2012	9:44:53 AM	Helium valve opened
4/4/2012	9:44:53 AM	Main Vac valve opened
4/4/2012	9:44:53 AM	Helium MFC set to  20.000000
4/4/2012	9:44:53 AM	H2 MFC set to  0.000000
4/4/2012	9:44:53 AM	BCl3 MFC set to  0.000000
4/4/2012	9:44:53 AM	PH3 MFC set to  0.000000
4/4/2012	9:44:53 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:44:53 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:44:53 AM	Tube furnace set to 0
4/4/2012	9:45:23 AM	Helium valve closed
4/4/2012	9:45:23 AM	H2 valve closed
4/4/2012	9:45:23 AM	BCl3 valve closed
4/4/2012	9:45:23 AM	PH3 valve closed
4/4/2012	9:45:23 AM	SiCl4 pre valve closed
4/4/2012	9:45:23 AM	SiCl4 post valve closed
4/4/2012	9:45:23 AM	Bypass valve closed
4/4/2012	9:45:23 AM	Bubbler valve closed
4/4/2012	9:45:23 AM	Main Vac valve opened
4/4/2012	9:45:23 AM	Helium MFC set to  0.000000
4/4/2012	9:45:23 AM	H2 MFC set to  0.000000
4/4/2012	9:45:23 AM	BCl3 MFC set to  0.000000
4/4/2012	9:45:23 AM	PH3 MFC set to  0.000000
4/4/2012	9:45:23 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:45:23 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:45:23 AM	Tube furnace set to 0
4/4/2012	9:45:53 AM	H2 valve closed
4/4/2012	9:45:53 AM	BCl3 valve closed
4/4/2012	9:45:53 AM	PH3 valve closed
4/4/2012	9:45:53 AM	SiCl4 pre valve closed
4/4/2012	9:45:53 AM	SiCl4 post valve closed
4/4/2012	9:45:53 AM	Bypass valve closed
4/4/2012	9:45:53 AM	Bubbler valve closed
4/4/2012	9:45:53 AM	Helium valve opened
4/4/2012	9:45:53 AM	Main Vac valve opened
4/4/2012	9:45:53 AM	Helium MFC set to  20.000000
4/4/2012	9:45:53 AM	H2 MFC set to  0.000000
4/4/2012	9:45:53 AM	BCl3 MFC set to  0.000000
4/4/2012	9:45:53 AM	PH3 MFC set to  0.000000
4/4/2012	9:45:53 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:45:53 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:45:53 AM	Tube furnace set to 0
4/4/2012	9:46:24 AM	Helium valve closed
4/4/2012	9:46:24 AM	H2 valve closed
4/4/2012	9:46:24 AM	BCl3 valve closed
4/4/2012	9:46:24 AM	PH3 valve closed
4/4/2012	9:46:24 AM	SiCl4 pre valve closed
4/4/2012	9:46:24 AM	SiCl4 post valve closed
4/4/2012	9:46:24 AM	Bypass valve closed
4/4/2012	9:46:24 AM	Bubbler valve closed
4/4/2012	9:46:24 AM	Main Vac valve opened
4/4/2012	9:46:24 AM	Helium MFC set to  0.000000
4/4/2012	9:46:24 AM	H2 MFC set to  0.000000
4/4/2012	9:46:24 AM	BCl3 MFC set to  0.000000
4/4/2012	9:46:24 AM	PH3 MFC set to  0.000000
4/4/2012	9:46:24 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:46:24 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:46:24 AM	Tube furnace set to 0
4/4/2012	9:46:54 AM	H2 valve closed
4/4/2012	9:46:54 AM	BCl3 valve closed
4/4/2012	9:46:54 AM	PH3 valve closed
4/4/2012	9:46:54 AM	SiCl4 pre valve closed
4/4/2012	9:46:54 AM	SiCl4 post valve closed
4/4/2012	9:46:54 AM	Bypass valve closed
4/4/2012	9:46:54 AM	Bubbler valve closed
4/4/2012	9:46:54 AM	Helium valve opened
4/4/2012	9:46:54 AM	Main Vac valve opened
4/4/2012	9:46:54 AM	Helium MFC set to  20.000000
4/4/2012	9:46:54 AM	H2 MFC set to  0.000000
4/4/2012	9:46:54 AM	BCl3 MFC set to  0.000000
4/4/2012	9:46:54 AM	PH3 MFC set to  0.000000
4/4/2012	9:46:54 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:46:54 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:46:54 AM	Tube furnace set to 0
4/4/2012	9:47:24 AM	Helium valve closed
4/4/2012	9:47:24 AM	H2 valve closed
4/4/2012	9:47:24 AM	BCl3 valve closed
4/4/2012	9:47:24 AM	PH3 valve closed
4/4/2012	9:47:24 AM	SiCl4 pre valve closed
4/4/2012	9:47:24 AM	SiCl4 post valve closed
4/4/2012	9:47:24 AM	Bypass valve closed
4/4/2012	9:47:24 AM	Bubbler valve closed
4/4/2012	9:47:24 AM	Main Vac valve opened
4/4/2012	9:47:24 AM	Helium MFC set to  0.000000
4/4/2012	9:47:24 AM	H2 MFC set to  0.000000
4/4/2012	9:47:24 AM	BCl3 MFC set to  0.000000
4/4/2012	9:47:24 AM	PH3 MFC set to  0.000000
4/4/2012	9:47:24 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:47:24 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:47:24 AM	Tube furnace set to 0
4/4/2012	9:47:54 AM	H2 valve closed
4/4/2012	9:47:54 AM	BCl3 valve closed
4/4/2012	9:47:54 AM	PH3 valve closed
4/4/2012	9:47:54 AM	SiCl4 pre valve closed
4/4/2012	9:47:54 AM	SiCl4 post valve closed
4/4/2012	9:47:54 AM	Bypass valve closed
4/4/2012	9:47:54 AM	Bubbler valve closed
4/4/2012	9:47:54 AM	Helium valve opened
4/4/2012	9:47:54 AM	Main Vac valve opened
4/4/2012	9:47:54 AM	Helium MFC set to  20.000000
4/4/2012	9:47:54 AM	H2 MFC set to  0.000000
4/4/2012	9:47:54 AM	BCl3 MFC set to  0.000000
4/4/2012	9:47:54 AM	PH3 MFC set to  0.000000
4/4/2012	9:47:54 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:47:54 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:47:54 AM	Tube furnace set to 0
4/4/2012	9:48:24 AM	Helium valve closed
4/4/2012	9:48:24 AM	H2 valve closed
4/4/2012	9:48:24 AM	BCl3 valve closed
4/4/2012	9:48:24 AM	PH3 valve closed
4/4/2012	9:48:24 AM	SiCl4 pre valve closed
4/4/2012	9:48:24 AM	SiCl4 post valve closed
4/4/2012	9:48:24 AM	Bypass valve closed
4/4/2012	9:48:24 AM	Bubbler valve closed
4/4/2012	9:48:24 AM	Main Vac valve opened
4/4/2012	9:48:25 AM	Helium MFC set to  0.000000
4/4/2012	9:48:25 AM	H2 MFC set to  0.000000
4/4/2012	9:48:25 AM	BCl3 MFC set to  0.000000
4/4/2012	9:48:25 AM	PH3 MFC set to  0.000000
4/4/2012	9:48:25 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:48:25 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:48:25 AM	Tube furnace set to 0
4/4/2012	9:48:55 AM	H2 valve closed
4/4/2012	9:48:55 AM	BCl3 valve closed
4/4/2012	9:48:55 AM	PH3 valve closed
4/4/2012	9:48:55 AM	SiCl4 pre valve closed
4/4/2012	9:48:55 AM	SiCl4 post valve closed
4/4/2012	9:48:55 AM	Bypass valve closed
4/4/2012	9:48:55 AM	Bubbler valve closed
4/4/2012	9:48:55 AM	Helium valve opened
4/4/2012	9:48:55 AM	Main Vac valve opened
4/4/2012	9:48:55 AM	Helium MFC set to  20.000000
4/4/2012	9:48:55 AM	H2 MFC set to  0.000000
4/4/2012	9:48:55 AM	BCl3 MFC set to  0.000000
4/4/2012	9:48:55 AM	PH3 MFC set to  0.000000
4/4/2012	9:48:55 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:48:55 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:48:55 AM	Tube furnace set to 0
4/4/2012	9:49:25 AM	Helium valve closed
4/4/2012	9:49:25 AM	H2 valve closed
4/4/2012	9:49:25 AM	BCl3 valve closed
4/4/2012	9:49:25 AM	PH3 valve closed
4/4/2012	9:49:25 AM	SiCl4 pre valve closed
4/4/2012	9:49:25 AM	SiCl4 post valve closed
4/4/2012	9:49:25 AM	Bypass valve closed
4/4/2012	9:49:25 AM	Bubbler valve closed
4/4/2012	9:49:25 AM	Main Vac valve opened
4/4/2012	9:49:25 AM	Helium MFC set to  0.000000
4/4/2012	9:49:25 AM	H2 MFC set to  0.000000
4/4/2012	9:49:25 AM	BCl3 MFC set to  0.000000
4/4/2012	9:49:25 AM	PH3 MFC set to  0.000000
4/4/2012	9:49:25 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:49:25 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:49:25 AM	Tube furnace set to 0
4/4/2012	9:49:55 AM	H2 valve closed
4/4/2012	9:49:55 AM	BCl3 valve closed
4/4/2012	9:49:55 AM	PH3 valve closed
4/4/2012	9:49:55 AM	SiCl4 pre valve closed
4/4/2012	9:49:55 AM	SiCl4 post valve closed
4/4/2012	9:49:55 AM	Bypass valve closed
4/4/2012	9:49:55 AM	Bubbler valve closed
4/4/2012	9:49:55 AM	Helium valve opened
4/4/2012	9:49:55 AM	Main Vac valve opened
4/4/2012	9:49:55 AM	Helium MFC set to  20.000000
4/4/2012	9:49:55 AM	H2 MFC set to  0.000000
4/4/2012	9:49:55 AM	BCl3 MFC set to  0.000000
4/4/2012	9:49:55 AM	PH3 MFC set to  0.000000
4/4/2012	9:49:55 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:49:55 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:49:55 AM	Tube furnace set to 0
4/4/2012	9:50:25 AM	Helium valve closed
4/4/2012	9:50:25 AM	H2 valve closed
4/4/2012	9:50:25 AM	BCl3 valve closed
4/4/2012	9:50:25 AM	PH3 valve closed
4/4/2012	9:50:25 AM	SiCl4 pre valve closed
4/4/2012	9:50:25 AM	SiCl4 post valve closed
4/4/2012	9:50:25 AM	Bypass valve closed
4/4/2012	9:50:25 AM	Bubbler valve closed
4/4/2012	9:50:25 AM	Main Vac valve opened
4/4/2012	9:50:25 AM	Helium MFC set to  0.000000
4/4/2012	9:50:25 AM	H2 MFC set to  0.000000
4/4/2012	9:50:25 AM	BCl3 MFC set to  0.000000
4/4/2012	9:50:25 AM	PH3 MFC set to  0.000000
4/4/2012	9:50:25 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:50:25 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:50:26 AM	Tube furnace set to 0
4/4/2012	9:50:56 AM	H2 valve closed
4/4/2012	9:50:56 AM	BCl3 valve closed
4/4/2012	9:50:56 AM	PH3 valve closed
4/4/2012	9:50:56 AM	SiCl4 pre valve closed
4/4/2012	9:50:56 AM	SiCl4 post valve closed
4/4/2012	9:50:56 AM	Bypass valve closed
4/4/2012	9:50:56 AM	Bubbler valve closed
4/4/2012	9:50:56 AM	Helium valve opened
4/4/2012	9:50:56 AM	Main Vac valve opened
4/4/2012	9:50:56 AM	Helium MFC set to  20.000000
4/4/2012	9:50:56 AM	H2 MFC set to  0.000000
4/4/2012	9:50:56 AM	BCl3 MFC set to  0.000000
4/4/2012	9:50:56 AM	PH3 MFC set to  0.000000
4/4/2012	9:50:56 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:50:56 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:50:56 AM	Tube furnace set to 0
4/4/2012	9:51:26 AM	Helium valve closed
4/4/2012	9:51:26 AM	H2 valve closed
4/4/2012	9:51:26 AM	BCl3 valve closed
4/4/2012	9:51:26 AM	PH3 valve closed
4/4/2012	9:51:26 AM	SiCl4 pre valve closed
4/4/2012	9:51:26 AM	SiCl4 post valve closed
4/4/2012	9:51:26 AM	Bypass valve closed
4/4/2012	9:51:26 AM	Bubbler valve closed
4/4/2012	9:51:26 AM	Main Vac valve opened
4/4/2012	9:51:26 AM	Helium MFC set to  0.000000
4/4/2012	9:51:26 AM	H2 MFC set to  0.000000
4/4/2012	9:51:26 AM	BCl3 MFC set to  0.000000
4/4/2012	9:51:26 AM	PH3 MFC set to  0.000000
4/4/2012	9:51:26 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:51:26 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:51:26 AM	Tube furnace set to 0
4/4/2012	9:51:56 AM	H2 valve closed
4/4/2012	9:51:56 AM	BCl3 valve closed
4/4/2012	9:51:56 AM	PH3 valve closed
4/4/2012	9:51:56 AM	SiCl4 pre valve closed
4/4/2012	9:51:56 AM	SiCl4 post valve closed
4/4/2012	9:51:56 AM	Bypass valve closed
4/4/2012	9:51:56 AM	Bubbler valve closed
4/4/2012	9:51:56 AM	Helium valve opened
4/4/2012	9:51:56 AM	Main Vac valve opened
4/4/2012	9:51:56 AM	Helium MFC set to  20.000000
4/4/2012	9:51:56 AM	H2 MFC set to  0.000000
4/4/2012	9:51:56 AM	BCl3 MFC set to  0.000000
4/4/2012	9:51:56 AM	PH3 MFC set to  0.000000
4/4/2012	9:51:56 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:51:56 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:51:56 AM	Tube furnace set to 0
4/4/2012	9:52:26 AM	Helium valve closed
4/4/2012	9:52:26 AM	H2 valve closed
4/4/2012	9:52:26 AM	BCl3 valve closed
4/4/2012	9:52:26 AM	PH3 valve closed
4/4/2012	9:52:26 AM	SiCl4 pre valve closed
4/4/2012	9:52:26 AM	SiCl4 post valve closed
4/4/2012	9:52:26 AM	Bypass valve closed
4/4/2012	9:52:26 AM	Bubbler valve closed
4/4/2012	9:52:26 AM	Main Vac valve opened
4/4/2012	9:52:26 AM	Helium MFC set to  0.000000
4/4/2012	9:52:26 AM	H2 MFC set to  0.000000
4/4/2012	9:52:26 AM	BCl3 MFC set to  0.000000
4/4/2012	9:52:26 AM	PH3 MFC set to  0.000000
4/4/2012	9:52:26 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:52:26 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:52:27 AM	Tube furnace set to 200
4/4/2012	9:52:57 AM	H2 valve closed
4/4/2012	9:52:57 AM	BCl3 valve closed
4/4/2012	9:52:57 AM	PH3 valve closed
4/4/2012	9:52:57 AM	SiCl4 pre valve closed
4/4/2012	9:52:57 AM	SiCl4 post valve closed
4/4/2012	9:52:57 AM	Bypass valve closed
4/4/2012	9:52:57 AM	Bubbler valve closed
4/4/2012	9:52:57 AM	Helium valve opened
4/4/2012	9:52:57 AM	Main Vac valve opened
4/4/2012	9:52:57 AM	Helium MFC set to  20.000000
4/4/2012	9:52:57 AM	H2 MFC set to  0.000000
4/4/2012	9:52:57 AM	BCl3 MFC set to  0.000000
4/4/2012	9:52:57 AM	PH3 MFC set to  0.000000
4/4/2012	9:52:57 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:52:57 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:52:57 AM	Tube furnace set to 200
4/4/2012	9:53:27 AM	Helium valve closed
4/4/2012	9:53:27 AM	H2 valve closed
4/4/2012	9:53:27 AM	BCl3 valve closed
4/4/2012	9:53:27 AM	PH3 valve closed
4/4/2012	9:53:27 AM	SiCl4 pre valve closed
4/4/2012	9:53:27 AM	SiCl4 post valve closed
4/4/2012	9:53:27 AM	Bypass valve closed
4/4/2012	9:53:27 AM	Bubbler valve closed
4/4/2012	9:53:27 AM	Main Vac valve opened
4/4/2012	9:53:27 AM	Helium MFC set to  0.000000
4/4/2012	9:53:27 AM	H2 MFC set to  0.000000
4/4/2012	9:53:27 AM	BCl3 MFC set to  0.000000
4/4/2012	9:53:27 AM	PH3 MFC set to  0.000000
4/4/2012	9:53:27 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:53:27 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:53:27 AM	Tube furnace set to 200
4/4/2012	9:53:57 AM	H2 valve closed
4/4/2012	9:53:57 AM	BCl3 valve closed
4/4/2012	9:53:57 AM	PH3 valve closed
4/4/2012	9:53:57 AM	SiCl4 pre valve closed
4/4/2012	9:53:57 AM	SiCl4 post valve closed
4/4/2012	9:53:57 AM	Bypass valve closed
4/4/2012	9:53:57 AM	Bubbler valve closed
4/4/2012	9:53:57 AM	Helium valve opened
4/4/2012	9:53:57 AM	Main Vac valve opened
4/4/2012	9:53:57 AM	Helium MFC set to  20.000000
4/4/2012	9:53:57 AM	H2 MFC set to  0.000000
4/4/2012	9:53:57 AM	BCl3 MFC set to  0.000000
4/4/2012	9:53:57 AM	PH3 MFC set to  0.000000
4/4/2012	9:53:57 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:53:57 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:53:57 AM	Tube furnace set to 200
4/4/2012	9:54:27 AM	Helium valve closed
4/4/2012	9:54:27 AM	H2 valve closed
4/4/2012	9:54:27 AM	BCl3 valve closed
4/4/2012	9:54:27 AM	PH3 valve closed
4/4/2012	9:54:27 AM	SiCl4 pre valve closed
4/4/2012	9:54:27 AM	SiCl4 post valve closed
4/4/2012	9:54:27 AM	Bypass valve closed
4/4/2012	9:54:27 AM	Bubbler valve closed
4/4/2012	9:54:27 AM	Main Vac valve opened
4/4/2012	9:54:27 AM	Helium MFC set to  0.000000
4/4/2012	9:54:27 AM	H2 MFC set to  0.000000
4/4/2012	9:54:27 AM	BCl3 MFC set to  0.000000
4/4/2012	9:54:27 AM	PH3 MFC set to  0.000000
4/4/2012	9:54:27 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:54:27 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:54:27 AM	Tube furnace set to 200
4/4/2012	9:54:58 AM	H2 valve closed
4/4/2012	9:54:58 AM	BCl3 valve closed
4/4/2012	9:54:58 AM	PH3 valve closed
4/4/2012	9:54:58 AM	SiCl4 pre valve closed
4/4/2012	9:54:58 AM	SiCl4 post valve closed
4/4/2012	9:54:58 AM	Bypass valve closed
4/4/2012	9:54:58 AM	Bubbler valve closed
4/4/2012	9:54:58 AM	Helium valve opened
4/4/2012	9:54:58 AM	Main Vac valve opened
4/4/2012	9:54:58 AM	Helium MFC set to  20.000000
4/4/2012	9:54:58 AM	H2 MFC set to  0.000000
4/4/2012	9:54:58 AM	BCl3 MFC set to  0.000000
4/4/2012	9:54:58 AM	PH3 MFC set to  0.000000
4/4/2012	9:54:58 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:54:58 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:54:58 AM	Tube furnace set to 200
4/4/2012	9:55:28 AM	Helium valve closed
4/4/2012	9:55:28 AM	H2 valve closed
4/4/2012	9:55:28 AM	BCl3 valve closed
4/4/2012	9:55:28 AM	PH3 valve closed
4/4/2012	9:55:28 AM	SiCl4 pre valve closed
4/4/2012	9:55:28 AM	SiCl4 post valve closed
4/4/2012	9:55:28 AM	Bypass valve closed
4/4/2012	9:55:28 AM	Bubbler valve closed
4/4/2012	9:55:28 AM	Main Vac valve opened
4/4/2012	9:55:28 AM	Helium MFC set to  0.000000
4/4/2012	9:55:28 AM	H2 MFC set to  0.000000
4/4/2012	9:55:28 AM	BCl3 MFC set to  0.000000
4/4/2012	9:55:28 AM	PH3 MFC set to  0.000000
4/4/2012	9:55:28 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:55:28 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:55:28 AM	Tube furnace set to 200
4/4/2012	9:55:58 AM	H2 valve closed
4/4/2012	9:55:58 AM	BCl3 valve closed
4/4/2012	9:55:58 AM	PH3 valve closed
4/4/2012	9:55:58 AM	SiCl4 pre valve closed
4/4/2012	9:55:58 AM	SiCl4 post valve closed
4/4/2012	9:55:58 AM	Bypass valve closed
4/4/2012	9:55:58 AM	Bubbler valve closed
4/4/2012	9:55:58 AM	Helium valve opened
4/4/2012	9:55:58 AM	Main Vac valve opened
4/4/2012	9:55:58 AM	Helium MFC set to  20.000000
4/4/2012	9:55:58 AM	H2 MFC set to  0.000000
4/4/2012	9:55:58 AM	BCl3 MFC set to  0.000000
4/4/2012	9:55:58 AM	PH3 MFC set to  0.000000
4/4/2012	9:55:58 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:55:58 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:55:58 AM	Tube furnace set to 200
4/4/2012	9:56:28 AM	Helium valve closed
4/4/2012	9:56:28 AM	H2 valve closed
4/4/2012	9:56:28 AM	BCl3 valve closed
4/4/2012	9:56:28 AM	PH3 valve closed
4/4/2012	9:56:28 AM	SiCl4 pre valve closed
4/4/2012	9:56:28 AM	SiCl4 post valve closed
4/4/2012	9:56:28 AM	Bypass valve closed
4/4/2012	9:56:28 AM	Bubbler valve closed
4/4/2012	9:56:28 AM	Main Vac valve opened
4/4/2012	9:56:28 AM	Helium MFC set to  0.000000
4/4/2012	9:56:28 AM	H2 MFC set to  0.000000
4/4/2012	9:56:28 AM	BCl3 MFC set to  0.000000
4/4/2012	9:56:28 AM	PH3 MFC set to  0.000000
4/4/2012	9:56:28 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:56:28 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:56:28 AM	Tube furnace set to 200
4/4/2012	9:56:58 AM	H2 valve closed
4/4/2012	9:56:58 AM	BCl3 valve closed
4/4/2012	9:56:58 AM	PH3 valve closed
4/4/2012	9:56:58 AM	SiCl4 pre valve closed
4/4/2012	9:56:58 AM	SiCl4 post valve closed
4/4/2012	9:56:58 AM	Bypass valve closed
4/4/2012	9:56:58 AM	Bubbler valve closed
4/4/2012	9:56:58 AM	Helium valve opened
4/4/2012	9:56:58 AM	Main Vac valve opened
4/4/2012	9:56:59 AM	Helium MFC set to  20.000000
4/4/2012	9:56:59 AM	H2 MFC set to  0.000000
4/4/2012	9:56:59 AM	BCl3 MFC set to  0.000000
4/4/2012	9:56:59 AM	PH3 MFC set to  0.000000
4/4/2012	9:56:59 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:56:59 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:56:59 AM	Tube furnace set to 200
4/4/2012	9:57:29 AM	Helium valve closed
4/4/2012	9:57:29 AM	H2 valve closed
4/4/2012	9:57:29 AM	BCl3 valve closed
4/4/2012	9:57:29 AM	PH3 valve closed
4/4/2012	9:57:29 AM	SiCl4 pre valve closed
4/4/2012	9:57:29 AM	SiCl4 post valve closed
4/4/2012	9:57:29 AM	Bypass valve closed
4/4/2012	9:57:29 AM	Bubbler valve closed
4/4/2012	9:57:29 AM	Main Vac valve opened
4/4/2012	9:57:29 AM	Helium MFC set to  0.000000
4/4/2012	9:57:29 AM	H2 MFC set to  0.000000
4/4/2012	9:57:29 AM	BCl3 MFC set to  0.000000
4/4/2012	9:57:29 AM	PH3 MFC set to  0.000000
4/4/2012	9:57:29 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:57:29 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:57:29 AM	Tube furnace set to 200
4/4/2012	9:57:59 AM	H2 valve closed
4/4/2012	9:57:59 AM	BCl3 valve closed
4/4/2012	9:57:59 AM	PH3 valve closed
4/4/2012	9:57:59 AM	SiCl4 pre valve closed
4/4/2012	9:57:59 AM	SiCl4 post valve closed
4/4/2012	9:57:59 AM	Bypass valve closed
4/4/2012	9:57:59 AM	Bubbler valve closed
4/4/2012	9:57:59 AM	Helium valve opened
4/4/2012	9:57:59 AM	Main Vac valve opened
4/4/2012	9:57:59 AM	Helium MFC set to  20.000000
4/4/2012	9:57:59 AM	H2 MFC set to  0.000000
4/4/2012	9:57:59 AM	BCl3 MFC set to  0.000000
4/4/2012	9:57:59 AM	PH3 MFC set to  0.000000
4/4/2012	9:57:59 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:57:59 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:57:59 AM	Tube furnace set to 200
4/4/2012	9:58:29 AM	Helium valve closed
4/4/2012	9:58:29 AM	H2 valve closed
4/4/2012	9:58:29 AM	BCl3 valve closed
4/4/2012	9:58:29 AM	PH3 valve closed
4/4/2012	9:58:29 AM	SiCl4 pre valve closed
4/4/2012	9:58:29 AM	SiCl4 post valve closed
4/4/2012	9:58:29 AM	Bypass valve closed
4/4/2012	9:58:29 AM	Bubbler valve closed
4/4/2012	9:58:29 AM	Main Vac valve opened
4/4/2012	9:58:29 AM	Helium MFC set to  0.000000
4/4/2012	9:58:29 AM	H2 MFC set to  0.000000
4/4/2012	9:58:29 AM	BCl3 MFC set to  0.000000
4/4/2012	9:58:29 AM	PH3 MFC set to  0.000000
4/4/2012	9:58:29 AM	SiCl4 MFC set to  0.000000
4/4/2012	9:58:29 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:58:29 AM	Tube furnace set to 0
4/4/2012	9:58:30 AM	Run finished at 9:58 AM
4/4/2012	10:04:40 AM	Main Vac valve closed
4/4/2012	10:04:59 AM	Main Vac valve opened
4/4/2012	10:05:37 AM	Recipe started at 10:05 AM
4/4/2012	10:05:37 AM	Helium valve closed
4/4/2012	10:05:37 AM	H2 valve closed
4/4/2012	10:05:37 AM	BCl3 valve closed
4/4/2012	10:05:37 AM	PH3 valve closed
4/4/2012	10:05:37 AM	SiCl4 pre valve closed
4/4/2012	10:05:37 AM	SiCl4 post valve closed
4/4/2012	10:05:37 AM	Bypass valve closed
4/4/2012	10:05:37 AM	Bubbler valve closed
4/4/2012	10:05:37 AM	Main Vac valve opened
4/4/2012	10:05:37 AM	Helium MFC set to  0.000000
4/4/2012	10:05:37 AM	H2 MFC set to  0.000000
4/4/2012	10:05:37 AM	BCl3 MFC set to  0.000000
4/4/2012	10:05:37 AM	PH3 MFC set to  0.000000
4/4/2012	10:05:37 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:05:37 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:05:37 AM	Tube furnace set to 0
4/4/2012	10:05:55 AM	H2 valve closed
4/4/2012	10:05:55 AM	BCl3 valve closed
4/4/2012	10:05:55 AM	PH3 valve closed
4/4/2012	10:05:55 AM	SiCl4 pre valve closed
4/4/2012	10:05:55 AM	SiCl4 post valve closed
4/4/2012	10:05:55 AM	Bypass valve closed
4/4/2012	10:05:55 AM	Bubbler valve closed
4/4/2012	10:05:55 AM	Helium valve opened
4/4/2012	10:05:55 AM	Main Vac valve opened
4/4/2012	10:05:55 AM	Helium MFC set to  20.000000
4/4/2012	10:05:55 AM	H2 MFC set to  0.000000
4/4/2012	10:05:55 AM	BCl3 MFC set to  0.000000
4/4/2012	10:05:55 AM	PH3 MFC set to  0.000000
4/4/2012	10:05:55 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:05:55 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:05:55 AM	Tube furnace set to 0
4/4/2012	10:05:56 AM	Helium valve closed
4/4/2012	10:05:56 AM	H2 valve closed
4/4/2012	10:05:56 AM	BCl3 valve closed
4/4/2012	10:05:56 AM	PH3 valve closed
4/4/2012	10:05:56 AM	SiCl4 pre valve closed
4/4/2012	10:05:56 AM	SiCl4 post valve closed
4/4/2012	10:05:56 AM	Bypass valve closed
4/4/2012	10:05:56 AM	Bubbler valve closed
4/4/2012	10:05:56 AM	Main Vac valve opened
4/4/2012	10:05:56 AM	Helium MFC set to  0.000000
4/4/2012	10:05:56 AM	H2 MFC set to  0.000000
4/4/2012	10:05:56 AM	BCl3 MFC set to  0.000000
4/4/2012	10:05:56 AM	PH3 MFC set to  0.000000
4/4/2012	10:05:56 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:05:56 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:05:56 AM	Tube furnace set to 0
4/4/2012	10:05:57 AM	H2 valve closed
4/4/2012	10:05:57 AM	BCl3 valve closed
4/4/2012	10:05:57 AM	PH3 valve closed
4/4/2012	10:05:57 AM	SiCl4 pre valve closed
4/4/2012	10:05:57 AM	SiCl4 post valve closed
4/4/2012	10:05:57 AM	Bypass valve closed
4/4/2012	10:05:57 AM	Bubbler valve closed
4/4/2012	10:05:57 AM	Helium valve opened
4/4/2012	10:05:57 AM	Main Vac valve opened
4/4/2012	10:05:57 AM	Helium MFC set to  20.000000
4/4/2012	10:05:57 AM	H2 MFC set to  0.000000
4/4/2012	10:05:57 AM	BCl3 MFC set to  0.000000
4/4/2012	10:05:57 AM	PH3 MFC set to  0.000000
4/4/2012	10:05:57 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:05:57 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:05:57 AM	Tube furnace set to 0
4/4/2012	10:05:58 AM	Helium valve closed
4/4/2012	10:05:58 AM	H2 valve closed
4/4/2012	10:05:58 AM	BCl3 valve closed
4/4/2012	10:05:58 AM	PH3 valve closed
4/4/2012	10:05:58 AM	SiCl4 pre valve closed
4/4/2012	10:05:58 AM	SiCl4 post valve closed
4/4/2012	10:05:58 AM	Bypass valve closed
4/4/2012	10:05:58 AM	Bubbler valve closed
4/4/2012	10:05:58 AM	Main Vac valve opened
4/4/2012	10:05:58 AM	Helium MFC set to  0.000000
4/4/2012	10:05:58 AM	H2 MFC set to  0.000000
4/4/2012	10:05:58 AM	BCl3 MFC set to  0.000000
4/4/2012	10:05:58 AM	PH3 MFC set to  0.000000
4/4/2012	10:05:58 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:05:58 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:05:58 AM	Tube furnace set to 0
4/4/2012	10:05:59 AM	H2 valve closed
4/4/2012	10:05:59 AM	BCl3 valve closed
4/4/2012	10:05:59 AM	PH3 valve closed
4/4/2012	10:05:59 AM	SiCl4 pre valve closed
4/4/2012	10:05:59 AM	SiCl4 post valve closed
4/4/2012	10:05:59 AM	Bypass valve closed
4/4/2012	10:05:59 AM	Bubbler valve closed
4/4/2012	10:05:59 AM	Helium valve opened
4/4/2012	10:05:59 AM	Main Vac valve opened
4/4/2012	10:05:59 AM	Helium MFC set to  20.000000
4/4/2012	10:05:59 AM	H2 MFC set to  0.000000
4/4/2012	10:05:59 AM	BCl3 MFC set to  0.000000
4/4/2012	10:05:59 AM	PH3 MFC set to  0.000000
4/4/2012	10:05:59 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:05:59 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:05:59 AM	Tube furnace set to 0
4/4/2012	10:05:59 AM	Helium valve closed
4/4/2012	10:05:59 AM	H2 valve closed
4/4/2012	10:05:59 AM	BCl3 valve closed
4/4/2012	10:05:59 AM	PH3 valve closed
4/4/2012	10:05:59 AM	SiCl4 pre valve closed
4/4/2012	10:05:59 AM	SiCl4 post valve closed
4/4/2012	10:05:59 AM	Bypass valve closed
4/4/2012	10:05:59 AM	Bubbler valve closed
4/4/2012	10:05:59 AM	Main Vac valve opened
4/4/2012	10:05:59 AM	Helium MFC set to  0.000000
4/4/2012	10:05:59 AM	H2 MFC set to  0.000000
4/4/2012	10:05:59 AM	BCl3 MFC set to  0.000000
4/4/2012	10:06:00 AM	PH3 MFC set to  0.000000
4/4/2012	10:06:00 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:06:00 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:06:00 AM	Tube furnace set to 0
4/4/2012	10:06:00 AM	H2 valve closed
4/4/2012	10:06:00 AM	BCl3 valve closed
4/4/2012	10:06:00 AM	PH3 valve closed
4/4/2012	10:06:00 AM	SiCl4 pre valve closed
4/4/2012	10:06:00 AM	SiCl4 post valve closed
4/4/2012	10:06:00 AM	Bypass valve closed
4/4/2012	10:06:00 AM	Bubbler valve closed
4/4/2012	10:06:00 AM	Helium valve opened
4/4/2012	10:06:00 AM	Main Vac valve opened
4/4/2012	10:06:00 AM	Helium MFC set to  20.000000
4/4/2012	10:06:00 AM	H2 MFC set to  0.000000
4/4/2012	10:06:00 AM	BCl3 MFC set to  0.000000
4/4/2012	10:06:00 AM	PH3 MFC set to  0.000000
4/4/2012	10:06:00 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:06:00 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:06:01 AM	Tube furnace set to 0
4/4/2012	10:06:01 AM	Helium valve closed
4/4/2012	10:06:01 AM	H2 valve closed
4/4/2012	10:06:01 AM	BCl3 valve closed
4/4/2012	10:06:01 AM	PH3 valve closed
4/4/2012	10:06:01 AM	SiCl4 pre valve closed
4/4/2012	10:06:01 AM	SiCl4 post valve closed
4/4/2012	10:06:01 AM	Bypass valve closed
4/4/2012	10:06:01 AM	Bubbler valve closed
4/4/2012	10:06:01 AM	Main Vac valve opened
4/4/2012	10:06:01 AM	Helium MFC set to  0.000000
4/4/2012	10:06:01 AM	H2 MFC set to  0.000000
4/4/2012	10:06:01 AM	BCl3 MFC set to  0.000000
4/4/2012	10:06:01 AM	PH3 MFC set to  0.000000
4/4/2012	10:06:01 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:06:01 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:06:01 AM	Tube furnace set to 0
4/4/2012	10:06:02 AM	H2 valve closed
4/4/2012	10:06:02 AM	BCl3 valve closed
4/4/2012	10:06:02 AM	PH3 valve closed
4/4/2012	10:06:02 AM	SiCl4 pre valve closed
4/4/2012	10:06:02 AM	SiCl4 post valve closed
4/4/2012	10:06:02 AM	Bypass valve closed
4/4/2012	10:06:02 AM	Bubbler valve closed
4/4/2012	10:06:02 AM	Helium valve opened
4/4/2012	10:06:02 AM	Main Vac valve opened
4/4/2012	10:06:02 AM	Helium MFC set to  20.000000
4/4/2012	10:06:02 AM	H2 MFC set to  0.000000
4/4/2012	10:06:02 AM	BCl3 MFC set to  0.000000
4/4/2012	10:06:02 AM	PH3 MFC set to  0.000000
4/4/2012	10:06:02 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:06:02 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:06:02 AM	Tube furnace set to 0
4/4/2012	10:06:03 AM	Helium valve closed
4/4/2012	10:06:03 AM	H2 valve closed
4/4/2012	10:06:03 AM	BCl3 valve closed
4/4/2012	10:06:03 AM	PH3 valve closed
4/4/2012	10:06:03 AM	SiCl4 pre valve closed
4/4/2012	10:06:03 AM	SiCl4 post valve closed
4/4/2012	10:06:03 AM	Bypass valve closed
4/4/2012	10:06:03 AM	Bubbler valve closed
4/4/2012	10:06:03 AM	Main Vac valve opened
4/4/2012	10:06:03 AM	Helium MFC set to  0.000000
4/4/2012	10:06:03 AM	H2 MFC set to  0.000000
4/4/2012	10:06:03 AM	BCl3 MFC set to  0.000000
4/4/2012	10:06:03 AM	PH3 MFC set to  0.000000
4/4/2012	10:06:03 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:06:03 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:06:03 AM	Tube furnace set to 0
4/4/2012	10:06:03 AM	H2 valve closed
4/4/2012	10:06:03 AM	BCl3 valve closed
4/4/2012	10:06:03 AM	PH3 valve closed
4/4/2012	10:06:03 AM	SiCl4 pre valve closed
4/4/2012	10:06:03 AM	SiCl4 post valve closed
4/4/2012	10:06:03 AM	Bypass valve closed
4/4/2012	10:06:03 AM	Bubbler valve closed
4/4/2012	10:06:03 AM	Helium valve opened
4/4/2012	10:06:03 AM	Main Vac valve opened
4/4/2012	10:06:03 AM	Helium MFC set to  20.000000
4/4/2012	10:06:03 AM	H2 MFC set to  0.000000
4/4/2012	10:06:03 AM	BCl3 MFC set to  0.000000
4/4/2012	10:06:03 AM	PH3 MFC set to  0.000000
4/4/2012	10:06:03 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:06:03 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:06:04 AM	Tube furnace set to 0
4/4/2012	10:06:04 AM	Helium valve closed
4/4/2012	10:06:04 AM	H2 valve closed
4/4/2012	10:06:04 AM	BCl3 valve closed
4/4/2012	10:06:04 AM	PH3 valve closed
4/4/2012	10:06:04 AM	SiCl4 pre valve closed
4/4/2012	10:06:04 AM	SiCl4 post valve closed
4/4/2012	10:06:04 AM	Bypass valve closed
4/4/2012	10:06:04 AM	Bubbler valve closed
4/4/2012	10:06:04 AM	Main Vac valve opened
4/4/2012	10:06:04 AM	Helium MFC set to  0.000000
4/4/2012	10:06:04 AM	H2 MFC set to  0.000000
4/4/2012	10:06:04 AM	BCl3 MFC set to  0.000000
4/4/2012	10:06:04 AM	PH3 MFC set to  0.000000
4/4/2012	10:06:04 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:06:04 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:06:04 AM	Tube furnace set to 0
4/4/2012	10:06:06 AM	H2 valve closed
4/4/2012	10:06:06 AM	BCl3 valve closed
4/4/2012	10:06:06 AM	PH3 valve closed
4/4/2012	10:06:06 AM	SiCl4 pre valve closed
4/4/2012	10:06:06 AM	SiCl4 post valve closed
4/4/2012	10:06:06 AM	Bypass valve closed
4/4/2012	10:06:06 AM	Bubbler valve closed
4/4/2012	10:06:06 AM	Helium valve opened
4/4/2012	10:06:06 AM	Main Vac valve opened
4/4/2012	10:06:06 AM	Helium MFC set to  20.000000
4/4/2012	10:06:06 AM	H2 MFC set to  0.000000
4/4/2012	10:06:06 AM	BCl3 MFC set to  0.000000
4/4/2012	10:06:06 AM	PH3 MFC set to  0.000000
4/4/2012	10:06:06 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:06:06 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:06:07 AM	Tube furnace set to 0
4/4/2012	10:06:37 AM	Helium valve closed
4/4/2012	10:06:37 AM	H2 valve closed
4/4/2012	10:06:37 AM	BCl3 valve closed
4/4/2012	10:06:37 AM	PH3 valve closed
4/4/2012	10:06:37 AM	SiCl4 pre valve closed
4/4/2012	10:06:37 AM	SiCl4 post valve closed
4/4/2012	10:06:37 AM	Bypass valve closed
4/4/2012	10:06:37 AM	Bubbler valve closed
4/4/2012	10:06:37 AM	Main Vac valve opened
4/4/2012	10:06:37 AM	Helium MFC set to  0.000000
4/4/2012	10:06:37 AM	H2 MFC set to  0.000000
4/4/2012	10:06:37 AM	BCl3 MFC set to  0.000000
4/4/2012	10:06:37 AM	PH3 MFC set to  0.000000
4/4/2012	10:06:37 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:06:37 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:06:37 AM	Tube furnace set to 0
4/4/2012	10:07:07 AM	H2 valve closed
4/4/2012	10:07:07 AM	BCl3 valve closed
4/4/2012	10:07:07 AM	PH3 valve closed
4/4/2012	10:07:07 AM	SiCl4 pre valve closed
4/4/2012	10:07:07 AM	SiCl4 post valve closed
4/4/2012	10:07:07 AM	Bypass valve closed
4/4/2012	10:07:07 AM	Bubbler valve closed
4/4/2012	10:07:07 AM	Helium valve opened
4/4/2012	10:07:07 AM	Main Vac valve opened
4/4/2012	10:07:07 AM	Helium MFC set to  20.000000
4/4/2012	10:07:07 AM	H2 MFC set to  0.000000
4/4/2012	10:07:07 AM	BCl3 MFC set to  0.000000
4/4/2012	10:07:07 AM	PH3 MFC set to  0.000000
4/4/2012	10:07:07 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:07:07 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:07:07 AM	Tube furnace set to 0
4/4/2012	10:07:37 AM	Helium valve closed
4/4/2012	10:07:37 AM	H2 valve closed
4/4/2012	10:07:37 AM	BCl3 valve closed
4/4/2012	10:07:37 AM	PH3 valve closed
4/4/2012	10:07:37 AM	SiCl4 pre valve closed
4/4/2012	10:07:37 AM	SiCl4 post valve closed
4/4/2012	10:07:37 AM	Bypass valve closed
4/4/2012	10:07:37 AM	Bubbler valve closed
4/4/2012	10:07:37 AM	Main Vac valve opened
4/4/2012	10:07:37 AM	Helium MFC set to  0.000000
4/4/2012	10:07:37 AM	H2 MFC set to  0.000000
4/4/2012	10:07:37 AM	BCl3 MFC set to  0.000000
4/4/2012	10:07:37 AM	PH3 MFC set to  0.000000
4/4/2012	10:07:37 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:07:37 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:07:37 AM	Tube furnace set to 0
4/4/2012	10:08:07 AM	H2 valve closed
4/4/2012	10:08:07 AM	BCl3 valve closed
4/4/2012	10:08:07 AM	PH3 valve closed
4/4/2012	10:08:07 AM	SiCl4 pre valve closed
4/4/2012	10:08:07 AM	SiCl4 post valve closed
4/4/2012	10:08:07 AM	Bypass valve closed
4/4/2012	10:08:07 AM	Bubbler valve closed
4/4/2012	10:08:07 AM	Helium valve opened
4/4/2012	10:08:07 AM	Main Vac valve opened
4/4/2012	10:08:07 AM	Helium MFC set to  20.000000
4/4/2012	10:08:07 AM	H2 MFC set to  0.000000
4/4/2012	10:08:07 AM	BCl3 MFC set to  0.000000
4/4/2012	10:08:07 AM	PH3 MFC set to  0.000000
4/4/2012	10:08:07 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:08:07 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:08:07 AM	Tube furnace set to 0
4/4/2012	10:08:38 AM	Helium valve closed
4/4/2012	10:08:38 AM	H2 valve closed
4/4/2012	10:08:38 AM	BCl3 valve closed
4/4/2012	10:08:38 AM	PH3 valve closed
4/4/2012	10:08:38 AM	SiCl4 pre valve closed
4/4/2012	10:08:38 AM	SiCl4 post valve closed
4/4/2012	10:08:38 AM	Bypass valve closed
4/4/2012	10:08:38 AM	Bubbler valve closed
4/4/2012	10:08:38 AM	Main Vac valve opened
4/4/2012	10:08:38 AM	Helium MFC set to  0.000000
4/4/2012	10:08:38 AM	H2 MFC set to  0.000000
4/4/2012	10:08:38 AM	BCl3 MFC set to  0.000000
4/4/2012	10:08:38 AM	PH3 MFC set to  0.000000
4/4/2012	10:08:38 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:08:38 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:08:38 AM	Tube furnace set to 200
4/4/2012	10:09:08 AM	H2 valve closed
4/4/2012	10:09:08 AM	BCl3 valve closed
4/4/2012	10:09:08 AM	PH3 valve closed
4/4/2012	10:09:08 AM	SiCl4 pre valve closed
4/4/2012	10:09:08 AM	SiCl4 post valve closed
4/4/2012	10:09:08 AM	Bypass valve closed
4/4/2012	10:09:08 AM	Bubbler valve closed
4/4/2012	10:09:08 AM	Helium valve opened
4/4/2012	10:09:08 AM	Main Vac valve opened
4/4/2012	10:09:08 AM	Helium MFC set to  20.000000
4/4/2012	10:09:08 AM	H2 MFC set to  0.000000
4/4/2012	10:09:08 AM	BCl3 MFC set to  0.000000
4/4/2012	10:09:08 AM	PH3 MFC set to  0.000000
4/4/2012	10:09:08 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:09:08 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:09:08 AM	Tube furnace set to 200
4/4/2012	10:09:38 AM	Helium valve closed
4/4/2012	10:09:38 AM	H2 valve closed
4/4/2012	10:09:38 AM	BCl3 valve closed
4/4/2012	10:09:38 AM	PH3 valve closed
4/4/2012	10:09:38 AM	SiCl4 pre valve closed
4/4/2012	10:09:38 AM	SiCl4 post valve closed
4/4/2012	10:09:38 AM	Bypass valve closed
4/4/2012	10:09:38 AM	Bubbler valve closed
4/4/2012	10:09:38 AM	Main Vac valve opened
4/4/2012	10:09:38 AM	Helium MFC set to  0.000000
4/4/2012	10:09:38 AM	H2 MFC set to  0.000000
4/4/2012	10:09:38 AM	BCl3 MFC set to  0.000000
4/4/2012	10:09:38 AM	PH3 MFC set to  0.000000
4/4/2012	10:09:38 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:09:38 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:09:38 AM	Tube furnace set to 200
4/4/2012	10:10:08 AM	H2 valve closed
4/4/2012	10:10:08 AM	BCl3 valve closed
4/4/2012	10:10:08 AM	PH3 valve closed
4/4/2012	10:10:08 AM	SiCl4 pre valve closed
4/4/2012	10:10:08 AM	SiCl4 post valve closed
4/4/2012	10:10:08 AM	Bypass valve closed
4/4/2012	10:10:08 AM	Bubbler valve closed
4/4/2012	10:10:08 AM	Helium valve opened
4/4/2012	10:10:08 AM	Main Vac valve opened
4/4/2012	10:10:08 AM	Helium MFC set to  20.000000
4/4/2012	10:10:08 AM	H2 MFC set to  0.000000
4/4/2012	10:10:08 AM	BCl3 MFC set to  0.000000
4/4/2012	10:10:08 AM	PH3 MFC set to  0.000000
4/4/2012	10:10:08 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:10:08 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:10:08 AM	Tube furnace set to 200
4/4/2012	10:10:38 AM	Helium valve closed
4/4/2012	10:10:38 AM	H2 valve closed
4/4/2012	10:10:38 AM	BCl3 valve closed
4/4/2012	10:10:38 AM	PH3 valve closed
4/4/2012	10:10:38 AM	SiCl4 pre valve closed
4/4/2012	10:10:38 AM	SiCl4 post valve closed
4/4/2012	10:10:38 AM	Bypass valve closed
4/4/2012	10:10:38 AM	Bubbler valve closed
4/4/2012	10:10:39 AM	Main Vac valve opened
4/4/2012	10:10:39 AM	Helium MFC set to  0.000000
4/4/2012	10:10:39 AM	H2 MFC set to  0.000000
4/4/2012	10:10:39 AM	BCl3 MFC set to  0.000000
4/4/2012	10:10:39 AM	PH3 MFC set to  0.000000
4/4/2012	10:10:39 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:10:39 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:10:39 AM	Tube furnace set to 200
4/4/2012	10:11:09 AM	H2 valve closed
4/4/2012	10:11:09 AM	BCl3 valve closed
4/4/2012	10:11:09 AM	PH3 valve closed
4/4/2012	10:11:09 AM	SiCl4 pre valve closed
4/4/2012	10:11:09 AM	SiCl4 post valve closed
4/4/2012	10:11:09 AM	Bypass valve closed
4/4/2012	10:11:09 AM	Bubbler valve closed
4/4/2012	10:11:09 AM	Helium valve opened
4/4/2012	10:11:09 AM	Main Vac valve opened
4/4/2012	10:11:09 AM	Helium MFC set to  20.000000
4/4/2012	10:11:09 AM	H2 MFC set to  0.000000
4/4/2012	10:11:09 AM	BCl3 MFC set to  0.000000
4/4/2012	10:11:09 AM	PH3 MFC set to  0.000000
4/4/2012	10:11:09 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:11:09 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:11:09 AM	Tube furnace set to 200
4/4/2012	10:11:39 AM	Helium valve closed
4/4/2012	10:11:39 AM	H2 valve closed
4/4/2012	10:11:39 AM	BCl3 valve closed
4/4/2012	10:11:39 AM	PH3 valve closed
4/4/2012	10:11:39 AM	SiCl4 pre valve closed
4/4/2012	10:11:39 AM	SiCl4 post valve closed
4/4/2012	10:11:39 AM	Bypass valve closed
4/4/2012	10:11:39 AM	Bubbler valve closed
4/4/2012	10:11:39 AM	Main Vac valve opened
4/4/2012	10:11:39 AM	Helium MFC set to  0.000000
4/4/2012	10:11:39 AM	H2 MFC set to  0.000000
4/4/2012	10:11:39 AM	BCl3 MFC set to  0.000000
4/4/2012	10:11:39 AM	PH3 MFC set to  0.000000
4/4/2012	10:11:39 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:11:39 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:11:39 AM	Tube furnace set to 200
4/4/2012	10:12:09 AM	H2 valve closed
4/4/2012	10:12:09 AM	BCl3 valve closed
4/4/2012	10:12:09 AM	PH3 valve closed
4/4/2012	10:12:09 AM	SiCl4 pre valve closed
4/4/2012	10:12:09 AM	SiCl4 post valve closed
4/4/2012	10:12:09 AM	Bypass valve closed
4/4/2012	10:12:09 AM	Bubbler valve closed
4/4/2012	10:12:09 AM	Helium valve opened
4/4/2012	10:12:09 AM	Main Vac valve opened
4/4/2012	10:12:09 AM	Helium MFC set to  20.000000
4/4/2012	10:12:09 AM	H2 MFC set to  0.000000
4/4/2012	10:12:09 AM	BCl3 MFC set to  0.000000
4/4/2012	10:12:09 AM	PH3 MFC set to  0.000000
4/4/2012	10:12:09 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:12:09 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:12:09 AM	Tube furnace set to 200
4/4/2012	10:12:39 AM	Helium valve closed
4/4/2012	10:12:39 AM	H2 valve closed
4/4/2012	10:12:39 AM	BCl3 valve closed
4/4/2012	10:12:39 AM	PH3 valve closed
4/4/2012	10:12:39 AM	SiCl4 pre valve closed
4/4/2012	10:12:39 AM	SiCl4 post valve closed
4/4/2012	10:12:39 AM	Bypass valve closed
4/4/2012	10:12:39 AM	Bubbler valve closed
4/4/2012	10:12:39 AM	Main Vac valve opened
4/4/2012	10:12:39 AM	Helium MFC set to  0.000000
4/4/2012	10:12:39 AM	H2 MFC set to  0.000000
4/4/2012	10:12:39 AM	BCl3 MFC set to  0.000000
4/4/2012	10:12:39 AM	PH3 MFC set to  0.000000
4/4/2012	10:12:39 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:12:39 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:12:40 AM	Tube furnace set to 200
4/4/2012	10:13:10 AM	H2 valve closed
4/4/2012	10:13:10 AM	BCl3 valve closed
4/4/2012	10:13:10 AM	PH3 valve closed
4/4/2012	10:13:10 AM	SiCl4 pre valve closed
4/4/2012	10:13:10 AM	SiCl4 post valve closed
4/4/2012	10:13:10 AM	Bypass valve closed
4/4/2012	10:13:10 AM	Bubbler valve closed
4/4/2012	10:13:10 AM	Helium valve opened
4/4/2012	10:13:10 AM	Main Vac valve opened
4/4/2012	10:13:10 AM	Helium MFC set to  20.000000
4/4/2012	10:13:10 AM	H2 MFC set to  0.000000
4/4/2012	10:13:10 AM	BCl3 MFC set to  0.000000
4/4/2012	10:13:10 AM	PH3 MFC set to  0.000000
4/4/2012	10:13:10 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:13:10 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:13:10 AM	Tube furnace set to 200
4/4/2012	10:13:40 AM	Helium valve closed
4/4/2012	10:13:40 AM	H2 valve closed
4/4/2012	10:13:40 AM	BCl3 valve closed
4/4/2012	10:13:40 AM	PH3 valve closed
4/4/2012	10:13:40 AM	SiCl4 pre valve closed
4/4/2012	10:13:40 AM	SiCl4 post valve closed
4/4/2012	10:13:40 AM	Bypass valve closed
4/4/2012	10:13:40 AM	Bubbler valve closed
4/4/2012	10:13:40 AM	Main Vac valve opened
4/4/2012	10:13:40 AM	Helium MFC set to  0.000000
4/4/2012	10:13:40 AM	H2 MFC set to  0.000000
4/4/2012	10:13:40 AM	BCl3 MFC set to  0.000000
4/4/2012	10:13:40 AM	PH3 MFC set to  0.000000
4/4/2012	10:13:40 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:13:40 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:13:40 AM	Tube furnace set to 200
4/4/2012	10:14:10 AM	H2 valve closed
4/4/2012	10:14:10 AM	BCl3 valve closed
4/4/2012	10:14:10 AM	PH3 valve closed
4/4/2012	10:14:10 AM	SiCl4 pre valve closed
4/4/2012	10:14:10 AM	SiCl4 post valve closed
4/4/2012	10:14:10 AM	Bypass valve closed
4/4/2012	10:14:10 AM	Bubbler valve closed
4/4/2012	10:14:10 AM	Helium valve opened
4/4/2012	10:14:10 AM	Main Vac valve opened
4/4/2012	10:14:10 AM	Helium MFC set to  20.000000
4/4/2012	10:14:10 AM	H2 MFC set to  0.000000
4/4/2012	10:14:10 AM	BCl3 MFC set to  0.000000
4/4/2012	10:14:10 AM	PH3 MFC set to  0.000000
4/4/2012	10:14:10 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:14:10 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:14:10 AM	Tube furnace set to 200
4/4/2012	10:14:40 AM	Helium valve closed
4/4/2012	10:14:40 AM	H2 valve closed
4/4/2012	10:14:40 AM	BCl3 valve closed
4/4/2012	10:14:40 AM	PH3 valve closed
4/4/2012	10:14:40 AM	SiCl4 pre valve closed
4/4/2012	10:14:40 AM	SiCl4 post valve closed
4/4/2012	10:14:40 AM	Bypass valve closed
4/4/2012	10:14:40 AM	Bubbler valve closed
4/4/2012	10:14:40 AM	Main Vac valve opened
4/4/2012	10:14:40 AM	Helium MFC set to  0.000000
4/4/2012	10:14:40 AM	H2 MFC set to  0.000000
4/4/2012	10:14:40 AM	BCl3 MFC set to  0.000000
4/4/2012	10:14:40 AM	PH3 MFC set to  0.000000
4/4/2012	10:14:40 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:14:40 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:14:41 AM	Tube furnace set to 0
4/4/2012	10:14:42 AM	Run finished at 10:14 AM
4/4/2012	10:19:05 AM	Main Vac valve closed
4/4/2012	10:19:28 AM	Main Vac valve opened
4/4/2012	10:19:37 AM	Recipe started at 10:19 AM
4/4/2012	10:19:37 AM	Helium valve closed
4/4/2012	10:19:37 AM	H2 valve closed
4/4/2012	10:19:37 AM	BCl3 valve closed
4/4/2012	10:19:37 AM	PH3 valve closed
4/4/2012	10:19:37 AM	SiCl4 pre valve closed
4/4/2012	10:19:37 AM	SiCl4 post valve closed
4/4/2012	10:19:37 AM	Main Vac valve closed
4/4/2012	10:19:37 AM	Bypass valve closed
4/4/2012	10:19:37 AM	Bubbler valve closed
4/4/2012	10:19:37 AM	Helium MFC set to  0.000000
4/4/2012	10:19:37 AM	H2 MFC set to  0.000000
4/4/2012	10:19:37 AM	BCl3 MFC set to  0.000000
4/4/2012	10:19:37 AM	PH3 MFC set to  0.000000
4/4/2012	10:19:37 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:19:37 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:19:37 AM	Tube furnace set to 0
4/4/2012	10:19:40 AM	Helium valve closed
4/4/2012	10:19:40 AM	BCl3 valve closed
4/4/2012	10:19:40 AM	PH3 valve closed
4/4/2012	10:19:40 AM	SiCl4 pre valve closed
4/4/2012	10:19:40 AM	SiCl4 post valve closed
4/4/2012	10:19:40 AM	Main Vac valve closed
4/4/2012	10:19:40 AM	Bypass valve closed
4/4/2012	10:19:40 AM	Bubbler valve closed
4/4/2012	10:19:40 AM	H2 valve opened
4/4/2012	10:19:40 AM	Helium MFC set to  0.000000
4/4/2012	10:19:40 AM	H2 MFC set to  500.000000
4/4/2012	10:19:40 AM	BCl3 MFC set to  0.000000
4/4/2012	10:19:40 AM	PH3 MFC set to  0.000000
4/4/2012	10:19:40 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:19:40 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:19:41 AM	Tube furnace set to 0
4/4/2012	10:20:44 AM	Helium valve closed
4/4/2012	10:20:44 AM	BCl3 valve closed
4/4/2012	10:20:44 AM	PH3 valve closed
4/4/2012	10:20:44 AM	SiCl4 pre valve closed
4/4/2012	10:20:44 AM	SiCl4 post valve closed
4/4/2012	10:20:44 AM	Main Vac valve closed
4/4/2012	10:20:44 AM	Bypass valve closed
4/4/2012	10:20:44 AM	H2 valve opened
4/4/2012	10:20:44 AM	Bubbler valve opened
4/4/2012	10:20:44 AM	Helium MFC set to  0.000000
4/4/2012	10:20:44 AM	H2 MFC set to  500.000000
4/4/2012	10:20:44 AM	BCl3 MFC set to  0.000000
4/4/2012	10:20:44 AM	PH3 MFC set to  0.000000
4/4/2012	10:20:44 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:20:44 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:20:44 AM	Tube furnace set to 0
4/4/2012	10:20:45 AM	Helium valve closed
4/4/2012	10:20:45 AM	BCl3 valve closed
4/4/2012	10:20:45 AM	PH3 valve closed
4/4/2012	10:20:45 AM	SiCl4 pre valve closed
4/4/2012	10:20:45 AM	SiCl4 post valve closed
4/4/2012	10:20:45 AM	Main Vac valve closed
4/4/2012	10:20:45 AM	Bypass valve closed
4/4/2012	10:20:45 AM	H2 valve opened
4/4/2012	10:20:45 AM	Bubbler valve opened
4/4/2012	10:20:45 AM	Helium MFC set to  0.000000
4/4/2012	10:20:45 AM	H2 MFC set to  500.000000
4/4/2012	10:20:45 AM	BCl3 MFC set to  0.000000
4/4/2012	10:20:45 AM	PH3 MFC set to  0.000000
4/4/2012	10:20:45 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:20:45 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:20:45 AM	Tube furnace set to 1000
4/4/2012	10:40:45 AM	Helium valve closed
4/4/2012	10:40:45 AM	PH3 valve closed
4/4/2012	10:40:45 AM	Main Vac valve closed
4/4/2012	10:40:45 AM	Bypass valve closed
4/4/2012	10:40:45 AM	H2 valve opened
4/4/2012	10:40:45 AM	BCl3 valve opened
4/4/2012	10:40:45 AM	SiCl4 pre valve opened
4/4/2012	10:40:45 AM	SiCl4 post valve opened
4/4/2012	10:40:45 AM	Bubbler valve opened
4/4/2012	10:40:45 AM	Helium MFC set to  0.000000
4/4/2012	10:40:45 AM	H2 MFC set to  450.000000
4/4/2012	10:40:45 AM	BCl3 MFC set to  1.500000
4/4/2012	10:40:45 AM	PH3 MFC set to  0.000000
4/4/2012	10:40:45 AM	SiCl4 MFC set to  50.000000
4/4/2012	10:40:45 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:40:46 AM	Tube furnace set to 1000
4/4/2012	10:52:45 AM	Helium valve closed
4/4/2012	10:52:45 AM	BCl3 valve closed
4/4/2012	10:52:46 AM	PH3 valve closed
4/4/2012	10:52:46 AM	SiCl4 pre valve closed
4/4/2012	10:52:46 AM	SiCl4 post valve closed
4/4/2012	10:52:46 AM	Main Vac valve closed
4/4/2012	10:52:46 AM	Bypass valve closed
4/4/2012	10:52:46 AM	H2 valve opened
4/4/2012	10:52:46 AM	Bubbler valve opened
4/4/2012	10:52:46 AM	Helium MFC set to  0.000000
4/4/2012	10:52:46 AM	H2 MFC set to  500.000000
4/4/2012	10:52:46 AM	BCl3 MFC set to  0.000000
4/4/2012	10:52:46 AM	PH3 MFC set to  0.000000
4/4/2012	10:52:46 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:52:46 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:52:46 AM	Tube furnace set to 950
4/4/2012	10:54:46 AM	Helium valve closed
4/4/2012	10:54:46 AM	BCl3 valve closed
4/4/2012	10:54:46 AM	PH3 valve closed
4/4/2012	10:54:46 AM	SiCl4 pre valve closed
4/4/2012	10:54:46 AM	SiCl4 post valve closed
4/4/2012	10:54:46 AM	Main Vac valve closed
4/4/2012	10:54:46 AM	Bypass valve closed
4/4/2012	10:54:46 AM	H2 valve opened
4/4/2012	10:54:46 AM	Bubbler valve opened
4/4/2012	10:54:46 AM	Helium MFC set to  0.000000
4/4/2012	10:54:46 AM	H2 MFC set to  500.000000
4/4/2012	10:54:46 AM	BCl3 MFC set to  0.000000
4/4/2012	10:54:46 AM	PH3 MFC set to  0.000000
4/4/2012	10:54:46 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:54:46 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:54:46 AM	Tube furnace set to 900
4/4/2012	10:56:46 AM	Helium valve closed
4/4/2012	10:56:46 AM	BCl3 valve closed
4/4/2012	10:56:46 AM	PH3 valve closed
4/4/2012	10:56:46 AM	SiCl4 pre valve closed
4/4/2012	10:56:46 AM	SiCl4 post valve closed
4/4/2012	10:56:46 AM	Main Vac valve closed
4/4/2012	10:56:46 AM	Bypass valve closed
4/4/2012	10:56:46 AM	H2 valve opened
4/4/2012	10:56:46 AM	Bubbler valve opened
4/4/2012	10:56:46 AM	Helium MFC set to  0.000000
4/4/2012	10:56:46 AM	H2 MFC set to  500.000000
4/4/2012	10:56:46 AM	BCl3 MFC set to  0.000000
4/4/2012	10:56:46 AM	PH3 MFC set to  0.000000
4/4/2012	10:56:46 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:56:46 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:56:46 AM	Tube furnace set to 850
4/4/2012	10:58:46 AM	H2 valve closed
4/4/2012	10:58:46 AM	BCl3 valve closed
4/4/2012	10:58:46 AM	PH3 valve closed
4/4/2012	10:58:46 AM	SiCl4 pre valve closed
4/4/2012	10:58:46 AM	SiCl4 post valve closed
4/4/2012	10:58:46 AM	Main Vac valve closed
4/4/2012	10:58:46 AM	Bypass valve closed
4/4/2012	10:58:46 AM	Helium valve opened
4/4/2012	10:58:46 AM	Bubbler valve opened
4/4/2012	10:58:46 AM	Helium MFC set to  500.000000
4/4/2012	10:58:46 AM	H2 MFC set to  0.000000
4/4/2012	10:58:46 AM	BCl3 MFC set to  0.000000
4/4/2012	10:58:46 AM	PH3 MFC set to  0.000000
4/4/2012	10:58:46 AM	SiCl4 MFC set to  0.000000
4/4/2012	10:58:46 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:58:46 AM	Tube furnace set to 800
4/4/2012	11:00:46 AM	H2 valve closed
4/4/2012	11:00:46 AM	BCl3 valve closed
4/4/2012	11:00:46 AM	PH3 valve closed
4/4/2012	11:00:46 AM	SiCl4 pre valve closed
4/4/2012	11:00:46 AM	SiCl4 post valve closed
4/4/2012	11:00:46 AM	Main Vac valve closed
4/4/2012	11:00:46 AM	Bypass valve closed
4/4/2012	11:00:46 AM	Helium valve opened
4/4/2012	11:00:46 AM	Bubbler valve opened
4/4/2012	11:00:46 AM	Helium MFC set to  500.000000
4/4/2012	11:00:46 AM	H2 MFC set to  0.000000
4/4/2012	11:00:46 AM	BCl3 MFC set to  0.000000
4/4/2012	11:00:46 AM	PH3 MFC set to  0.000000
4/4/2012	11:00:46 AM	SiCl4 MFC set to  0.000000
4/4/2012	11:00:46 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:00:47 AM	Tube furnace set to 750
4/4/2012	11:02:47 AM	H2 valve closed
4/4/2012	11:02:47 AM	BCl3 valve closed
4/4/2012	11:02:47 AM	PH3 valve closed
4/4/2012	11:02:47 AM	SiCl4 pre valve closed
4/4/2012	11:02:47 AM	SiCl4 post valve closed
4/4/2012	11:02:47 AM	Main Vac valve closed
4/4/2012	11:02:47 AM	Bypass valve closed
4/4/2012	11:02:47 AM	Helium valve opened
4/4/2012	11:02:47 AM	Bubbler valve opened
4/4/2012	11:02:47 AM	Helium MFC set to  500.000000
4/4/2012	11:02:47 AM	H2 MFC set to  0.000000
4/4/2012	11:02:47 AM	BCl3 MFC set to  0.000000
4/4/2012	11:02:47 AM	PH3 MFC set to  0.000000
4/4/2012	11:02:47 AM	SiCl4 MFC set to  0.000000
4/4/2012	11:02:47 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:02:47 AM	Tube furnace set to 0
4/4/2012	11:22:47 AM	Helium valve closed
4/4/2012	11:22:47 AM	H2 valve closed
4/4/2012	11:22:47 AM	BCl3 valve closed
4/4/2012	11:22:47 AM	PH3 valve closed
4/4/2012	11:22:47 AM	SiCl4 pre valve closed
4/4/2012	11:22:47 AM	SiCl4 post valve closed
4/4/2012	11:22:47 AM	Main Vac valve closed
4/4/2012	11:22:47 AM	Bypass valve closed
4/4/2012	11:22:47 AM	Bubbler valve closed
4/4/2012	11:22:47 AM	Helium MFC set to  0.000000
4/4/2012	11:22:47 AM	H2 MFC set to  0.000000
4/4/2012	11:22:47 AM	BCl3 MFC set to  0.000000
4/4/2012	11:22:47 AM	PH3 MFC set to  0.000000
4/4/2012	11:22:47 AM	SiCl4 MFC set to  0.000000
4/4/2012	11:22:47 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:22:47 AM	Tube furnace set to 0
4/4/2012	11:22:48 AM	Run finished at 11:22 AM
4/4/2012	11:57:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	11:57:30 AM	Recipe started at 11:57 AM
4/4/2012	11:57:30 AM	Helium valve closed
4/4/2012	11:57:30 AM	H2 valve closed
4/4/2012	11:57:31 AM	BCl3 valve closed
4/4/2012	11:57:31 AM	PH3 valve closed
4/4/2012	11:57:31 AM	SiCl4 pre valve closed
4/4/2012	11:57:31 AM	SiCl4 post valve closed
4/4/2012	11:57:31 AM	Main Vac valve closed
4/4/2012	11:57:31 AM	Bypass valve closed
4/4/2012	11:57:31 AM	Bubbler valve closed
4/4/2012	11:57:31 AM	Helium MFC set to  0.000000
4/4/2012	11:57:31 AM	H2 MFC set to  0.000000
4/4/2012	11:57:31 AM	BCl3 MFC set to  0.000000
4/4/2012	11:57:31 AM	PH3 MFC set to  0.000000
4/4/2012	11:57:31 AM	SiCl4 MFC set to  0.000000
4/4/2012	11:57:31 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:57:31 AM	Tube furnace set to 0
4/4/2012	11:57:34 AM	H2 valve closed
4/4/2012	11:57:34 AM	BCl3 valve closed
4/4/2012	11:57:34 AM	PH3 valve closed
4/4/2012	11:57:34 AM	SiCl4 pre valve closed
4/4/2012	11:57:34 AM	SiCl4 post valve closed
4/4/2012	11:57:34 AM	Main Vac valve closed
4/4/2012	11:57:34 AM	Bypass valve closed
4/4/2012	11:57:34 AM	Bubbler valve closed
4/4/2012	11:57:34 AM	Helium valve opened
4/4/2012	11:57:34 AM	Helium MFC set to  500.000000
4/4/2012	11:57:34 AM	H2 MFC set to  0.000000
4/4/2012	11:57:34 AM	BCl3 MFC set to  0.000000
4/4/2012	11:57:34 AM	PH3 MFC set to  0.000000
4/4/2012	11:57:34 AM	SiCl4 MFC set to  0.000000
4/4/2012	11:57:34 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:57:34 AM	Tube furnace set to 0
4/4/2012	11:57:39 AM	Helium valve closed
4/4/2012	11:57:39 AM	H2 valve closed
4/4/2012	11:57:39 AM	BCl3 valve closed
4/4/2012	11:57:39 AM	PH3 valve closed
4/4/2012	11:57:39 AM	SiCl4 pre valve closed
4/4/2012	11:57:39 AM	SiCl4 post valve closed
4/4/2012	11:57:39 AM	Main Vac valve closed
4/4/2012	11:57:39 AM	Bypass valve closed
4/4/2012	11:57:39 AM	Bubbler valve closed
4/4/2012	11:57:39 AM	Helium MFC set to  0.000000
4/4/2012	11:57:39 AM	H2 MFC set to  0.000000
4/4/2012	11:57:39 AM	BCl3 MFC set to  0.000000
4/4/2012	11:57:39 AM	PH3 MFC set to  0.000000
4/4/2012	11:57:39 AM	SiCl4 MFC set to  0.000000
4/4/2012	11:57:39 AM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:57:39 AM	Tube furnace set to 0
4/4/2012	11:57:40 AM	Run finished at 11:57 AM
4/4/2012	11:57:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	12:02:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	12:02:10 PM	Recipe started at 12:02 PM
4/4/2012	12:02:10 PM	Helium valve closed
4/4/2012	12:02:10 PM	H2 valve closed
4/4/2012	12:02:10 PM	BCl3 valve closed
4/4/2012	12:02:10 PM	PH3 valve closed
4/4/2012	12:02:10 PM	SiCl4 pre valve closed
4/4/2012	12:02:10 PM	SiCl4 post valve closed
4/4/2012	12:02:10 PM	Main Vac valve closed
4/4/2012	12:02:10 PM	Bubbler valve closed
4/4/2012	12:02:10 PM	Bypass valve opened
4/4/2012	12:02:10 PM	Helium MFC set to  0.000000
4/4/2012	12:02:10 PM	H2 MFC set to  0.000000
4/4/2012	12:02:10 PM	BCl3 MFC set to  0.000000
4/4/2012	12:02:10 PM	PH3 MFC set to  0.000000
4/4/2012	12:02:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:02:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:02:10 PM	Tube furnace set to 0
4/4/2012	12:03:10 PM	Helium valve closed
4/4/2012	12:03:10 PM	H2 valve closed
4/4/2012	12:03:10 PM	BCl3 valve closed
4/4/2012	12:03:10 PM	PH3 valve closed
4/4/2012	12:03:10 PM	SiCl4 pre valve closed
4/4/2012	12:03:10 PM	SiCl4 post valve closed
4/4/2012	12:03:10 PM	Main Vac valve closed
4/4/2012	12:03:10 PM	Bubbler valve closed
4/4/2012	12:03:10 PM	Bypass valve opened
4/4/2012	12:03:10 PM	Helium MFC set to  0.000000
4/4/2012	12:03:10 PM	H2 MFC set to  0.000000
4/4/2012	12:03:10 PM	BCl3 MFC set to  0.000000
4/4/2012	12:03:10 PM	PH3 MFC set to  0.000000
4/4/2012	12:03:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:03:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:03:10 PM	Tube furnace set to 0
4/4/2012	12:04:10 PM	Helium valve closed
4/4/2012	12:04:10 PM	H2 valve closed
4/4/2012	12:04:10 PM	BCl3 valve closed
4/4/2012	12:04:10 PM	PH3 valve closed
4/4/2012	12:04:10 PM	SiCl4 pre valve closed
4/4/2012	12:04:10 PM	SiCl4 post valve closed
4/4/2012	12:04:10 PM	Bypass valve closed
4/4/2012	12:04:10 PM	Bubbler valve closed
4/4/2012	12:04:10 PM	Main Vac valve opened
4/4/2012	12:04:10 PM	Helium MFC set to  0.000000
4/4/2012	12:04:10 PM	H2 MFC set to  0.000000
4/4/2012	12:04:10 PM	BCl3 MFC set to  0.000000
4/4/2012	12:04:10 PM	PH3 MFC set to  0.000000
4/4/2012	12:04:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:04:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:04:11 PM	Tube furnace set to 0
4/4/2012	12:04:12 PM	Run finished at 12:04 PM
4/4/2012	12:04:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	12:21:58 PM	Recipe started at 12:21 PM
4/4/2012	12:21:58 PM	Helium valve closed
4/4/2012	12:21:58 PM	H2 valve closed
4/4/2012	12:21:58 PM	BCl3 valve closed
4/4/2012	12:21:58 PM	PH3 valve closed
4/4/2012	12:21:58 PM	SiCl4 pre valve closed
4/4/2012	12:21:58 PM	SiCl4 post valve closed
4/4/2012	12:21:58 PM	Bypass valve closed
4/4/2012	12:21:58 PM	Bubbler valve closed
4/4/2012	12:21:58 PM	Main Vac valve opened
4/4/2012	12:21:58 PM	Helium MFC set to  0.000000
4/4/2012	12:21:58 PM	H2 MFC set to  0.000000
4/4/2012	12:21:58 PM	BCl3 MFC set to  0.000000
4/4/2012	12:21:58 PM	PH3 MFC set to  0.000000
4/4/2012	12:21:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:21:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:21:58 PM	Tube furnace set to 0
4/4/2012	12:22:28 PM	H2 valve closed
4/4/2012	12:22:28 PM	BCl3 valve closed
4/4/2012	12:22:28 PM	PH3 valve closed
4/4/2012	12:22:28 PM	SiCl4 pre valve closed
4/4/2012	12:22:28 PM	SiCl4 post valve closed
4/4/2012	12:22:28 PM	Bypass valve closed
4/4/2012	12:22:28 PM	Bubbler valve closed
4/4/2012	12:22:28 PM	Helium valve opened
4/4/2012	12:22:28 PM	Main Vac valve opened
4/4/2012	12:22:28 PM	Helium MFC set to  20.000000
4/4/2012	12:22:28 PM	H2 MFC set to  0.000000
4/4/2012	12:22:28 PM	BCl3 MFC set to  0.000000
4/4/2012	12:22:28 PM	PH3 MFC set to  0.000000
4/4/2012	12:22:28 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:22:28 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:22:28 PM	Tube furnace set to 0
4/4/2012	12:22:58 PM	Helium valve closed
4/4/2012	12:22:58 PM	H2 valve closed
4/4/2012	12:22:58 PM	BCl3 valve closed
4/4/2012	12:22:58 PM	PH3 valve closed
4/4/2012	12:22:58 PM	SiCl4 pre valve closed
4/4/2012	12:22:58 PM	SiCl4 post valve closed
4/4/2012	12:22:58 PM	Bypass valve closed
4/4/2012	12:22:58 PM	Bubbler valve closed
4/4/2012	12:22:58 PM	Main Vac valve opened
4/4/2012	12:22:58 PM	Helium MFC set to  0.000000
4/4/2012	12:22:58 PM	H2 MFC set to  0.000000
4/4/2012	12:22:58 PM	BCl3 MFC set to  0.000000
4/4/2012	12:22:58 PM	PH3 MFC set to  0.000000
4/4/2012	12:22:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:22:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:22:58 PM	Tube furnace set to 0
4/4/2012	12:23:28 PM	H2 valve closed
4/4/2012	12:23:28 PM	BCl3 valve closed
4/4/2012	12:23:28 PM	PH3 valve closed
4/4/2012	12:23:28 PM	SiCl4 pre valve closed
4/4/2012	12:23:28 PM	SiCl4 post valve closed
4/4/2012	12:23:28 PM	Bypass valve closed
4/4/2012	12:23:28 PM	Bubbler valve closed
4/4/2012	12:23:28 PM	Helium valve opened
4/4/2012	12:23:28 PM	Main Vac valve opened
4/4/2012	12:23:28 PM	Helium MFC set to  20.000000
4/4/2012	12:23:28 PM	H2 MFC set to  0.000000
4/4/2012	12:23:28 PM	BCl3 MFC set to  0.000000
4/4/2012	12:23:28 PM	PH3 MFC set to  0.000000
4/4/2012	12:23:28 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:23:28 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:23:28 PM	Tube furnace set to 0
4/4/2012	12:23:58 PM	Helium valve closed
4/4/2012	12:23:58 PM	H2 valve closed
4/4/2012	12:23:58 PM	BCl3 valve closed
4/4/2012	12:23:58 PM	PH3 valve closed
4/4/2012	12:23:58 PM	SiCl4 pre valve closed
4/4/2012	12:23:59 PM	SiCl4 post valve closed
4/4/2012	12:23:59 PM	Bypass valve closed
4/4/2012	12:23:59 PM	Bubbler valve closed
4/4/2012	12:23:59 PM	Main Vac valve opened
4/4/2012	12:23:59 PM	Helium MFC set to  0.000000
4/4/2012	12:23:59 PM	H2 MFC set to  0.000000
4/4/2012	12:23:59 PM	BCl3 MFC set to  0.000000
4/4/2012	12:23:59 PM	PH3 MFC set to  0.000000
4/4/2012	12:23:59 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:23:59 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:23:59 PM	Tube furnace set to 0
4/4/2012	12:24:29 PM	H2 valve closed
4/4/2012	12:24:29 PM	BCl3 valve closed
4/4/2012	12:24:29 PM	PH3 valve closed
4/4/2012	12:24:29 PM	SiCl4 pre valve closed
4/4/2012	12:24:29 PM	SiCl4 post valve closed
4/4/2012	12:24:29 PM	Bypass valve closed
4/4/2012	12:24:29 PM	Bubbler valve closed
4/4/2012	12:24:29 PM	Helium valve opened
4/4/2012	12:24:29 PM	Main Vac valve opened
4/4/2012	12:24:29 PM	Helium MFC set to  20.000000
4/4/2012	12:24:29 PM	H2 MFC set to  0.000000
4/4/2012	12:24:29 PM	BCl3 MFC set to  0.000000
4/4/2012	12:24:29 PM	PH3 MFC set to  0.000000
4/4/2012	12:24:29 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:24:29 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:24:29 PM	Tube furnace set to 0
4/4/2012	12:24:59 PM	Helium valve closed
4/4/2012	12:24:59 PM	H2 valve closed
4/4/2012	12:24:59 PM	BCl3 valve closed
4/4/2012	12:24:59 PM	PH3 valve closed
4/4/2012	12:24:59 PM	SiCl4 pre valve closed
4/4/2012	12:24:59 PM	SiCl4 post valve closed
4/4/2012	12:24:59 PM	Bypass valve closed
4/4/2012	12:24:59 PM	Bubbler valve closed
4/4/2012	12:24:59 PM	Main Vac valve opened
4/4/2012	12:24:59 PM	Helium MFC set to  0.000000
4/4/2012	12:24:59 PM	H2 MFC set to  0.000000
4/4/2012	12:24:59 PM	BCl3 MFC set to  0.000000
4/4/2012	12:24:59 PM	PH3 MFC set to  0.000000
4/4/2012	12:24:59 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:24:59 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:24:59 PM	Tube furnace set to 0
4/4/2012	12:25:29 PM	H2 valve closed
4/4/2012	12:25:29 PM	BCl3 valve closed
4/4/2012	12:25:29 PM	PH3 valve closed
4/4/2012	12:25:29 PM	SiCl4 pre valve closed
4/4/2012	12:25:29 PM	SiCl4 post valve closed
4/4/2012	12:25:29 PM	Bypass valve closed
4/4/2012	12:25:29 PM	Bubbler valve closed
4/4/2012	12:25:29 PM	Helium valve opened
4/4/2012	12:25:29 PM	Main Vac valve opened
4/4/2012	12:25:29 PM	Helium MFC set to  20.000000
4/4/2012	12:25:29 PM	H2 MFC set to  0.000000
4/4/2012	12:25:29 PM	BCl3 MFC set to  0.000000
4/4/2012	12:25:29 PM	PH3 MFC set to  0.000000
4/4/2012	12:25:29 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:25:29 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:25:29 PM	Tube furnace set to 0
4/4/2012	12:25:59 PM	Helium valve closed
4/4/2012	12:25:59 PM	H2 valve closed
4/4/2012	12:25:59 PM	BCl3 valve closed
4/4/2012	12:25:59 PM	PH3 valve closed
4/4/2012	12:26:00 PM	SiCl4 pre valve closed
4/4/2012	12:26:00 PM	SiCl4 post valve closed
4/4/2012	12:26:00 PM	Bypass valve closed
4/4/2012	12:26:00 PM	Bubbler valve closed
4/4/2012	12:26:00 PM	Main Vac valve opened
4/4/2012	12:26:00 PM	Helium MFC set to  0.000000
4/4/2012	12:26:00 PM	H2 MFC set to  0.000000
4/4/2012	12:26:00 PM	BCl3 MFC set to  0.000000
4/4/2012	12:26:00 PM	PH3 MFC set to  0.000000
4/4/2012	12:26:00 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:26:00 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:26:00 PM	Tube furnace set to 0
4/4/2012	12:26:30 PM	H2 valve closed
4/4/2012	12:26:30 PM	BCl3 valve closed
4/4/2012	12:26:30 PM	PH3 valve closed
4/4/2012	12:26:30 PM	SiCl4 pre valve closed
4/4/2012	12:26:30 PM	SiCl4 post valve closed
4/4/2012	12:26:30 PM	Bypass valve closed
4/4/2012	12:26:30 PM	Bubbler valve closed
4/4/2012	12:26:30 PM	Helium valve opened
4/4/2012	12:26:30 PM	Main Vac valve opened
4/4/2012	12:26:30 PM	Helium MFC set to  20.000000
4/4/2012	12:26:30 PM	H2 MFC set to  0.000000
4/4/2012	12:26:30 PM	BCl3 MFC set to  0.000000
4/4/2012	12:26:30 PM	PH3 MFC set to  0.000000
4/4/2012	12:26:30 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:26:30 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:26:30 PM	Tube furnace set to 0
4/4/2012	12:27:00 PM	Helium valve closed
4/4/2012	12:27:00 PM	H2 valve closed
4/4/2012	12:27:00 PM	BCl3 valve closed
4/4/2012	12:27:00 PM	PH3 valve closed
4/4/2012	12:27:00 PM	SiCl4 pre valve closed
4/4/2012	12:27:00 PM	SiCl4 post valve closed
4/4/2012	12:27:00 PM	Bypass valve closed
4/4/2012	12:27:00 PM	Bubbler valve closed
4/4/2012	12:27:00 PM	Main Vac valve opened
4/4/2012	12:27:00 PM	Helium MFC set to  0.000000
4/4/2012	12:27:00 PM	H2 MFC set to  0.000000
4/4/2012	12:27:00 PM	BCl3 MFC set to  0.000000
4/4/2012	12:27:00 PM	PH3 MFC set to  0.000000
4/4/2012	12:27:00 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:27:00 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:27:00 PM	Tube furnace set to 0
4/4/2012	12:27:30 PM	H2 valve closed
4/4/2012	12:27:30 PM	BCl3 valve closed
4/4/2012	12:27:30 PM	PH3 valve closed
4/4/2012	12:27:30 PM	SiCl4 pre valve closed
4/4/2012	12:27:30 PM	SiCl4 post valve closed
4/4/2012	12:27:30 PM	Bypass valve closed
4/4/2012	12:27:30 PM	Bubbler valve closed
4/4/2012	12:27:30 PM	Helium valve opened
4/4/2012	12:27:30 PM	Main Vac valve opened
4/4/2012	12:27:30 PM	Helium MFC set to  20.000000
4/4/2012	12:27:30 PM	H2 MFC set to  0.000000
4/4/2012	12:27:30 PM	BCl3 MFC set to  0.000000
4/4/2012	12:27:30 PM	PH3 MFC set to  0.000000
4/4/2012	12:27:30 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:27:30 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:27:30 PM	Tube furnace set to 0
4/4/2012	12:28:00 PM	Helium valve closed
4/4/2012	12:28:00 PM	H2 valve closed
4/4/2012	12:28:00 PM	BCl3 valve closed
4/4/2012	12:28:00 PM	PH3 valve closed
4/4/2012	12:28:00 PM	SiCl4 pre valve closed
4/4/2012	12:28:00 PM	SiCl4 post valve closed
4/4/2012	12:28:00 PM	Bypass valve closed
4/4/2012	12:28:00 PM	Bubbler valve closed
4/4/2012	12:28:00 PM	Main Vac valve opened
4/4/2012	12:28:00 PM	Helium MFC set to  0.000000
4/4/2012	12:28:00 PM	H2 MFC set to  0.000000
4/4/2012	12:28:00 PM	BCl3 MFC set to  0.000000
4/4/2012	12:28:00 PM	PH3 MFC set to  0.000000
4/4/2012	12:28:00 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:28:00 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:28:01 PM	Tube furnace set to 0
4/4/2012	12:28:31 PM	H2 valve closed
4/4/2012	12:28:31 PM	BCl3 valve closed
4/4/2012	12:28:31 PM	PH3 valve closed
4/4/2012	12:28:31 PM	SiCl4 pre valve closed
4/4/2012	12:28:31 PM	SiCl4 post valve closed
4/4/2012	12:28:31 PM	Bypass valve closed
4/4/2012	12:28:31 PM	Bubbler valve closed
4/4/2012	12:28:31 PM	Helium valve opened
4/4/2012	12:28:31 PM	Main Vac valve opened
4/4/2012	12:28:31 PM	Helium MFC set to  20.000000
4/4/2012	12:28:31 PM	H2 MFC set to  0.000000
4/4/2012	12:28:31 PM	BCl3 MFC set to  0.000000
4/4/2012	12:28:31 PM	PH3 MFC set to  0.000000
4/4/2012	12:28:31 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:28:31 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:28:31 PM	Tube furnace set to 0
4/4/2012	12:29:01 PM	Helium valve closed
4/4/2012	12:29:01 PM	H2 valve closed
4/4/2012	12:29:01 PM	BCl3 valve closed
4/4/2012	12:29:01 PM	PH3 valve closed
4/4/2012	12:29:01 PM	SiCl4 pre valve closed
4/4/2012	12:29:01 PM	SiCl4 post valve closed
4/4/2012	12:29:01 PM	Bypass valve closed
4/4/2012	12:29:01 PM	Bubbler valve closed
4/4/2012	12:29:01 PM	Main Vac valve opened
4/4/2012	12:29:01 PM	Helium MFC set to  0.000000
4/4/2012	12:29:01 PM	H2 MFC set to  0.000000
4/4/2012	12:29:01 PM	BCl3 MFC set to  0.000000
4/4/2012	12:29:01 PM	PH3 MFC set to  0.000000
4/4/2012	12:29:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:29:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:29:01 PM	Tube furnace set to 0
4/4/2012	12:29:31 PM	H2 valve closed
4/4/2012	12:29:31 PM	BCl3 valve closed
4/4/2012	12:29:31 PM	PH3 valve closed
4/4/2012	12:29:31 PM	SiCl4 pre valve closed
4/4/2012	12:29:31 PM	SiCl4 post valve closed
4/4/2012	12:29:31 PM	Bypass valve closed
4/4/2012	12:29:31 PM	Bubbler valve closed
4/4/2012	12:29:31 PM	Helium valve opened
4/4/2012	12:29:31 PM	Main Vac valve opened
4/4/2012	12:29:31 PM	Helium MFC set to  20.000000
4/4/2012	12:29:31 PM	H2 MFC set to  0.000000
4/4/2012	12:29:31 PM	BCl3 MFC set to  0.000000
4/4/2012	12:29:31 PM	PH3 MFC set to  0.000000
4/4/2012	12:29:31 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:29:31 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:29:31 PM	Tube furnace set to 0
4/4/2012	12:30:01 PM	Helium valve closed
4/4/2012	12:30:01 PM	H2 valve closed
4/4/2012	12:30:01 PM	BCl3 valve closed
4/4/2012	12:30:01 PM	PH3 valve closed
4/4/2012	12:30:01 PM	SiCl4 pre valve closed
4/4/2012	12:30:01 PM	SiCl4 post valve closed
4/4/2012	12:30:01 PM	Bypass valve closed
4/4/2012	12:30:01 PM	Bubbler valve closed
4/4/2012	12:30:01 PM	Main Vac valve opened
4/4/2012	12:30:01 PM	Helium MFC set to  0.000000
4/4/2012	12:30:01 PM	H2 MFC set to  0.000000
4/4/2012	12:30:01 PM	BCl3 MFC set to  0.000000
4/4/2012	12:30:01 PM	PH3 MFC set to  0.000000
4/4/2012	12:30:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:30:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:30:02 PM	Tube furnace set to 0
4/4/2012	12:30:32 PM	H2 valve closed
4/4/2012	12:30:32 PM	BCl3 valve closed
4/4/2012	12:30:32 PM	PH3 valve closed
4/4/2012	12:30:32 PM	SiCl4 pre valve closed
4/4/2012	12:30:32 PM	SiCl4 post valve closed
4/4/2012	12:30:32 PM	Bypass valve closed
4/4/2012	12:30:32 PM	Bubbler valve closed
4/4/2012	12:30:32 PM	Helium valve opened
4/4/2012	12:30:32 PM	Main Vac valve opened
4/4/2012	12:30:32 PM	Helium MFC set to  20.000000
4/4/2012	12:30:32 PM	H2 MFC set to  0.000000
4/4/2012	12:30:32 PM	BCl3 MFC set to  0.000000
4/4/2012	12:30:32 PM	PH3 MFC set to  0.000000
4/4/2012	12:30:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:30:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:30:32 PM	Tube furnace set to 0
4/4/2012	12:31:02 PM	Helium valve closed
4/4/2012	12:31:02 PM	H2 valve closed
4/4/2012	12:31:02 PM	BCl3 valve closed
4/4/2012	12:31:02 PM	PH3 valve closed
4/4/2012	12:31:02 PM	SiCl4 pre valve closed
4/4/2012	12:31:02 PM	SiCl4 post valve closed
4/4/2012	12:31:02 PM	Bypass valve closed
4/4/2012	12:31:02 PM	Bubbler valve closed
4/4/2012	12:31:02 PM	Main Vac valve opened
4/4/2012	12:31:02 PM	Helium MFC set to  0.000000
4/4/2012	12:31:02 PM	H2 MFC set to  0.000000
4/4/2012	12:31:02 PM	BCl3 MFC set to  0.000000
4/4/2012	12:31:02 PM	PH3 MFC set to  0.000000
4/4/2012	12:31:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:31:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:31:02 PM	Tube furnace set to 200
4/4/2012	12:31:32 PM	H2 valve closed
4/4/2012	12:31:32 PM	BCl3 valve closed
4/4/2012	12:31:32 PM	PH3 valve closed
4/4/2012	12:31:32 PM	SiCl4 pre valve closed
4/4/2012	12:31:32 PM	SiCl4 post valve closed
4/4/2012	12:31:32 PM	Bypass valve closed
4/4/2012	12:31:32 PM	Bubbler valve closed
4/4/2012	12:31:32 PM	Helium valve opened
4/4/2012	12:31:32 PM	Main Vac valve opened
4/4/2012	12:31:32 PM	Helium MFC set to  20.000000
4/4/2012	12:31:32 PM	H2 MFC set to  0.000000
4/4/2012	12:31:32 PM	BCl3 MFC set to  0.000000
4/4/2012	12:31:32 PM	PH3 MFC set to  0.000000
4/4/2012	12:31:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:31:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:31:32 PM	Tube furnace set to 200
4/4/2012	12:32:02 PM	Helium valve closed
4/4/2012	12:32:02 PM	H2 valve closed
4/4/2012	12:32:02 PM	BCl3 valve closed
4/4/2012	12:32:02 PM	PH3 valve closed
4/4/2012	12:32:02 PM	SiCl4 pre valve closed
4/4/2012	12:32:02 PM	SiCl4 post valve closed
4/4/2012	12:32:02 PM	Bypass valve closed
4/4/2012	12:32:02 PM	Bubbler valve closed
4/4/2012	12:32:02 PM	Main Vac valve opened
4/4/2012	12:32:02 PM	Helium MFC set to  0.000000
4/4/2012	12:32:02 PM	H2 MFC set to  0.000000
4/4/2012	12:32:02 PM	BCl3 MFC set to  0.000000
4/4/2012	12:32:02 PM	PH3 MFC set to  0.000000
4/4/2012	12:32:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:32:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:32:03 PM	Tube furnace set to 200
4/4/2012	12:32:33 PM	H2 valve closed
4/4/2012	12:32:33 PM	BCl3 valve closed
4/4/2012	12:32:33 PM	PH3 valve closed
4/4/2012	12:32:33 PM	SiCl4 pre valve closed
4/4/2012	12:32:33 PM	SiCl4 post valve closed
4/4/2012	12:32:33 PM	Bypass valve closed
4/4/2012	12:32:33 PM	Bubbler valve closed
4/4/2012	12:32:33 PM	Helium valve opened
4/4/2012	12:32:33 PM	Main Vac valve opened
4/4/2012	12:32:33 PM	Helium MFC set to  20.000000
4/4/2012	12:32:33 PM	H2 MFC set to  0.000000
4/4/2012	12:32:33 PM	BCl3 MFC set to  0.000000
4/4/2012	12:32:33 PM	PH3 MFC set to  0.000000
4/4/2012	12:32:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:32:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:32:33 PM	Tube furnace set to 200
4/4/2012	12:33:03 PM	Helium valve closed
4/4/2012	12:33:03 PM	H2 valve closed
4/4/2012	12:33:03 PM	BCl3 valve closed
4/4/2012	12:33:03 PM	PH3 valve closed
4/4/2012	12:33:03 PM	SiCl4 pre valve closed
4/4/2012	12:33:03 PM	SiCl4 post valve closed
4/4/2012	12:33:03 PM	Bypass valve closed
4/4/2012	12:33:03 PM	Bubbler valve closed
4/4/2012	12:33:03 PM	Main Vac valve opened
4/4/2012	12:33:03 PM	Helium MFC set to  0.000000
4/4/2012	12:33:03 PM	H2 MFC set to  0.000000
4/4/2012	12:33:03 PM	BCl3 MFC set to  0.000000
4/4/2012	12:33:03 PM	PH3 MFC set to  0.000000
4/4/2012	12:33:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:33:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:33:03 PM	Tube furnace set to 200
4/4/2012	12:33:33 PM	H2 valve closed
4/4/2012	12:33:33 PM	BCl3 valve closed
4/4/2012	12:33:33 PM	PH3 valve closed
4/4/2012	12:33:33 PM	SiCl4 pre valve closed
4/4/2012	12:33:33 PM	SiCl4 post valve closed
4/4/2012	12:33:33 PM	Bypass valve closed
4/4/2012	12:33:33 PM	Bubbler valve closed
4/4/2012	12:33:33 PM	Helium valve opened
4/4/2012	12:33:33 PM	Main Vac valve opened
4/4/2012	12:33:33 PM	Helium MFC set to  20.000000
4/4/2012	12:33:33 PM	H2 MFC set to  0.000000
4/4/2012	12:33:33 PM	BCl3 MFC set to  0.000000
4/4/2012	12:33:33 PM	PH3 MFC set to  0.000000
4/4/2012	12:33:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:33:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:33:33 PM	Tube furnace set to 200
4/4/2012	12:34:03 PM	Helium valve closed
4/4/2012	12:34:03 PM	H2 valve closed
4/4/2012	12:34:03 PM	BCl3 valve closed
4/4/2012	12:34:03 PM	PH3 valve closed
4/4/2012	12:34:03 PM	SiCl4 pre valve closed
4/4/2012	12:34:03 PM	SiCl4 post valve closed
4/4/2012	12:34:03 PM	Bypass valve closed
4/4/2012	12:34:03 PM	Bubbler valve closed
4/4/2012	12:34:03 PM	Main Vac valve opened
4/4/2012	12:34:03 PM	Helium MFC set to  0.000000
4/4/2012	12:34:03 PM	H2 MFC set to  0.000000
4/4/2012	12:34:03 PM	BCl3 MFC set to  0.000000
4/4/2012	12:34:03 PM	PH3 MFC set to  0.000000
4/4/2012	12:34:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:34:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:34:03 PM	Tube furnace set to 200
4/4/2012	12:34:33 PM	H2 valve closed
4/4/2012	12:34:33 PM	BCl3 valve closed
4/4/2012	12:34:33 PM	PH3 valve closed
4/4/2012	12:34:33 PM	SiCl4 pre valve closed
4/4/2012	12:34:33 PM	SiCl4 post valve closed
4/4/2012	12:34:33 PM	Bypass valve closed
4/4/2012	12:34:33 PM	Bubbler valve closed
4/4/2012	12:34:34 PM	Helium valve opened
4/4/2012	12:34:34 PM	Main Vac valve opened
4/4/2012	12:34:34 PM	Helium MFC set to  20.000000
4/4/2012	12:34:34 PM	H2 MFC set to  0.000000
4/4/2012	12:34:34 PM	BCl3 MFC set to  0.000000
4/4/2012	12:34:34 PM	PH3 MFC set to  0.000000
4/4/2012	12:34:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:34:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:34:34 PM	Tube furnace set to 200
4/4/2012	12:35:04 PM	Helium valve closed
4/4/2012	12:35:04 PM	H2 valve closed
4/4/2012	12:35:04 PM	BCl3 valve closed
4/4/2012	12:35:04 PM	PH3 valve closed
4/4/2012	12:35:04 PM	SiCl4 pre valve closed
4/4/2012	12:35:04 PM	SiCl4 post valve closed
4/4/2012	12:35:04 PM	Bypass valve closed
4/4/2012	12:35:04 PM	Bubbler valve closed
4/4/2012	12:35:04 PM	Main Vac valve opened
4/4/2012	12:35:04 PM	Helium MFC set to  0.000000
4/4/2012	12:35:04 PM	H2 MFC set to  0.000000
4/4/2012	12:35:04 PM	BCl3 MFC set to  0.000000
4/4/2012	12:35:04 PM	PH3 MFC set to  0.000000
4/4/2012	12:35:04 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:35:04 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:35:04 PM	Tube furnace set to 200
4/4/2012	12:35:34 PM	H2 valve closed
4/4/2012	12:35:34 PM	BCl3 valve closed
4/4/2012	12:35:34 PM	PH3 valve closed
4/4/2012	12:35:34 PM	SiCl4 pre valve closed
4/4/2012	12:35:34 PM	SiCl4 post valve closed
4/4/2012	12:35:34 PM	Bypass valve closed
4/4/2012	12:35:34 PM	Bubbler valve closed
4/4/2012	12:35:34 PM	Helium valve opened
4/4/2012	12:35:34 PM	Main Vac valve opened
4/4/2012	12:35:34 PM	Helium MFC set to  20.000000
4/4/2012	12:35:34 PM	H2 MFC set to  0.000000
4/4/2012	12:35:34 PM	BCl3 MFC set to  0.000000
4/4/2012	12:35:34 PM	PH3 MFC set to  0.000000
4/4/2012	12:35:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:35:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:35:34 PM	Tube furnace set to 200
4/4/2012	12:36:04 PM	Helium valve closed
4/4/2012	12:36:04 PM	H2 valve closed
4/4/2012	12:36:04 PM	BCl3 valve closed
4/4/2012	12:36:04 PM	PH3 valve closed
4/4/2012	12:36:04 PM	SiCl4 pre valve closed
4/4/2012	12:36:04 PM	SiCl4 post valve closed
4/4/2012	12:36:04 PM	Bypass valve closed
4/4/2012	12:36:04 PM	Bubbler valve closed
4/4/2012	12:36:04 PM	Main Vac valve opened
4/4/2012	12:36:04 PM	Helium MFC set to  0.000000
4/4/2012	12:36:04 PM	H2 MFC set to  0.000000
4/4/2012	12:36:04 PM	BCl3 MFC set to  0.000000
4/4/2012	12:36:04 PM	PH3 MFC set to  0.000000
4/4/2012	12:36:04 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:36:04 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:36:04 PM	Tube furnace set to 200
4/4/2012	12:36:34 PM	H2 valve closed
4/4/2012	12:36:34 PM	BCl3 valve closed
4/4/2012	12:36:34 PM	PH3 valve closed
4/4/2012	12:36:34 PM	SiCl4 pre valve closed
4/4/2012	12:36:34 PM	SiCl4 post valve closed
4/4/2012	12:36:34 PM	Bypass valve closed
4/4/2012	12:36:34 PM	Bubbler valve closed
4/4/2012	12:36:34 PM	Helium valve opened
4/4/2012	12:36:34 PM	Main Vac valve opened
4/4/2012	12:36:34 PM	Helium MFC set to  20.000000
4/4/2012	12:36:34 PM	H2 MFC set to  0.000000
4/4/2012	12:36:34 PM	BCl3 MFC set to  0.000000
4/4/2012	12:36:34 PM	PH3 MFC set to  0.000000
4/4/2012	12:36:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:36:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:36:35 PM	Tube furnace set to 200
4/4/2012	12:37:05 PM	Helium valve closed
4/4/2012	12:37:05 PM	H2 valve closed
4/4/2012	12:37:05 PM	BCl3 valve closed
4/4/2012	12:37:05 PM	PH3 valve closed
4/4/2012	12:37:05 PM	SiCl4 pre valve closed
4/4/2012	12:37:05 PM	SiCl4 post valve closed
4/4/2012	12:37:05 PM	Bypass valve closed
4/4/2012	12:37:05 PM	Bubbler valve closed
4/4/2012	12:37:05 PM	Main Vac valve opened
4/4/2012	12:37:05 PM	Helium MFC set to  0.000000
4/4/2012	12:37:05 PM	H2 MFC set to  0.000000
4/4/2012	12:37:05 PM	BCl3 MFC set to  0.000000
4/4/2012	12:37:05 PM	PH3 MFC set to  0.000000
4/4/2012	12:37:05 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:37:05 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:37:05 PM	Tube furnace set to 0
4/4/2012	12:37:06 PM	Run finished at 12:37 PM
4/4/2012	12:39:58 PM	Main Vac valve closed
4/4/2012	12:40:06 PM	Main Vac valve opened
4/4/2012	12:40:36 PM	Main Vac valve closed
4/4/2012	12:40:45 PM	Main Vac valve opened
4/4/2012	12:41:16 PM	Main Vac valve closed
4/4/2012	12:41:26 PM	Main Vac valve opened
4/4/2012	12:41:58 PM	Recipe started at 12:41 PM
4/4/2012	12:41:58 PM	Helium valve closed
4/4/2012	12:41:58 PM	H2 valve closed
4/4/2012	12:41:58 PM	BCl3 valve closed
4/4/2012	12:41:58 PM	PH3 valve closed
4/4/2012	12:41:58 PM	SiCl4 pre valve closed
4/4/2012	12:41:58 PM	SiCl4 post valve closed
4/4/2012	12:41:58 PM	Bypass valve closed
4/4/2012	12:41:58 PM	Bubbler valve closed
4/4/2012	12:41:58 PM	Main Vac valve opened
4/4/2012	12:41:58 PM	Helium MFC set to  0.000000
4/4/2012	12:41:58 PM	H2 MFC set to  0.000000
4/4/2012	12:41:58 PM	BCl3 MFC set to  0.000000
4/4/2012	12:41:58 PM	PH3 MFC set to  0.000000
4/4/2012	12:41:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:41:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:41:58 PM	Tube furnace set to 0
4/4/2012	12:41:59 PM	H2 valve closed
4/4/2012	12:41:59 PM	BCl3 valve closed
4/4/2012	12:41:59 PM	PH3 valve closed
4/4/2012	12:41:59 PM	SiCl4 pre valve closed
4/4/2012	12:41:59 PM	SiCl4 post valve closed
4/4/2012	12:41:59 PM	Bypass valve closed
4/4/2012	12:41:59 PM	Bubbler valve closed
4/4/2012	12:41:59 PM	Helium valve opened
4/4/2012	12:41:59 PM	Main Vac valve opened
4/4/2012	12:41:59 PM	Helium MFC set to  20.000000
4/4/2012	12:41:59 PM	H2 MFC set to  0.000000
4/4/2012	12:41:59 PM	BCl3 MFC set to  0.000000
4/4/2012	12:41:59 PM	PH3 MFC set to  0.000000
4/4/2012	12:41:59 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:41:59 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:00 PM	Tube furnace set to 0
4/4/2012	12:42:00 PM	Helium valve closed
4/4/2012	12:42:00 PM	H2 valve closed
4/4/2012	12:42:00 PM	BCl3 valve closed
4/4/2012	12:42:00 PM	PH3 valve closed
4/4/2012	12:42:00 PM	SiCl4 pre valve closed
4/4/2012	12:42:00 PM	SiCl4 post valve closed
4/4/2012	12:42:00 PM	Bypass valve closed
4/4/2012	12:42:00 PM	Bubbler valve closed
4/4/2012	12:42:00 PM	Main Vac valve opened
4/4/2012	12:42:00 PM	Helium MFC set to  0.000000
4/4/2012	12:42:00 PM	H2 MFC set to  0.000000
4/4/2012	12:42:00 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:00 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:00 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:00 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:01 PM	Tube furnace set to 0
4/4/2012	12:42:01 PM	H2 valve closed
4/4/2012	12:42:01 PM	BCl3 valve closed
4/4/2012	12:42:01 PM	PH3 valve closed
4/4/2012	12:42:01 PM	SiCl4 pre valve closed
4/4/2012	12:42:01 PM	SiCl4 post valve closed
4/4/2012	12:42:01 PM	Bypass valve closed
4/4/2012	12:42:01 PM	Bubbler valve closed
4/4/2012	12:42:01 PM	Helium valve opened
4/4/2012	12:42:01 PM	Main Vac valve opened
4/4/2012	12:42:01 PM	Helium MFC set to  20.000000
4/4/2012	12:42:01 PM	H2 MFC set to  0.000000
4/4/2012	12:42:01 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:01 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:01 PM	Tube furnace set to 0
4/4/2012	12:42:02 PM	Helium valve closed
4/4/2012	12:42:02 PM	H2 valve closed
4/4/2012	12:42:02 PM	BCl3 valve closed
4/4/2012	12:42:02 PM	PH3 valve closed
4/4/2012	12:42:02 PM	SiCl4 pre valve closed
4/4/2012	12:42:02 PM	SiCl4 post valve closed
4/4/2012	12:42:02 PM	Bypass valve closed
4/4/2012	12:42:02 PM	Bubbler valve closed
4/4/2012	12:42:02 PM	Main Vac valve opened
4/4/2012	12:42:02 PM	Helium MFC set to  0.000000
4/4/2012	12:42:02 PM	H2 MFC set to  0.000000
4/4/2012	12:42:02 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:02 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:02 PM	Tube furnace set to 0
4/4/2012	12:42:03 PM	H2 valve closed
4/4/2012	12:42:03 PM	BCl3 valve closed
4/4/2012	12:42:03 PM	PH3 valve closed
4/4/2012	12:42:03 PM	SiCl4 pre valve closed
4/4/2012	12:42:03 PM	SiCl4 post valve closed
4/4/2012	12:42:03 PM	Bypass valve closed
4/4/2012	12:42:03 PM	Bubbler valve closed
4/4/2012	12:42:03 PM	Helium valve opened
4/4/2012	12:42:03 PM	Main Vac valve opened
4/4/2012	12:42:03 PM	Helium MFC set to  20.000000
4/4/2012	12:42:03 PM	H2 MFC set to  0.000000
4/4/2012	12:42:03 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:03 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:03 PM	Tube furnace set to 0
4/4/2012	12:42:03 PM	Helium valve closed
4/4/2012	12:42:03 PM	H2 valve closed
4/4/2012	12:42:03 PM	BCl3 valve closed
4/4/2012	12:42:03 PM	PH3 valve closed
4/4/2012	12:42:03 PM	SiCl4 pre valve closed
4/4/2012	12:42:03 PM	SiCl4 post valve closed
4/4/2012	12:42:03 PM	Bypass valve closed
4/4/2012	12:42:03 PM	Bubbler valve closed
4/4/2012	12:42:03 PM	Main Vac valve opened
4/4/2012	12:42:03 PM	Helium MFC set to  0.000000
4/4/2012	12:42:03 PM	H2 MFC set to  0.000000
4/4/2012	12:42:03 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:03 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:04 PM	Tube furnace set to 0
4/4/2012	12:42:04 PM	H2 valve closed
4/4/2012	12:42:04 PM	BCl3 valve closed
4/4/2012	12:42:04 PM	PH3 valve closed
4/4/2012	12:42:04 PM	SiCl4 pre valve closed
4/4/2012	12:42:04 PM	SiCl4 post valve closed
4/4/2012	12:42:04 PM	Bypass valve closed
4/4/2012	12:42:04 PM	Bubbler valve closed
4/4/2012	12:42:04 PM	Helium valve opened
4/4/2012	12:42:04 PM	Main Vac valve opened
4/4/2012	12:42:04 PM	Helium MFC set to  20.000000
4/4/2012	12:42:04 PM	H2 MFC set to  0.000000
4/4/2012	12:42:04 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:04 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:04 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:04 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:04 PM	Tube furnace set to 0
4/4/2012	12:42:05 PM	Helium valve closed
4/4/2012	12:42:05 PM	H2 valve closed
4/4/2012	12:42:05 PM	BCl3 valve closed
4/4/2012	12:42:05 PM	PH3 valve closed
4/4/2012	12:42:05 PM	SiCl4 pre valve closed
4/4/2012	12:42:05 PM	SiCl4 post valve closed
4/4/2012	12:42:05 PM	Bypass valve closed
4/4/2012	12:42:05 PM	Bubbler valve closed
4/4/2012	12:42:05 PM	Main Vac valve opened
4/4/2012	12:42:05 PM	Helium MFC set to  0.000000
4/4/2012	12:42:05 PM	H2 MFC set to  0.000000
4/4/2012	12:42:05 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:05 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:05 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:05 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:05 PM	Tube furnace set to 0
4/4/2012	12:42:06 PM	H2 valve closed
4/4/2012	12:42:06 PM	BCl3 valve closed
4/4/2012	12:42:06 PM	PH3 valve closed
4/4/2012	12:42:06 PM	SiCl4 pre valve closed
4/4/2012	12:42:06 PM	SiCl4 post valve closed
4/4/2012	12:42:06 PM	Bypass valve closed
4/4/2012	12:42:06 PM	Bubbler valve closed
4/4/2012	12:42:06 PM	Helium valve opened
4/4/2012	12:42:06 PM	Main Vac valve opened
4/4/2012	12:42:06 PM	Helium MFC set to  20.000000
4/4/2012	12:42:06 PM	H2 MFC set to  0.000000
4/4/2012	12:42:06 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:06 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:06 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:06 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:06 PM	Tube furnace set to 0
4/4/2012	12:42:08 PM	Helium valve closed
4/4/2012	12:42:08 PM	H2 valve closed
4/4/2012	12:42:08 PM	BCl3 valve closed
4/4/2012	12:42:08 PM	PH3 valve closed
4/4/2012	12:42:08 PM	SiCl4 pre valve closed
4/4/2012	12:42:08 PM	SiCl4 post valve closed
4/4/2012	12:42:08 PM	Bypass valve closed
4/4/2012	12:42:08 PM	Bubbler valve closed
4/4/2012	12:42:08 PM	Main Vac valve opened
4/4/2012	12:42:08 PM	Helium MFC set to  0.000000
4/4/2012	12:42:08 PM	H2 MFC set to  0.000000
4/4/2012	12:42:08 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:08 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:08 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:08 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:08 PM	Tube furnace set to 0
4/4/2012	12:42:08 PM	H2 valve closed
4/4/2012	12:42:08 PM	BCl3 valve closed
4/4/2012	12:42:08 PM	PH3 valve closed
4/4/2012	12:42:08 PM	SiCl4 pre valve closed
4/4/2012	12:42:08 PM	SiCl4 post valve closed
4/4/2012	12:42:08 PM	Bypass valve closed
4/4/2012	12:42:08 PM	Bubbler valve closed
4/4/2012	12:42:08 PM	Helium valve opened
4/4/2012	12:42:08 PM	Main Vac valve opened
4/4/2012	12:42:08 PM	Helium MFC set to  20.000000
4/4/2012	12:42:08 PM	H2 MFC set to  0.000000
4/4/2012	12:42:08 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:08 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:08 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:08 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:08 PM	Tube furnace set to 0
4/4/2012	12:42:39 PM	Helium valve closed
4/4/2012	12:42:39 PM	H2 valve closed
4/4/2012	12:42:39 PM	BCl3 valve closed
4/4/2012	12:42:39 PM	PH3 valve closed
4/4/2012	12:42:39 PM	SiCl4 pre valve closed
4/4/2012	12:42:39 PM	SiCl4 post valve closed
4/4/2012	12:42:39 PM	Bypass valve closed
4/4/2012	12:42:39 PM	Bubbler valve closed
4/4/2012	12:42:39 PM	Main Vac valve opened
4/4/2012	12:42:39 PM	Helium MFC set to  0.000000
4/4/2012	12:42:39 PM	H2 MFC set to  0.000000
4/4/2012	12:42:39 PM	BCl3 MFC set to  0.000000
4/4/2012	12:42:39 PM	PH3 MFC set to  0.000000
4/4/2012	12:42:39 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:42:39 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:42:39 PM	Tube furnace set to 0
4/4/2012	12:43:09 PM	H2 valve closed
4/4/2012	12:43:09 PM	BCl3 valve closed
4/4/2012	12:43:09 PM	PH3 valve closed
4/4/2012	12:43:09 PM	SiCl4 pre valve closed
4/4/2012	12:43:09 PM	SiCl4 post valve closed
4/4/2012	12:43:09 PM	Bypass valve closed
4/4/2012	12:43:09 PM	Bubbler valve closed
4/4/2012	12:43:09 PM	Helium valve opened
4/4/2012	12:43:09 PM	Main Vac valve opened
4/4/2012	12:43:09 PM	Helium MFC set to  20.000000
4/4/2012	12:43:09 PM	H2 MFC set to  0.000000
4/4/2012	12:43:09 PM	BCl3 MFC set to  0.000000
4/4/2012	12:43:09 PM	PH3 MFC set to  0.000000
4/4/2012	12:43:09 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:43:09 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:43:09 PM	Tube furnace set to 0
4/4/2012	12:43:39 PM	Helium valve closed
4/4/2012	12:43:39 PM	H2 valve closed
4/4/2012	12:43:39 PM	BCl3 valve closed
4/4/2012	12:43:39 PM	PH3 valve closed
4/4/2012	12:43:39 PM	SiCl4 pre valve closed
4/4/2012	12:43:39 PM	SiCl4 post valve closed
4/4/2012	12:43:39 PM	Bypass valve closed
4/4/2012	12:43:39 PM	Bubbler valve closed
4/4/2012	12:43:39 PM	Main Vac valve opened
4/4/2012	12:43:39 PM	Helium MFC set to  0.000000
4/4/2012	12:43:39 PM	H2 MFC set to  0.000000
4/4/2012	12:43:39 PM	BCl3 MFC set to  0.000000
4/4/2012	12:43:39 PM	PH3 MFC set to  0.000000
4/4/2012	12:43:39 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:43:39 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:43:39 PM	Tube furnace set to 0
4/4/2012	12:44:09 PM	H2 valve closed
4/4/2012	12:44:09 PM	BCl3 valve closed
4/4/2012	12:44:09 PM	PH3 valve closed
4/4/2012	12:44:09 PM	SiCl4 pre valve closed
4/4/2012	12:44:09 PM	SiCl4 post valve closed
4/4/2012	12:44:09 PM	Bypass valve closed
4/4/2012	12:44:09 PM	Bubbler valve closed
4/4/2012	12:44:09 PM	Helium valve opened
4/4/2012	12:44:09 PM	Main Vac valve opened
4/4/2012	12:44:09 PM	Helium MFC set to  20.000000
4/4/2012	12:44:09 PM	H2 MFC set to  0.000000
4/4/2012	12:44:09 PM	BCl3 MFC set to  0.000000
4/4/2012	12:44:09 PM	PH3 MFC set to  0.000000
4/4/2012	12:44:09 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:44:09 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:44:09 PM	Tube furnace set to 0
4/4/2012	12:44:39 PM	Helium valve closed
4/4/2012	12:44:39 PM	H2 valve closed
4/4/2012	12:44:39 PM	BCl3 valve closed
4/4/2012	12:44:39 PM	PH3 valve closed
4/4/2012	12:44:39 PM	SiCl4 pre valve closed
4/4/2012	12:44:39 PM	SiCl4 post valve closed
4/4/2012	12:44:39 PM	Bypass valve closed
4/4/2012	12:44:39 PM	Bubbler valve closed
4/4/2012	12:44:39 PM	Main Vac valve opened
4/4/2012	12:44:39 PM	Helium MFC set to  0.000000
4/4/2012	12:44:39 PM	H2 MFC set to  0.000000
4/4/2012	12:44:39 PM	BCl3 MFC set to  0.000000
4/4/2012	12:44:39 PM	PH3 MFC set to  0.000000
4/4/2012	12:44:40 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:44:40 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:44:40 PM	Tube furnace set to 0
4/4/2012	12:45:10 PM	H2 valve closed
4/4/2012	12:45:10 PM	BCl3 valve closed
4/4/2012	12:45:10 PM	PH3 valve closed
4/4/2012	12:45:10 PM	SiCl4 pre valve closed
4/4/2012	12:45:10 PM	SiCl4 post valve closed
4/4/2012	12:45:10 PM	Bypass valve closed
4/4/2012	12:45:10 PM	Bubbler valve closed
4/4/2012	12:45:10 PM	Helium valve opened
4/4/2012	12:45:10 PM	Main Vac valve opened
4/4/2012	12:45:10 PM	Helium MFC set to  20.000000
4/4/2012	12:45:10 PM	H2 MFC set to  0.000000
4/4/2012	12:45:10 PM	BCl3 MFC set to  0.000000
4/4/2012	12:45:10 PM	PH3 MFC set to  0.000000
4/4/2012	12:45:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:45:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:45:10 PM	Tube furnace set to 0
4/4/2012	12:45:40 PM	Helium valve closed
4/4/2012	12:45:40 PM	H2 valve closed
4/4/2012	12:45:40 PM	BCl3 valve closed
4/4/2012	12:45:40 PM	PH3 valve closed
4/4/2012	12:45:40 PM	SiCl4 pre valve closed
4/4/2012	12:45:40 PM	SiCl4 post valve closed
4/4/2012	12:45:40 PM	Bypass valve closed
4/4/2012	12:45:40 PM	Bubbler valve closed
4/4/2012	12:45:40 PM	Main Vac valve opened
4/4/2012	12:45:40 PM	Helium MFC set to  0.000000
4/4/2012	12:45:40 PM	H2 MFC set to  0.000000
4/4/2012	12:45:40 PM	BCl3 MFC set to  0.000000
4/4/2012	12:45:40 PM	PH3 MFC set to  0.000000
4/4/2012	12:45:40 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:45:40 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:45:40 PM	Tube furnace set to 200
4/4/2012	12:46:10 PM	H2 valve closed
4/4/2012	12:46:10 PM	BCl3 valve closed
4/4/2012	12:46:10 PM	PH3 valve closed
4/4/2012	12:46:10 PM	SiCl4 pre valve closed
4/4/2012	12:46:10 PM	SiCl4 post valve closed
4/4/2012	12:46:10 PM	Bypass valve closed
4/4/2012	12:46:10 PM	Bubbler valve closed
4/4/2012	12:46:10 PM	Helium valve opened
4/4/2012	12:46:10 PM	Main Vac valve opened
4/4/2012	12:46:10 PM	Helium MFC set to  20.000000
4/4/2012	12:46:10 PM	H2 MFC set to  0.000000
4/4/2012	12:46:10 PM	BCl3 MFC set to  0.000000
4/4/2012	12:46:10 PM	PH3 MFC set to  0.000000
4/4/2012	12:46:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:46:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:46:10 PM	Tube furnace set to 200
4/4/2012	12:46:40 PM	Helium valve closed
4/4/2012	12:46:40 PM	H2 valve closed
4/4/2012	12:46:40 PM	BCl3 valve closed
4/4/2012	12:46:40 PM	PH3 valve closed
4/4/2012	12:46:40 PM	SiCl4 pre valve closed
4/4/2012	12:46:40 PM	SiCl4 post valve closed
4/4/2012	12:46:40 PM	Bypass valve closed
4/4/2012	12:46:40 PM	Bubbler valve closed
4/4/2012	12:46:40 PM	Main Vac valve opened
4/4/2012	12:46:40 PM	Helium MFC set to  0.000000
4/4/2012	12:46:40 PM	H2 MFC set to  0.000000
4/4/2012	12:46:40 PM	BCl3 MFC set to  0.000000
4/4/2012	12:46:40 PM	PH3 MFC set to  0.000000
4/4/2012	12:46:40 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:46:40 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:46:41 PM	Tube furnace set to 200
4/4/2012	12:47:11 PM	H2 valve closed
4/4/2012	12:47:11 PM	BCl3 valve closed
4/4/2012	12:47:11 PM	PH3 valve closed
4/4/2012	12:47:11 PM	SiCl4 pre valve closed
4/4/2012	12:47:11 PM	SiCl4 post valve closed
4/4/2012	12:47:11 PM	Bypass valve closed
4/4/2012	12:47:11 PM	Bubbler valve closed
4/4/2012	12:47:11 PM	Helium valve opened
4/4/2012	12:47:11 PM	Main Vac valve opened
4/4/2012	12:47:11 PM	Helium MFC set to  20.000000
4/4/2012	12:47:11 PM	H2 MFC set to  0.000000
4/4/2012	12:47:11 PM	BCl3 MFC set to  0.000000
4/4/2012	12:47:11 PM	PH3 MFC set to  0.000000
4/4/2012	12:47:11 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:47:11 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:47:11 PM	Tube furnace set to 200
4/4/2012	12:47:41 PM	Helium valve closed
4/4/2012	12:47:41 PM	H2 valve closed
4/4/2012	12:47:41 PM	BCl3 valve closed
4/4/2012	12:47:41 PM	PH3 valve closed
4/4/2012	12:47:41 PM	SiCl4 pre valve closed
4/4/2012	12:47:41 PM	SiCl4 post valve closed
4/4/2012	12:47:41 PM	Bypass valve closed
4/4/2012	12:47:41 PM	Bubbler valve closed
4/4/2012	12:47:41 PM	Main Vac valve opened
4/4/2012	12:47:41 PM	Helium MFC set to  0.000000
4/4/2012	12:47:41 PM	H2 MFC set to  0.000000
4/4/2012	12:47:41 PM	BCl3 MFC set to  0.000000
4/4/2012	12:47:41 PM	PH3 MFC set to  0.000000
4/4/2012	12:47:41 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:47:41 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:47:41 PM	Tube furnace set to 200
4/4/2012	12:48:11 PM	H2 valve closed
4/4/2012	12:48:11 PM	BCl3 valve closed
4/4/2012	12:48:11 PM	PH3 valve closed
4/4/2012	12:48:11 PM	SiCl4 pre valve closed
4/4/2012	12:48:11 PM	SiCl4 post valve closed
4/4/2012	12:48:11 PM	Bypass valve closed
4/4/2012	12:48:11 PM	Bubbler valve closed
4/4/2012	12:48:11 PM	Helium valve opened
4/4/2012	12:48:11 PM	Main Vac valve opened
4/4/2012	12:48:11 PM	Helium MFC set to  20.000000
4/4/2012	12:48:11 PM	H2 MFC set to  0.000000
4/4/2012	12:48:11 PM	BCl3 MFC set to  0.000000
4/4/2012	12:48:11 PM	PH3 MFC set to  0.000000
4/4/2012	12:48:11 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:48:11 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:48:11 PM	Tube furnace set to 200
4/4/2012	12:48:41 PM	Helium valve closed
4/4/2012	12:48:41 PM	H2 valve closed
4/4/2012	12:48:41 PM	BCl3 valve closed
4/4/2012	12:48:41 PM	PH3 valve closed
4/4/2012	12:48:41 PM	SiCl4 pre valve closed
4/4/2012	12:48:41 PM	SiCl4 post valve closed
4/4/2012	12:48:41 PM	Bypass valve closed
4/4/2012	12:48:41 PM	Bubbler valve closed
4/4/2012	12:48:41 PM	Main Vac valve opened
4/4/2012	12:48:41 PM	Helium MFC set to  0.000000
4/4/2012	12:48:41 PM	H2 MFC set to  0.000000
4/4/2012	12:48:41 PM	BCl3 MFC set to  0.000000
4/4/2012	12:48:41 PM	PH3 MFC set to  0.000000
4/4/2012	12:48:41 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:48:41 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:48:42 PM	Tube furnace set to 200
4/4/2012	12:49:12 PM	H2 valve closed
4/4/2012	12:49:12 PM	BCl3 valve closed
4/4/2012	12:49:12 PM	PH3 valve closed
4/4/2012	12:49:12 PM	SiCl4 pre valve closed
4/4/2012	12:49:12 PM	SiCl4 post valve closed
4/4/2012	12:49:12 PM	Bypass valve closed
4/4/2012	12:49:12 PM	Bubbler valve closed
4/4/2012	12:49:12 PM	Helium valve opened
4/4/2012	12:49:12 PM	Main Vac valve opened
4/4/2012	12:49:12 PM	Helium MFC set to  20.000000
4/4/2012	12:49:12 PM	H2 MFC set to  0.000000
4/4/2012	12:49:12 PM	BCl3 MFC set to  0.000000
4/4/2012	12:49:12 PM	PH3 MFC set to  0.000000
4/4/2012	12:49:12 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:49:12 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:49:12 PM	Tube furnace set to 200
4/4/2012	12:49:42 PM	Helium valve closed
4/4/2012	12:49:42 PM	H2 valve closed
4/4/2012	12:49:42 PM	BCl3 valve closed
4/4/2012	12:49:42 PM	PH3 valve closed
4/4/2012	12:49:42 PM	SiCl4 pre valve closed
4/4/2012	12:49:42 PM	SiCl4 post valve closed
4/4/2012	12:49:42 PM	Bypass valve closed
4/4/2012	12:49:42 PM	Bubbler valve closed
4/4/2012	12:49:42 PM	Main Vac valve opened
4/4/2012	12:49:42 PM	Helium MFC set to  0.000000
4/4/2012	12:49:42 PM	H2 MFC set to  0.000000
4/4/2012	12:49:42 PM	BCl3 MFC set to  0.000000
4/4/2012	12:49:42 PM	PH3 MFC set to  0.000000
4/4/2012	12:49:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:49:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:49:42 PM	Tube furnace set to 200
4/4/2012	12:50:12 PM	H2 valve closed
4/4/2012	12:50:12 PM	BCl3 valve closed
4/4/2012	12:50:12 PM	PH3 valve closed
4/4/2012	12:50:12 PM	SiCl4 pre valve closed
4/4/2012	12:50:12 PM	SiCl4 post valve closed
4/4/2012	12:50:12 PM	Bypass valve closed
4/4/2012	12:50:12 PM	Bubbler valve closed
4/4/2012	12:50:12 PM	Helium valve opened
4/4/2012	12:50:12 PM	Main Vac valve opened
4/4/2012	12:50:12 PM	Helium MFC set to  20.000000
4/4/2012	12:50:12 PM	H2 MFC set to  0.000000
4/4/2012	12:50:12 PM	BCl3 MFC set to  0.000000
4/4/2012	12:50:12 PM	PH3 MFC set to  0.000000
4/4/2012	12:50:12 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:50:12 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:50:12 PM	Tube furnace set to 200
4/4/2012	12:50:42 PM	Helium valve closed
4/4/2012	12:50:42 PM	H2 valve closed
4/4/2012	12:50:42 PM	BCl3 valve closed
4/4/2012	12:50:42 PM	PH3 valve closed
4/4/2012	12:50:42 PM	SiCl4 pre valve closed
4/4/2012	12:50:42 PM	SiCl4 post valve closed
4/4/2012	12:50:42 PM	Bypass valve closed
4/4/2012	12:50:42 PM	Bubbler valve closed
4/4/2012	12:50:42 PM	Main Vac valve opened
4/4/2012	12:50:42 PM	Helium MFC set to  0.000000
4/4/2012	12:50:42 PM	H2 MFC set to  0.000000
4/4/2012	12:50:42 PM	BCl3 MFC set to  0.000000
4/4/2012	12:50:42 PM	PH3 MFC set to  0.000000
4/4/2012	12:50:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:50:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:50:42 PM	Tube furnace set to 200
4/4/2012	12:51:13 PM	H2 valve closed
4/4/2012	12:51:13 PM	BCl3 valve closed
4/4/2012	12:51:13 PM	PH3 valve closed
4/4/2012	12:51:13 PM	SiCl4 pre valve closed
4/4/2012	12:51:13 PM	SiCl4 post valve closed
4/4/2012	12:51:13 PM	Bypass valve closed
4/4/2012	12:51:13 PM	Bubbler valve closed
4/4/2012	12:51:13 PM	Helium valve opened
4/4/2012	12:51:13 PM	Main Vac valve opened
4/4/2012	12:51:13 PM	Helium MFC set to  20.000000
4/4/2012	12:51:13 PM	H2 MFC set to  0.000000
4/4/2012	12:51:13 PM	BCl3 MFC set to  0.000000
4/4/2012	12:51:13 PM	PH3 MFC set to  0.000000
4/4/2012	12:51:13 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:51:13 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:51:13 PM	Tube furnace set to 200
4/4/2012	12:51:43 PM	Helium valve closed
4/4/2012	12:51:43 PM	H2 valve closed
4/4/2012	12:51:43 PM	BCl3 valve closed
4/4/2012	12:51:43 PM	PH3 valve closed
4/4/2012	12:51:43 PM	SiCl4 pre valve closed
4/4/2012	12:51:43 PM	SiCl4 post valve closed
4/4/2012	12:51:43 PM	Bypass valve closed
4/4/2012	12:51:43 PM	Bubbler valve closed
4/4/2012	12:51:43 PM	Main Vac valve opened
4/4/2012	12:51:43 PM	Helium MFC set to  0.000000
4/4/2012	12:51:43 PM	H2 MFC set to  0.000000
4/4/2012	12:51:43 PM	BCl3 MFC set to  0.000000
4/4/2012	12:51:43 PM	PH3 MFC set to  0.000000
4/4/2012	12:51:43 PM	SiCl4 MFC set to  0.000000
4/4/2012	12:51:43 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	12:51:43 PM	Tube furnace set to 0
4/4/2012	12:51:44 PM	Run finished at 12:51 PM
4/4/2012	1:12:14 PM	Main Vac valve closed
4/4/2012	1:12:23 PM	Main Vac valve opened
4/4/2012	1:12:31 PM	Recipe started at 1:12 PM
4/4/2012	1:12:31 PM	Helium valve closed
4/4/2012	1:12:31 PM	H2 valve closed
4/4/2012	1:12:31 PM	BCl3 valve closed
4/4/2012	1:12:31 PM	PH3 valve closed
4/4/2012	1:12:31 PM	SiCl4 pre valve closed
4/4/2012	1:12:31 PM	SiCl4 post valve closed
4/4/2012	1:12:31 PM	Main Vac valve closed
4/4/2012	1:12:31 PM	Bypass valve closed
4/4/2012	1:12:31 PM	Bubbler valve closed
4/4/2012	1:12:31 PM	Helium MFC set to  0.000000
4/4/2012	1:12:31 PM	H2 MFC set to  0.000000
4/4/2012	1:12:31 PM	BCl3 MFC set to  0.000000
4/4/2012	1:12:31 PM	PH3 MFC set to  0.000000
4/4/2012	1:12:31 PM	SiCl4 MFC set to  0.000000
4/4/2012	1:12:31 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:12:31 PM	Tube furnace set to 0
4/4/2012	1:12:34 PM	Helium valve closed
4/4/2012	1:12:34 PM	BCl3 valve closed
4/4/2012	1:12:34 PM	PH3 valve closed
4/4/2012	1:12:34 PM	SiCl4 pre valve closed
4/4/2012	1:12:34 PM	SiCl4 post valve closed
4/4/2012	1:12:34 PM	Main Vac valve closed
4/4/2012	1:12:34 PM	Bypass valve closed
4/4/2012	1:12:34 PM	Bubbler valve closed
4/4/2012	1:12:34 PM	H2 valve opened
4/4/2012	1:12:34 PM	Helium MFC set to  0.000000
4/4/2012	1:12:34 PM	H2 MFC set to  500.000000
4/4/2012	1:12:34 PM	BCl3 MFC set to  0.000000
4/4/2012	1:12:35 PM	PH3 MFC set to  0.000000
4/4/2012	1:12:35 PM	SiCl4 MFC set to  0.000000
4/4/2012	1:12:35 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:12:35 PM	Tube furnace set to 0
4/4/2012	1:13:39 PM	Helium valve closed
4/4/2012	1:13:39 PM	BCl3 valve closed
4/4/2012	1:13:39 PM	PH3 valve closed
4/4/2012	1:13:39 PM	SiCl4 pre valve closed
4/4/2012	1:13:39 PM	SiCl4 post valve closed
4/4/2012	1:13:39 PM	Main Vac valve closed
4/4/2012	1:13:39 PM	Bypass valve closed
4/4/2012	1:13:39 PM	H2 valve opened
4/4/2012	1:13:39 PM	Bubbler valve opened
4/4/2012	1:13:39 PM	Helium MFC set to  0.000000
4/4/2012	1:13:39 PM	H2 MFC set to  500.000000
4/4/2012	1:13:39 PM	BCl3 MFC set to  0.000000
4/4/2012	1:13:39 PM	PH3 MFC set to  0.000000
4/4/2012	1:13:39 PM	SiCl4 MFC set to  0.000000
4/4/2012	1:13:39 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:13:39 PM	Tube furnace set to 0
4/4/2012	1:13:40 PM	Helium valve closed
4/4/2012	1:13:40 PM	BCl3 valve closed
4/4/2012	1:13:40 PM	PH3 valve closed
4/4/2012	1:13:40 PM	SiCl4 pre valve closed
4/4/2012	1:13:40 PM	SiCl4 post valve closed
4/4/2012	1:13:40 PM	Main Vac valve closed
4/4/2012	1:13:40 PM	Bypass valve closed
4/4/2012	1:13:40 PM	H2 valve opened
4/4/2012	1:13:40 PM	Bubbler valve opened
4/4/2012	1:13:40 PM	Helium MFC set to  0.000000
4/4/2012	1:13:40 PM	H2 MFC set to  500.000000
4/4/2012	1:13:40 PM	BCl3 MFC set to  0.000000
4/4/2012	1:13:40 PM	PH3 MFC set to  0.000000
4/4/2012	1:13:40 PM	SiCl4 MFC set to  0.000000
4/4/2012	1:13:40 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:13:41 PM	Tube furnace set to 1000
4/4/2012	1:33:41 PM	Helium valve closed
4/4/2012	1:33:41 PM	PH3 valve closed
4/4/2012	1:33:41 PM	Main Vac valve closed
4/4/2012	1:33:41 PM	Bypass valve closed
4/4/2012	1:33:41 PM	H2 valve opened
4/4/2012	1:33:41 PM	BCl3 valve opened
4/4/2012	1:33:41 PM	SiCl4 pre valve opened
4/4/2012	1:33:41 PM	SiCl4 post valve opened
4/4/2012	1:33:41 PM	Bubbler valve opened
4/4/2012	1:33:41 PM	Helium MFC set to  0.000000
4/4/2012	1:33:41 PM	H2 MFC set to  450.000000
4/4/2012	1:33:41 PM	BCl3 MFC set to  1.500000
4/4/2012	1:33:41 PM	PH3 MFC set to  0.000000
4/4/2012	1:33:41 PM	SiCl4 MFC set to  50.000000
4/4/2012	1:33:41 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:33:41 PM	Tube furnace set to 1000
4/4/2012	1:46:41 PM	Helium valve closed
4/4/2012	1:46:41 PM	BCl3 valve closed
4/4/2012	1:46:41 PM	PH3 valve closed
4/4/2012	1:46:41 PM	SiCl4 pre valve closed
4/4/2012	1:46:41 PM	SiCl4 post valve closed
4/4/2012	1:46:41 PM	Main Vac valve closed
4/4/2012	1:46:41 PM	Bypass valve closed
4/4/2012	1:46:41 PM	H2 valve opened
4/4/2012	1:46:41 PM	Bubbler valve opened
4/4/2012	1:46:41 PM	Helium MFC set to  0.000000
4/4/2012	1:46:41 PM	H2 MFC set to  500.000000
4/4/2012	1:46:41 PM	BCl3 MFC set to  0.000000
4/4/2012	1:46:41 PM	PH3 MFC set to  0.000000
4/4/2012	1:46:41 PM	SiCl4 MFC set to  0.000000
4/4/2012	1:46:41 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:46:41 PM	Tube furnace set to 950
4/4/2012	1:48:41 PM	Helium valve closed
4/4/2012	1:48:41 PM	BCl3 valve closed
4/4/2012	1:48:41 PM	PH3 valve closed
4/4/2012	1:48:41 PM	SiCl4 pre valve closed
4/4/2012	1:48:41 PM	SiCl4 post valve closed
4/4/2012	1:48:41 PM	Main Vac valve closed
4/4/2012	1:48:41 PM	Bypass valve closed
4/4/2012	1:48:41 PM	H2 valve opened
4/4/2012	1:48:41 PM	Bubbler valve opened
4/4/2012	1:48:41 PM	Helium MFC set to  0.000000
4/4/2012	1:48:41 PM	H2 MFC set to  500.000000
4/4/2012	1:48:41 PM	BCl3 MFC set to  0.000000
4/4/2012	1:48:41 PM	PH3 MFC set to  0.000000
4/4/2012	1:48:41 PM	SiCl4 MFC set to  0.000000
4/4/2012	1:48:41 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:48:41 PM	Tube furnace set to 900
4/4/2012	1:50:41 PM	Helium valve closed
4/4/2012	1:50:41 PM	BCl3 valve closed
4/4/2012	1:50:41 PM	PH3 valve closed
4/4/2012	1:50:41 PM	SiCl4 pre valve closed
4/4/2012	1:50:41 PM	SiCl4 post valve closed
4/4/2012	1:50:41 PM	Main Vac valve closed
4/4/2012	1:50:41 PM	Bypass valve closed
4/4/2012	1:50:41 PM	H2 valve opened
4/4/2012	1:50:41 PM	Bubbler valve opened
4/4/2012	1:50:41 PM	Helium MFC set to  0.000000
4/4/2012	1:50:41 PM	H2 MFC set to  500.000000
4/4/2012	1:50:41 PM	BCl3 MFC set to  0.000000
4/4/2012	1:50:41 PM	PH3 MFC set to  0.000000
4/4/2012	1:50:41 PM	SiCl4 MFC set to  0.000000
4/4/2012	1:50:41 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:50:41 PM	Tube furnace set to 850
4/4/2012	1:52:41 PM	H2 valve closed
4/4/2012	1:52:41 PM	BCl3 valve closed
4/4/2012	1:52:42 PM	PH3 valve closed
4/4/2012	1:52:42 PM	SiCl4 pre valve closed
4/4/2012	1:52:42 PM	SiCl4 post valve closed
4/4/2012	1:52:42 PM	Main Vac valve closed
4/4/2012	1:52:42 PM	Bypass valve closed
4/4/2012	1:52:42 PM	Helium valve opened
4/4/2012	1:52:42 PM	Bubbler valve opened
4/4/2012	1:52:42 PM	Helium MFC set to  500.000000
4/4/2012	1:52:42 PM	H2 MFC set to  0.000000
4/4/2012	1:52:42 PM	BCl3 MFC set to  0.000000
4/4/2012	1:52:42 PM	PH3 MFC set to  0.000000
4/4/2012	1:52:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	1:52:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:52:42 PM	Tube furnace set to 800
4/4/2012	1:54:42 PM	H2 valve closed
4/4/2012	1:54:42 PM	BCl3 valve closed
4/4/2012	1:54:42 PM	PH3 valve closed
4/4/2012	1:54:42 PM	SiCl4 pre valve closed
4/4/2012	1:54:42 PM	SiCl4 post valve closed
4/4/2012	1:54:42 PM	Main Vac valve closed
4/4/2012	1:54:42 PM	Bypass valve closed
4/4/2012	1:54:42 PM	Helium valve opened
4/4/2012	1:54:42 PM	Bubbler valve opened
4/4/2012	1:54:42 PM	Helium MFC set to  500.000000
4/4/2012	1:54:42 PM	H2 MFC set to  0.000000
4/4/2012	1:54:42 PM	BCl3 MFC set to  0.000000
4/4/2012	1:54:42 PM	PH3 MFC set to  0.000000
4/4/2012	1:54:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	1:54:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:54:42 PM	Tube furnace set to 750
4/4/2012	1:56:42 PM	H2 valve closed
4/4/2012	1:56:42 PM	BCl3 valve closed
4/4/2012	1:56:42 PM	PH3 valve closed
4/4/2012	1:56:42 PM	SiCl4 pre valve closed
4/4/2012	1:56:42 PM	SiCl4 post valve closed
4/4/2012	1:56:42 PM	Main Vac valve closed
4/4/2012	1:56:42 PM	Bypass valve closed
4/4/2012	1:56:42 PM	Helium valve opened
4/4/2012	1:56:42 PM	Bubbler valve opened
4/4/2012	1:56:42 PM	Helium MFC set to  500.000000
4/4/2012	1:56:42 PM	H2 MFC set to  0.000000
4/4/2012	1:56:42 PM	BCl3 MFC set to  0.000000
4/4/2012	1:56:42 PM	PH3 MFC set to  0.000000
4/4/2012	1:56:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	1:56:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	1:56:42 PM	Tube furnace set to 0
4/4/2012	2:16:42 PM	Helium valve closed
4/4/2012	2:16:42 PM	H2 valve closed
4/4/2012	2:16:42 PM	BCl3 valve closed
4/4/2012	2:16:42 PM	PH3 valve closed
4/4/2012	2:16:42 PM	SiCl4 pre valve closed
4/4/2012	2:16:42 PM	SiCl4 post valve closed
4/4/2012	2:16:42 PM	Main Vac valve closed
4/4/2012	2:16:42 PM	Bypass valve closed
4/4/2012	2:16:42 PM	Bubbler valve closed
4/4/2012	2:16:42 PM	Helium MFC set to  0.000000
4/4/2012	2:16:42 PM	H2 MFC set to  0.000000
4/4/2012	2:16:42 PM	BCl3 MFC set to  0.000000
4/4/2012	2:16:42 PM	PH3 MFC set to  0.000000
4/4/2012	2:16:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	2:16:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	2:16:42 PM	Tube furnace set to 0
4/4/2012	2:16:43 PM	Run finished at 2:16 PM
4/4/2012	2:51:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	2:51:12 PM	Recipe started at 2:51 PM
4/4/2012	2:51:12 PM	Helium valve closed
4/4/2012	2:51:12 PM	H2 valve closed
4/4/2012	2:51:12 PM	BCl3 valve closed
4/4/2012	2:51:12 PM	PH3 valve closed
4/4/2012	2:51:12 PM	SiCl4 pre valve closed
4/4/2012	2:51:12 PM	SiCl4 post valve closed
4/4/2012	2:51:12 PM	Main Vac valve closed
4/4/2012	2:51:12 PM	Bypass valve closed
4/4/2012	2:51:12 PM	Bubbler valve closed
4/4/2012	2:51:12 PM	Helium MFC set to  0.000000
4/4/2012	2:51:12 PM	H2 MFC set to  0.000000
4/4/2012	2:51:12 PM	BCl3 MFC set to  0.000000
4/4/2012	2:51:12 PM	PH3 MFC set to  0.000000
4/4/2012	2:51:12 PM	SiCl4 MFC set to  0.000000
4/4/2012	2:51:12 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	2:51:13 PM	Tube furnace set to 0
4/4/2012	2:51:16 PM	H2 valve closed
4/4/2012	2:51:16 PM	BCl3 valve closed
4/4/2012	2:51:16 PM	PH3 valve closed
4/4/2012	2:51:16 PM	SiCl4 pre valve closed
4/4/2012	2:51:16 PM	SiCl4 post valve closed
4/4/2012	2:51:16 PM	Main Vac valve closed
4/4/2012	2:51:16 PM	Bypass valve closed
4/4/2012	2:51:16 PM	Bubbler valve closed
4/4/2012	2:51:16 PM	Helium valve opened
4/4/2012	2:51:16 PM	Helium MFC set to  500.000000
4/4/2012	2:51:16 PM	H2 MFC set to  0.000000
4/4/2012	2:51:16 PM	BCl3 MFC set to  0.000000
4/4/2012	2:51:16 PM	PH3 MFC set to  0.000000
4/4/2012	2:51:16 PM	SiCl4 MFC set to  0.000000
4/4/2012	2:51:16 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	2:51:16 PM	Tube furnace set to 0
4/4/2012	2:51:20 PM	Helium valve closed
4/4/2012	2:51:20 PM	H2 valve closed
4/4/2012	2:51:20 PM	BCl3 valve closed
4/4/2012	2:51:20 PM	PH3 valve closed
4/4/2012	2:51:20 PM	SiCl4 pre valve closed
4/4/2012	2:51:20 PM	SiCl4 post valve closed
4/4/2012	2:51:20 PM	Main Vac valve closed
4/4/2012	2:51:20 PM	Bypass valve closed
4/4/2012	2:51:20 PM	Bubbler valve closed
4/4/2012	2:51:20 PM	Helium MFC set to  0.000000
4/4/2012	2:51:20 PM	H2 MFC set to  0.000000
4/4/2012	2:51:20 PM	BCl3 MFC set to  0.000000
4/4/2012	2:51:20 PM	PH3 MFC set to  0.000000
4/4/2012	2:51:20 PM	SiCl4 MFC set to  0.000000
4/4/2012	2:51:20 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	2:51:20 PM	Tube furnace set to 0
4/4/2012	2:51:21 PM	Run finished at 2:51 PM
4/4/2012	2:51:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	2:53:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	2:53:39 PM	Recipe started at 2:53 PM
4/4/2012	2:53:39 PM	Helium valve closed
4/4/2012	2:53:39 PM	H2 valve closed
4/4/2012	2:53:39 PM	BCl3 valve closed
4/4/2012	2:53:39 PM	PH3 valve closed
4/4/2012	2:53:39 PM	SiCl4 pre valve closed
4/4/2012	2:53:39 PM	SiCl4 post valve closed
4/4/2012	2:53:39 PM	Main Vac valve closed
4/4/2012	2:53:39 PM	Bubbler valve closed
4/4/2012	2:53:39 PM	Bypass valve opened
4/4/2012	2:53:39 PM	Helium MFC set to  0.000000
4/4/2012	2:53:39 PM	H2 MFC set to  0.000000
4/4/2012	2:53:39 PM	BCl3 MFC set to  0.000000
4/4/2012	2:53:39 PM	PH3 MFC set to  0.000000
4/4/2012	2:53:39 PM	SiCl4 MFC set to  0.000000
4/4/2012	2:53:39 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	2:53:40 PM	Tube furnace set to 0
4/4/2012	2:54:37 PM	Helium valve closed
4/4/2012	2:54:37 PM	H2 valve closed
4/4/2012	2:54:37 PM	BCl3 valve closed
4/4/2012	2:54:37 PM	PH3 valve closed
4/4/2012	2:54:37 PM	SiCl4 pre valve closed
4/4/2012	2:54:37 PM	SiCl4 post valve closed
4/4/2012	2:54:37 PM	Main Vac valve closed
4/4/2012	2:54:37 PM	Bubbler valve closed
4/4/2012	2:54:37 PM	Bypass valve opened
4/4/2012	2:54:37 PM	Helium MFC set to  0.000000
4/4/2012	2:54:37 PM	H2 MFC set to  0.000000
4/4/2012	2:54:37 PM	BCl3 MFC set to  0.000000
4/4/2012	2:54:37 PM	PH3 MFC set to  0.000000
4/4/2012	2:54:37 PM	SiCl4 MFC set to  0.000000
4/4/2012	2:54:37 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	2:54:37 PM	Tube furnace set to 0
4/4/2012	2:55:37 PM	Helium valve closed
4/4/2012	2:55:37 PM	H2 valve closed
4/4/2012	2:55:37 PM	BCl3 valve closed
4/4/2012	2:55:37 PM	PH3 valve closed
4/4/2012	2:55:37 PM	SiCl4 pre valve closed
4/4/2012	2:55:37 PM	SiCl4 post valve closed
4/4/2012	2:55:37 PM	Bypass valve closed
4/4/2012	2:55:37 PM	Bubbler valve closed
4/4/2012	2:55:37 PM	Main Vac valve opened
4/4/2012	2:55:37 PM	Helium MFC set to  0.000000
4/4/2012	2:55:37 PM	H2 MFC set to  0.000000
4/4/2012	2:55:37 PM	BCl3 MFC set to  0.000000
4/4/2012	2:55:37 PM	PH3 MFC set to  0.000000
4/4/2012	2:55:37 PM	SiCl4 MFC set to  0.000000
4/4/2012	2:55:37 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	2:55:37 PM	Tube furnace set to 0
4/4/2012	2:55:38 PM	Run finished at 2:55 PM
4/4/2012	2:55:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	3:05:08 PM	Recipe started at 3:04 PM
4/4/2012	3:05:08 PM	Helium valve closed
4/4/2012	3:05:08 PM	H2 valve closed
4/4/2012	3:05:08 PM	BCl3 valve closed
4/4/2012	3:05:08 PM	PH3 valve closed
4/4/2012	3:05:08 PM	SiCl4 pre valve closed
4/4/2012	3:05:08 PM	SiCl4 post valve closed
4/4/2012	3:05:08 PM	Bypass valve closed
4/4/2012	3:05:08 PM	Bubbler valve closed
4/4/2012	3:05:08 PM	Main Vac valve opened
4/4/2012	3:05:08 PM	Helium MFC set to  0.000000
4/4/2012	3:05:08 PM	H2 MFC set to  0.000000
4/4/2012	3:05:08 PM	BCl3 MFC set to  0.000000
4/4/2012	3:05:08 PM	PH3 MFC set to  0.000000
4/4/2012	3:05:08 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:05:08 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:05:08 PM	Tube furnace set to 0
4/4/2012	3:05:38 PM	H2 valve closed
4/4/2012	3:05:38 PM	BCl3 valve closed
4/4/2012	3:05:38 PM	PH3 valve closed
4/4/2012	3:05:38 PM	SiCl4 pre valve closed
4/4/2012	3:05:38 PM	SiCl4 post valve closed
4/4/2012	3:05:38 PM	Bypass valve closed
4/4/2012	3:05:38 PM	Bubbler valve closed
4/4/2012	3:05:38 PM	Helium valve opened
4/4/2012	3:05:38 PM	Main Vac valve opened
4/4/2012	3:05:38 PM	Helium MFC set to  20.000000
4/4/2012	3:05:38 PM	H2 MFC set to  0.000000
4/4/2012	3:05:38 PM	BCl3 MFC set to  0.000000
4/4/2012	3:05:38 PM	PH3 MFC set to  0.000000
4/4/2012	3:05:38 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:05:38 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:05:38 PM	Tube furnace set to 0
4/4/2012	3:06:08 PM	Helium valve closed
4/4/2012	3:06:08 PM	H2 valve closed
4/4/2012	3:06:08 PM	BCl3 valve closed
4/4/2012	3:06:08 PM	PH3 valve closed
4/4/2012	3:06:08 PM	SiCl4 pre valve closed
4/4/2012	3:06:08 PM	SiCl4 post valve closed
4/4/2012	3:06:08 PM	Bypass valve closed
4/4/2012	3:06:08 PM	Bubbler valve closed
4/4/2012	3:06:08 PM	Main Vac valve opened
4/4/2012	3:06:08 PM	Helium MFC set to  0.000000
4/4/2012	3:06:08 PM	H2 MFC set to  0.000000
4/4/2012	3:06:08 PM	BCl3 MFC set to  0.000000
4/4/2012	3:06:08 PM	PH3 MFC set to  0.000000
4/4/2012	3:06:08 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:06:08 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:06:08 PM	Tube furnace set to 0
4/4/2012	3:06:38 PM	H2 valve closed
4/4/2012	3:06:38 PM	BCl3 valve closed
4/4/2012	3:06:38 PM	PH3 valve closed
4/4/2012	3:06:38 PM	SiCl4 pre valve closed
4/4/2012	3:06:38 PM	SiCl4 post valve closed
4/4/2012	3:06:38 PM	Bypass valve closed
4/4/2012	3:06:38 PM	Bubbler valve closed
4/4/2012	3:06:38 PM	Helium valve opened
4/4/2012	3:06:38 PM	Main Vac valve opened
4/4/2012	3:06:38 PM	Helium MFC set to  20.000000
4/4/2012	3:06:38 PM	H2 MFC set to  0.000000
4/4/2012	3:06:38 PM	BCl3 MFC set to  0.000000
4/4/2012	3:06:38 PM	PH3 MFC set to  0.000000
4/4/2012	3:06:38 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:06:38 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:06:39 PM	Tube furnace set to 0
4/4/2012	3:07:09 PM	Helium valve closed
4/4/2012	3:07:09 PM	H2 valve closed
4/4/2012	3:07:09 PM	BCl3 valve closed
4/4/2012	3:07:09 PM	PH3 valve closed
4/4/2012	3:07:09 PM	SiCl4 pre valve closed
4/4/2012	3:07:09 PM	SiCl4 post valve closed
4/4/2012	3:07:09 PM	Bypass valve closed
4/4/2012	3:07:09 PM	Bubbler valve closed
4/4/2012	3:07:09 PM	Main Vac valve opened
4/4/2012	3:07:09 PM	Helium MFC set to  0.000000
4/4/2012	3:07:09 PM	H2 MFC set to  0.000000
4/4/2012	3:07:09 PM	BCl3 MFC set to  0.000000
4/4/2012	3:07:09 PM	PH3 MFC set to  0.000000
4/4/2012	3:07:09 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:07:09 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:07:09 PM	Tube furnace set to 0
4/4/2012	3:07:39 PM	H2 valve closed
4/4/2012	3:07:39 PM	BCl3 valve closed
4/4/2012	3:07:39 PM	PH3 valve closed
4/4/2012	3:07:39 PM	SiCl4 pre valve closed
4/4/2012	3:07:39 PM	SiCl4 post valve closed
4/4/2012	3:07:39 PM	Bypass valve closed
4/4/2012	3:07:39 PM	Bubbler valve closed
4/4/2012	3:07:39 PM	Helium valve opened
4/4/2012	3:07:39 PM	Main Vac valve opened
4/4/2012	3:07:39 PM	Helium MFC set to  20.000000
4/4/2012	3:07:39 PM	H2 MFC set to  0.000000
4/4/2012	3:07:39 PM	BCl3 MFC set to  0.000000
4/4/2012	3:07:39 PM	PH3 MFC set to  0.000000
4/4/2012	3:07:39 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:07:39 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:07:39 PM	Tube furnace set to 0
4/4/2012	3:08:09 PM	Helium valve closed
4/4/2012	3:08:09 PM	H2 valve closed
4/4/2012	3:08:09 PM	BCl3 valve closed
4/4/2012	3:08:09 PM	PH3 valve closed
4/4/2012	3:08:09 PM	SiCl4 pre valve closed
4/4/2012	3:08:09 PM	SiCl4 post valve closed
4/4/2012	3:08:09 PM	Bypass valve closed
4/4/2012	3:08:09 PM	Bubbler valve closed
4/4/2012	3:08:09 PM	Main Vac valve opened
4/4/2012	3:08:09 PM	Helium MFC set to  0.000000
4/4/2012	3:08:09 PM	H2 MFC set to  0.000000
4/4/2012	3:08:09 PM	BCl3 MFC set to  0.000000
4/4/2012	3:08:09 PM	PH3 MFC set to  0.000000
4/4/2012	3:08:09 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:08:09 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:08:09 PM	Tube furnace set to 0
4/4/2012	3:08:39 PM	H2 valve closed
4/4/2012	3:08:39 PM	BCl3 valve closed
4/4/2012	3:08:39 PM	PH3 valve closed
4/4/2012	3:08:39 PM	SiCl4 pre valve closed
4/4/2012	3:08:39 PM	SiCl4 post valve closed
4/4/2012	3:08:39 PM	Bypass valve closed
4/4/2012	3:08:39 PM	Bubbler valve closed
4/4/2012	3:08:39 PM	Helium valve opened
4/4/2012	3:08:39 PM	Main Vac valve opened
4/4/2012	3:08:39 PM	Helium MFC set to  20.000000
4/4/2012	3:08:39 PM	H2 MFC set to  0.000000
4/4/2012	3:08:39 PM	BCl3 MFC set to  0.000000
4/4/2012	3:08:39 PM	PH3 MFC set to  0.000000
4/4/2012	3:08:39 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:08:39 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:08:40 PM	Tube furnace set to 0
4/4/2012	3:09:10 PM	Helium valve closed
4/4/2012	3:09:10 PM	H2 valve closed
4/4/2012	3:09:10 PM	BCl3 valve closed
4/4/2012	3:09:10 PM	PH3 valve closed
4/4/2012	3:09:10 PM	SiCl4 pre valve closed
4/4/2012	3:09:10 PM	SiCl4 post valve closed
4/4/2012	3:09:10 PM	Bypass valve closed
4/4/2012	3:09:10 PM	Bubbler valve closed
4/4/2012	3:09:10 PM	Main Vac valve opened
4/4/2012	3:09:10 PM	Helium MFC set to  0.000000
4/4/2012	3:09:10 PM	H2 MFC set to  0.000000
4/4/2012	3:09:10 PM	BCl3 MFC set to  0.000000
4/4/2012	3:09:10 PM	PH3 MFC set to  0.000000
4/4/2012	3:09:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:09:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:09:10 PM	Tube furnace set to 0
4/4/2012	3:09:40 PM	H2 valve closed
4/4/2012	3:09:40 PM	BCl3 valve closed
4/4/2012	3:09:40 PM	PH3 valve closed
4/4/2012	3:09:40 PM	SiCl4 pre valve closed
4/4/2012	3:09:40 PM	SiCl4 post valve closed
4/4/2012	3:09:40 PM	Bypass valve closed
4/4/2012	3:09:40 PM	Bubbler valve closed
4/4/2012	3:09:40 PM	Helium valve opened
4/4/2012	3:09:40 PM	Main Vac valve opened
4/4/2012	3:09:40 PM	Helium MFC set to  20.000000
4/4/2012	3:09:40 PM	H2 MFC set to  0.000000
4/4/2012	3:09:40 PM	BCl3 MFC set to  0.000000
4/4/2012	3:09:40 PM	PH3 MFC set to  0.000000
4/4/2012	3:09:40 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:09:40 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:09:40 PM	Tube furnace set to 0
4/4/2012	3:10:10 PM	Helium valve closed
4/4/2012	3:10:10 PM	H2 valve closed
4/4/2012	3:10:10 PM	BCl3 valve closed
4/4/2012	3:10:10 PM	PH3 valve closed
4/4/2012	3:10:10 PM	SiCl4 pre valve closed
4/4/2012	3:10:10 PM	SiCl4 post valve closed
4/4/2012	3:10:10 PM	Bypass valve closed
4/4/2012	3:10:10 PM	Bubbler valve closed
4/4/2012	3:10:10 PM	Main Vac valve opened
4/4/2012	3:10:10 PM	Helium MFC set to  0.000000
4/4/2012	3:10:10 PM	H2 MFC set to  0.000000
4/4/2012	3:10:10 PM	BCl3 MFC set to  0.000000
4/4/2012	3:10:10 PM	PH3 MFC set to  0.000000
4/4/2012	3:10:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:10:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:10:10 PM	Tube furnace set to 0
4/4/2012	3:10:40 PM	H2 valve closed
4/4/2012	3:10:40 PM	BCl3 valve closed
4/4/2012	3:10:40 PM	PH3 valve closed
4/4/2012	3:10:40 PM	SiCl4 pre valve closed
4/4/2012	3:10:40 PM	SiCl4 post valve closed
4/4/2012	3:10:40 PM	Bypass valve closed
4/4/2012	3:10:40 PM	Bubbler valve closed
4/4/2012	3:10:40 PM	Helium valve opened
4/4/2012	3:10:40 PM	Main Vac valve opened
4/4/2012	3:10:40 PM	Helium MFC set to  20.000000
4/4/2012	3:10:40 PM	H2 MFC set to  0.000000
4/4/2012	3:10:40 PM	BCl3 MFC set to  0.000000
4/4/2012	3:10:40 PM	PH3 MFC set to  0.000000
4/4/2012	3:10:40 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:10:40 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:10:40 PM	Tube furnace set to 0
4/4/2012	3:11:11 PM	Helium valve closed
4/4/2012	3:11:11 PM	H2 valve closed
4/4/2012	3:11:11 PM	BCl3 valve closed
4/4/2012	3:11:11 PM	PH3 valve closed
4/4/2012	3:11:11 PM	SiCl4 pre valve closed
4/4/2012	3:11:11 PM	SiCl4 post valve closed
4/4/2012	3:11:11 PM	Bypass valve closed
4/4/2012	3:11:11 PM	Bubbler valve closed
4/4/2012	3:11:11 PM	Main Vac valve opened
4/4/2012	3:11:11 PM	Helium MFC set to  0.000000
4/4/2012	3:11:11 PM	H2 MFC set to  0.000000
4/4/2012	3:11:11 PM	BCl3 MFC set to  0.000000
4/4/2012	3:11:11 PM	PH3 MFC set to  0.000000
4/4/2012	3:11:11 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:11:11 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:11:11 PM	Tube furnace set to 0
4/4/2012	3:11:41 PM	H2 valve closed
4/4/2012	3:11:41 PM	BCl3 valve closed
4/4/2012	3:11:41 PM	PH3 valve closed
4/4/2012	3:11:41 PM	SiCl4 pre valve closed
4/4/2012	3:11:41 PM	SiCl4 post valve closed
4/4/2012	3:11:41 PM	Bypass valve closed
4/4/2012	3:11:41 PM	Bubbler valve closed
4/4/2012	3:11:41 PM	Helium valve opened
4/4/2012	3:11:41 PM	Main Vac valve opened
4/4/2012	3:11:41 PM	Helium MFC set to  20.000000
4/4/2012	3:11:41 PM	H2 MFC set to  0.000000
4/4/2012	3:11:41 PM	BCl3 MFC set to  0.000000
4/4/2012	3:11:41 PM	PH3 MFC set to  0.000000
4/4/2012	3:11:41 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:11:41 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:11:41 PM	Tube furnace set to 0
4/4/2012	3:12:11 PM	Helium valve closed
4/4/2012	3:12:11 PM	H2 valve closed
4/4/2012	3:12:11 PM	BCl3 valve closed
4/4/2012	3:12:11 PM	PH3 valve closed
4/4/2012	3:12:11 PM	SiCl4 pre valve closed
4/4/2012	3:12:11 PM	SiCl4 post valve closed
4/4/2012	3:12:11 PM	Bypass valve closed
4/4/2012	3:12:11 PM	Bubbler valve closed
4/4/2012	3:12:11 PM	Main Vac valve opened
4/4/2012	3:12:11 PM	Helium MFC set to  0.000000
4/4/2012	3:12:11 PM	H2 MFC set to  0.000000
4/4/2012	3:12:11 PM	BCl3 MFC set to  0.000000
4/4/2012	3:12:11 PM	PH3 MFC set to  0.000000
4/4/2012	3:12:11 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:12:11 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:12:11 PM	Tube furnace set to 0
4/4/2012	3:12:41 PM	H2 valve closed
4/4/2012	3:12:41 PM	BCl3 valve closed
4/4/2012	3:12:41 PM	PH3 valve closed
4/4/2012	3:12:41 PM	SiCl4 pre valve closed
4/4/2012	3:12:41 PM	SiCl4 post valve closed
4/4/2012	3:12:41 PM	Bypass valve closed
4/4/2012	3:12:41 PM	Bubbler valve closed
4/4/2012	3:12:41 PM	Helium valve opened
4/4/2012	3:12:41 PM	Main Vac valve opened
4/4/2012	3:12:41 PM	Helium MFC set to  20.000000
4/4/2012	3:12:41 PM	H2 MFC set to  0.000000
4/4/2012	3:12:41 PM	BCl3 MFC set to  0.000000
4/4/2012	3:12:41 PM	PH3 MFC set to  0.000000
4/4/2012	3:12:41 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:12:41 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:12:41 PM	Tube furnace set to 0
4/4/2012	3:13:11 PM	Helium valve closed
4/4/2012	3:13:11 PM	H2 valve closed
4/4/2012	3:13:11 PM	BCl3 valve closed
4/4/2012	3:13:11 PM	PH3 valve closed
4/4/2012	3:13:11 PM	SiCl4 pre valve closed
4/4/2012	3:13:11 PM	SiCl4 post valve closed
4/4/2012	3:13:11 PM	Bypass valve closed
4/4/2012	3:13:11 PM	Bubbler valve closed
4/4/2012	3:13:11 PM	Main Vac valve opened
4/4/2012	3:13:11 PM	Helium MFC set to  0.000000
4/4/2012	3:13:11 PM	H2 MFC set to  0.000000
4/4/2012	3:13:11 PM	BCl3 MFC set to  0.000000
4/4/2012	3:13:11 PM	PH3 MFC set to  0.000000
4/4/2012	3:13:12 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:13:12 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:13:12 PM	Tube furnace set to 0
4/4/2012	3:13:42 PM	H2 valve closed
4/4/2012	3:13:42 PM	BCl3 valve closed
4/4/2012	3:13:42 PM	PH3 valve closed
4/4/2012	3:13:42 PM	SiCl4 pre valve closed
4/4/2012	3:13:42 PM	SiCl4 post valve closed
4/4/2012	3:13:42 PM	Bypass valve closed
4/4/2012	3:13:42 PM	Bubbler valve closed
4/4/2012	3:13:42 PM	Helium valve opened
4/4/2012	3:13:42 PM	Main Vac valve opened
4/4/2012	3:13:42 PM	Helium MFC set to  20.000000
4/4/2012	3:13:42 PM	H2 MFC set to  0.000000
4/4/2012	3:13:42 PM	BCl3 MFC set to  0.000000
4/4/2012	3:13:42 PM	PH3 MFC set to  0.000000
4/4/2012	3:13:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:13:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:13:42 PM	Tube furnace set to 0
4/4/2012	3:14:12 PM	Helium valve closed
4/4/2012	3:14:12 PM	H2 valve closed
4/4/2012	3:14:12 PM	BCl3 valve closed
4/4/2012	3:14:12 PM	PH3 valve closed
4/4/2012	3:14:12 PM	SiCl4 pre valve closed
4/4/2012	3:14:12 PM	SiCl4 post valve closed
4/4/2012	3:14:12 PM	Bypass valve closed
4/4/2012	3:14:12 PM	Bubbler valve closed
4/4/2012	3:14:12 PM	Main Vac valve opened
4/4/2012	3:14:12 PM	Helium MFC set to  0.000000
4/4/2012	3:14:12 PM	H2 MFC set to  0.000000
4/4/2012	3:14:12 PM	BCl3 MFC set to  0.000000
4/4/2012	3:14:12 PM	PH3 MFC set to  0.000000
4/4/2012	3:14:12 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:14:12 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:14:12 PM	Tube furnace set to 200
4/4/2012	3:14:42 PM	H2 valve closed
4/4/2012	3:14:42 PM	BCl3 valve closed
4/4/2012	3:14:42 PM	PH3 valve closed
4/4/2012	3:14:42 PM	SiCl4 pre valve closed
4/4/2012	3:14:42 PM	SiCl4 post valve closed
4/4/2012	3:14:42 PM	Bypass valve closed
4/4/2012	3:14:42 PM	Bubbler valve closed
4/4/2012	3:14:42 PM	Helium valve opened
4/4/2012	3:14:42 PM	Main Vac valve opened
4/4/2012	3:14:42 PM	Helium MFC set to  20.000000
4/4/2012	3:14:42 PM	H2 MFC set to  0.000000
4/4/2012	3:14:42 PM	BCl3 MFC set to  0.000000
4/4/2012	3:14:42 PM	PH3 MFC set to  0.000000
4/4/2012	3:14:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:14:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:14:42 PM	Tube furnace set to 200
4/4/2012	3:15:12 PM	Helium valve closed
4/4/2012	3:15:12 PM	H2 valve closed
4/4/2012	3:15:12 PM	BCl3 valve closed
4/4/2012	3:15:12 PM	PH3 valve closed
4/4/2012	3:15:12 PM	SiCl4 pre valve closed
4/4/2012	3:15:12 PM	SiCl4 post valve closed
4/4/2012	3:15:12 PM	Bypass valve closed
4/4/2012	3:15:12 PM	Bubbler valve closed
4/4/2012	3:15:12 PM	Main Vac valve opened
4/4/2012	3:15:12 PM	Helium MFC set to  0.000000
4/4/2012	3:15:12 PM	H2 MFC set to  0.000000
4/4/2012	3:15:12 PM	BCl3 MFC set to  0.000000
4/4/2012	3:15:12 PM	PH3 MFC set to  0.000000
4/4/2012	3:15:12 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:15:12 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:15:13 PM	Tube furnace set to 200
4/4/2012	3:15:43 PM	H2 valve closed
4/4/2012	3:15:43 PM	BCl3 valve closed
4/4/2012	3:15:43 PM	PH3 valve closed
4/4/2012	3:15:43 PM	SiCl4 pre valve closed
4/4/2012	3:15:43 PM	SiCl4 post valve closed
4/4/2012	3:15:43 PM	Bypass valve closed
4/4/2012	3:15:43 PM	Bubbler valve closed
4/4/2012	3:15:43 PM	Helium valve opened
4/4/2012	3:15:43 PM	Main Vac valve opened
4/4/2012	3:15:43 PM	Helium MFC set to  20.000000
4/4/2012	3:15:43 PM	H2 MFC set to  0.000000
4/4/2012	3:15:43 PM	BCl3 MFC set to  0.000000
4/4/2012	3:15:43 PM	PH3 MFC set to  0.000000
4/4/2012	3:15:43 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:15:43 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:15:43 PM	Tube furnace set to 200
4/4/2012	3:16:13 PM	Helium valve closed
4/4/2012	3:16:13 PM	H2 valve closed
4/4/2012	3:16:13 PM	BCl3 valve closed
4/4/2012	3:16:13 PM	PH3 valve closed
4/4/2012	3:16:13 PM	SiCl4 pre valve closed
4/4/2012	3:16:13 PM	SiCl4 post valve closed
4/4/2012	3:16:13 PM	Bypass valve closed
4/4/2012	3:16:13 PM	Bubbler valve closed
4/4/2012	3:16:13 PM	Main Vac valve opened
4/4/2012	3:16:13 PM	Helium MFC set to  0.000000
4/4/2012	3:16:13 PM	H2 MFC set to  0.000000
4/4/2012	3:16:13 PM	BCl3 MFC set to  0.000000
4/4/2012	3:16:13 PM	PH3 MFC set to  0.000000
4/4/2012	3:16:13 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:16:13 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:16:13 PM	Tube furnace set to 200
4/4/2012	3:16:43 PM	H2 valve closed
4/4/2012	3:16:43 PM	BCl3 valve closed
4/4/2012	3:16:43 PM	PH3 valve closed
4/4/2012	3:16:43 PM	SiCl4 pre valve closed
4/4/2012	3:16:43 PM	SiCl4 post valve closed
4/4/2012	3:16:43 PM	Bypass valve closed
4/4/2012	3:16:43 PM	Bubbler valve closed
4/4/2012	3:16:43 PM	Helium valve opened
4/4/2012	3:16:43 PM	Main Vac valve opened
4/4/2012	3:16:43 PM	Helium MFC set to  20.000000
4/4/2012	3:16:43 PM	H2 MFC set to  0.000000
4/4/2012	3:16:43 PM	BCl3 MFC set to  0.000000
4/4/2012	3:16:43 PM	PH3 MFC set to  0.000000
4/4/2012	3:16:43 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:16:43 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:16:43 PM	Tube furnace set to 200
4/4/2012	3:17:13 PM	Helium valve closed
4/4/2012	3:17:13 PM	H2 valve closed
4/4/2012	3:17:13 PM	BCl3 valve closed
4/4/2012	3:17:13 PM	PH3 valve closed
4/4/2012	3:17:13 PM	SiCl4 pre valve closed
4/4/2012	3:17:13 PM	SiCl4 post valve closed
4/4/2012	3:17:13 PM	Bypass valve closed
4/4/2012	3:17:13 PM	Bubbler valve closed
4/4/2012	3:17:13 PM	Main Vac valve opened
4/4/2012	3:17:13 PM	Helium MFC set to  0.000000
4/4/2012	3:17:13 PM	H2 MFC set to  0.000000
4/4/2012	3:17:13 PM	BCl3 MFC set to  0.000000
4/4/2012	3:17:13 PM	PH3 MFC set to  0.000000
4/4/2012	3:17:13 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:17:13 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:17:14 PM	Tube furnace set to 200
4/4/2012	3:17:44 PM	H2 valve closed
4/4/2012	3:17:44 PM	BCl3 valve closed
4/4/2012	3:17:44 PM	PH3 valve closed
4/4/2012	3:17:44 PM	SiCl4 pre valve closed
4/4/2012	3:17:44 PM	SiCl4 post valve closed
4/4/2012	3:17:44 PM	Bypass valve closed
4/4/2012	3:17:44 PM	Bubbler valve closed
4/4/2012	3:17:44 PM	Helium valve opened
4/4/2012	3:17:44 PM	Main Vac valve opened
4/4/2012	3:17:44 PM	Helium MFC set to  20.000000
4/4/2012	3:17:44 PM	H2 MFC set to  0.000000
4/4/2012	3:17:44 PM	BCl3 MFC set to  0.000000
4/4/2012	3:17:44 PM	PH3 MFC set to  0.000000
4/4/2012	3:17:44 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:17:44 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:17:44 PM	Tube furnace set to 200
4/4/2012	3:18:14 PM	Helium valve closed
4/4/2012	3:18:14 PM	H2 valve closed
4/4/2012	3:18:14 PM	BCl3 valve closed
4/4/2012	3:18:14 PM	PH3 valve closed
4/4/2012	3:18:14 PM	SiCl4 pre valve closed
4/4/2012	3:18:14 PM	SiCl4 post valve closed
4/4/2012	3:18:14 PM	Bypass valve closed
4/4/2012	3:18:14 PM	Bubbler valve closed
4/4/2012	3:18:14 PM	Main Vac valve opened
4/4/2012	3:18:14 PM	Helium MFC set to  0.000000
4/4/2012	3:18:14 PM	H2 MFC set to  0.000000
4/4/2012	3:18:14 PM	BCl3 MFC set to  0.000000
4/4/2012	3:18:14 PM	PH3 MFC set to  0.000000
4/4/2012	3:18:14 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:18:14 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:18:14 PM	Tube furnace set to 200
4/4/2012	3:18:44 PM	H2 valve closed
4/4/2012	3:18:44 PM	BCl3 valve closed
4/4/2012	3:18:44 PM	PH3 valve closed
4/4/2012	3:18:44 PM	SiCl4 pre valve closed
4/4/2012	3:18:44 PM	SiCl4 post valve closed
4/4/2012	3:18:44 PM	Bypass valve closed
4/4/2012	3:18:44 PM	Bubbler valve closed
4/4/2012	3:18:44 PM	Helium valve opened
4/4/2012	3:18:44 PM	Main Vac valve opened
4/4/2012	3:18:44 PM	Helium MFC set to  20.000000
4/4/2012	3:18:44 PM	H2 MFC set to  0.000000
4/4/2012	3:18:44 PM	BCl3 MFC set to  0.000000
4/4/2012	3:18:44 PM	PH3 MFC set to  0.000000
4/4/2012	3:18:44 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:18:44 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:18:44 PM	Tube furnace set to 200
4/4/2012	3:19:14 PM	Helium valve closed
4/4/2012	3:19:14 PM	H2 valve closed
4/4/2012	3:19:14 PM	BCl3 valve closed
4/4/2012	3:19:14 PM	PH3 valve closed
4/4/2012	3:19:14 PM	SiCl4 pre valve closed
4/4/2012	3:19:14 PM	SiCl4 post valve closed
4/4/2012	3:19:14 PM	Bypass valve closed
4/4/2012	3:19:14 PM	Bubbler valve closed
4/4/2012	3:19:14 PM	Main Vac valve opened
4/4/2012	3:19:14 PM	Helium MFC set to  0.000000
4/4/2012	3:19:14 PM	H2 MFC set to  0.000000
4/4/2012	3:19:14 PM	BCl3 MFC set to  0.000000
4/4/2012	3:19:14 PM	PH3 MFC set to  0.000000
4/4/2012	3:19:14 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:19:14 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:19:14 PM	Tube furnace set to 200
4/4/2012	3:19:44 PM	H2 valve closed
4/4/2012	3:19:44 PM	BCl3 valve closed
4/4/2012	3:19:45 PM	PH3 valve closed
4/4/2012	3:19:45 PM	SiCl4 pre valve closed
4/4/2012	3:19:45 PM	SiCl4 post valve closed
4/4/2012	3:19:45 PM	Bypass valve closed
4/4/2012	3:19:45 PM	Bubbler valve closed
4/4/2012	3:19:45 PM	Helium valve opened
4/4/2012	3:19:45 PM	Main Vac valve opened
4/4/2012	3:19:45 PM	Helium MFC set to  20.000000
4/4/2012	3:19:45 PM	H2 MFC set to  0.000000
4/4/2012	3:19:45 PM	BCl3 MFC set to  0.000000
4/4/2012	3:19:45 PM	PH3 MFC set to  0.000000
4/4/2012	3:19:45 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:19:45 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:19:45 PM	Tube furnace set to 200
4/4/2012	3:20:15 PM	Helium valve closed
4/4/2012	3:20:15 PM	H2 valve closed
4/4/2012	3:20:15 PM	BCl3 valve closed
4/4/2012	3:20:15 PM	PH3 valve closed
4/4/2012	3:20:15 PM	SiCl4 pre valve closed
4/4/2012	3:20:15 PM	SiCl4 post valve closed
4/4/2012	3:20:15 PM	Bypass valve closed
4/4/2012	3:20:15 PM	Bubbler valve closed
4/4/2012	3:20:15 PM	Main Vac valve opened
4/4/2012	3:20:15 PM	Helium MFC set to  0.000000
4/4/2012	3:20:15 PM	H2 MFC set to  0.000000
4/4/2012	3:20:15 PM	BCl3 MFC set to  0.000000
4/4/2012	3:20:15 PM	PH3 MFC set to  0.000000
4/4/2012	3:20:15 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:20:15 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:20:15 PM	Tube furnace set to 0
4/4/2012	3:20:16 PM	Run finished at 3:20 PM
4/4/2012	3:48:08 PM	Recipe started at 3:47 PM
4/4/2012	3:48:09 PM	Helium valve closed
4/4/2012	3:48:09 PM	H2 valve closed
4/4/2012	3:48:09 PM	BCl3 valve closed
4/4/2012	3:48:09 PM	PH3 valve closed
4/4/2012	3:48:09 PM	SiCl4 pre valve closed
4/4/2012	3:48:09 PM	SiCl4 post valve closed
4/4/2012	3:48:09 PM	Bypass valve closed
4/4/2012	3:48:09 PM	Bubbler valve closed
4/4/2012	3:48:09 PM	Main Vac valve opened
4/4/2012	3:48:09 PM	Helium MFC set to  0.000000
4/4/2012	3:48:09 PM	H2 MFC set to  0.000000
4/4/2012	3:48:09 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:09 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:09 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:09 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:09 PM	Tube furnace set to 0
4/4/2012	3:48:10 PM	H2 valve closed
4/4/2012	3:48:10 PM	BCl3 valve closed
4/4/2012	3:48:10 PM	PH3 valve closed
4/4/2012	3:48:10 PM	SiCl4 pre valve closed
4/4/2012	3:48:10 PM	SiCl4 post valve closed
4/4/2012	3:48:10 PM	Bypass valve closed
4/4/2012	3:48:10 PM	Bubbler valve closed
4/4/2012	3:48:10 PM	Helium valve opened
4/4/2012	3:48:10 PM	Main Vac valve opened
4/4/2012	3:48:10 PM	Helium MFC set to  20.000000
4/4/2012	3:48:10 PM	H2 MFC set to  0.000000
4/4/2012	3:48:10 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:10 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:10 PM	Tube furnace set to 0
4/4/2012	3:48:10 PM	Helium valve closed
4/4/2012	3:48:10 PM	H2 valve closed
4/4/2012	3:48:10 PM	BCl3 valve closed
4/4/2012	3:48:10 PM	PH3 valve closed
4/4/2012	3:48:10 PM	SiCl4 pre valve closed
4/4/2012	3:48:10 PM	SiCl4 post valve closed
4/4/2012	3:48:10 PM	Bypass valve closed
4/4/2012	3:48:10 PM	Bubbler valve closed
4/4/2012	3:48:10 PM	Main Vac valve opened
4/4/2012	3:48:10 PM	Helium MFC set to  0.000000
4/4/2012	3:48:10 PM	H2 MFC set to  0.000000
4/4/2012	3:48:10 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:10 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:10 PM	Tube furnace set to 0
4/4/2012	3:48:11 PM	H2 valve closed
4/4/2012	3:48:11 PM	BCl3 valve closed
4/4/2012	3:48:11 PM	PH3 valve closed
4/4/2012	3:48:11 PM	SiCl4 pre valve closed
4/4/2012	3:48:11 PM	SiCl4 post valve closed
4/4/2012	3:48:11 PM	Bypass valve closed
4/4/2012	3:48:11 PM	Bubbler valve closed
4/4/2012	3:48:11 PM	Helium valve opened
4/4/2012	3:48:11 PM	Main Vac valve opened
4/4/2012	3:48:11 PM	Helium MFC set to  20.000000
4/4/2012	3:48:11 PM	H2 MFC set to  0.000000
4/4/2012	3:48:11 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:11 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:11 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:11 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:11 PM	Tube furnace set to 0
4/4/2012	3:48:11 PM	Helium valve closed
4/4/2012	3:48:11 PM	H2 valve closed
4/4/2012	3:48:11 PM	BCl3 valve closed
4/4/2012	3:48:11 PM	PH3 valve closed
4/4/2012	3:48:11 PM	SiCl4 pre valve closed
4/4/2012	3:48:11 PM	SiCl4 post valve closed
4/4/2012	3:48:11 PM	Bypass valve closed
4/4/2012	3:48:11 PM	Bubbler valve closed
4/4/2012	3:48:11 PM	Main Vac valve opened
4/4/2012	3:48:11 PM	Helium MFC set to  0.000000
4/4/2012	3:48:11 PM	H2 MFC set to  0.000000
4/4/2012	3:48:11 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:11 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:11 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:11 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:11 PM	Tube furnace set to 0
4/4/2012	3:48:12 PM	H2 valve closed
4/4/2012	3:48:12 PM	BCl3 valve closed
4/4/2012	3:48:12 PM	PH3 valve closed
4/4/2012	3:48:12 PM	SiCl4 pre valve closed
4/4/2012	3:48:12 PM	SiCl4 post valve closed
4/4/2012	3:48:12 PM	Bypass valve closed
4/4/2012	3:48:12 PM	Bubbler valve closed
4/4/2012	3:48:12 PM	Helium valve opened
4/4/2012	3:48:12 PM	Main Vac valve opened
4/4/2012	3:48:12 PM	Helium MFC set to  20.000000
4/4/2012	3:48:12 PM	H2 MFC set to  0.000000
4/4/2012	3:48:12 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:12 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:12 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:12 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:12 PM	Tube furnace set to 0
4/4/2012	3:48:12 PM	Helium valve closed
4/4/2012	3:48:12 PM	H2 valve closed
4/4/2012	3:48:12 PM	BCl3 valve closed
4/4/2012	3:48:12 PM	PH3 valve closed
4/4/2012	3:48:12 PM	SiCl4 pre valve closed
4/4/2012	3:48:12 PM	SiCl4 post valve closed
4/4/2012	3:48:12 PM	Bypass valve closed
4/4/2012	3:48:12 PM	Bubbler valve closed
4/4/2012	3:48:12 PM	Main Vac valve opened
4/4/2012	3:48:12 PM	Helium MFC set to  0.000000
4/4/2012	3:48:12 PM	H2 MFC set to  0.000000
4/4/2012	3:48:12 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:12 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:12 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:12 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:12 PM	Tube furnace set to 0
4/4/2012	3:48:13 PM	H2 valve closed
4/4/2012	3:48:13 PM	BCl3 valve closed
4/4/2012	3:48:13 PM	PH3 valve closed
4/4/2012	3:48:13 PM	SiCl4 pre valve closed
4/4/2012	3:48:13 PM	SiCl4 post valve closed
4/4/2012	3:48:13 PM	Bypass valve closed
4/4/2012	3:48:13 PM	Bubbler valve closed
4/4/2012	3:48:13 PM	Helium valve opened
4/4/2012	3:48:13 PM	Main Vac valve opened
4/4/2012	3:48:13 PM	Helium MFC set to  20.000000
4/4/2012	3:48:13 PM	H2 MFC set to  0.000000
4/4/2012	3:48:13 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:13 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:13 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:13 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:13 PM	Tube furnace set to 0
4/4/2012	3:48:13 PM	Helium valve closed
4/4/2012	3:48:13 PM	H2 valve closed
4/4/2012	3:48:13 PM	BCl3 valve closed
4/4/2012	3:48:13 PM	PH3 valve closed
4/4/2012	3:48:13 PM	SiCl4 pre valve closed
4/4/2012	3:48:13 PM	SiCl4 post valve closed
4/4/2012	3:48:13 PM	Bypass valve closed
4/4/2012	3:48:13 PM	Bubbler valve closed
4/4/2012	3:48:13 PM	Main Vac valve opened
4/4/2012	3:48:13 PM	Helium MFC set to  0.000000
4/4/2012	3:48:13 PM	H2 MFC set to  0.000000
4/4/2012	3:48:13 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:13 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:13 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:13 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:13 PM	Tube furnace set to 0
4/4/2012	3:48:14 PM	H2 valve closed
4/4/2012	3:48:14 PM	BCl3 valve closed
4/4/2012	3:48:14 PM	PH3 valve closed
4/4/2012	3:48:14 PM	SiCl4 pre valve closed
4/4/2012	3:48:14 PM	SiCl4 post valve closed
4/4/2012	3:48:14 PM	Bypass valve closed
4/4/2012	3:48:14 PM	Bubbler valve closed
4/4/2012	3:48:14 PM	Helium valve opened
4/4/2012	3:48:14 PM	Main Vac valve opened
4/4/2012	3:48:14 PM	Helium MFC set to  20.000000
4/4/2012	3:48:14 PM	H2 MFC set to  0.000000
4/4/2012	3:48:14 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:14 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:14 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:14 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:14 PM	Tube furnace set to 0
4/4/2012	3:48:15 PM	Helium valve closed
4/4/2012	3:48:15 PM	H2 valve closed
4/4/2012	3:48:15 PM	BCl3 valve closed
4/4/2012	3:48:15 PM	PH3 valve closed
4/4/2012	3:48:15 PM	SiCl4 pre valve closed
4/4/2012	3:48:15 PM	SiCl4 post valve closed
4/4/2012	3:48:15 PM	Bypass valve closed
4/4/2012	3:48:15 PM	Bubbler valve closed
4/4/2012	3:48:15 PM	Main Vac valve opened
4/4/2012	3:48:15 PM	Helium MFC set to  0.000000
4/4/2012	3:48:15 PM	H2 MFC set to  0.000000
4/4/2012	3:48:15 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:15 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:15 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:15 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:15 PM	Tube furnace set to 0
4/4/2012	3:48:16 PM	H2 valve closed
4/4/2012	3:48:16 PM	BCl3 valve closed
4/4/2012	3:48:16 PM	PH3 valve closed
4/4/2012	3:48:16 PM	SiCl4 pre valve closed
4/4/2012	3:48:16 PM	SiCl4 post valve closed
4/4/2012	3:48:16 PM	Bypass valve closed
4/4/2012	3:48:16 PM	Bubbler valve closed
4/4/2012	3:48:16 PM	Helium valve opened
4/4/2012	3:48:16 PM	Main Vac valve opened
4/4/2012	3:48:16 PM	Helium MFC set to  20.000000
4/4/2012	3:48:16 PM	H2 MFC set to  0.000000
4/4/2012	3:48:16 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:16 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:16 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:16 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:16 PM	Tube furnace set to 0
4/4/2012	3:48:46 PM	Helium valve closed
4/4/2012	3:48:46 PM	H2 valve closed
4/4/2012	3:48:46 PM	BCl3 valve closed
4/4/2012	3:48:46 PM	PH3 valve closed
4/4/2012	3:48:46 PM	SiCl4 pre valve closed
4/4/2012	3:48:46 PM	SiCl4 post valve closed
4/4/2012	3:48:46 PM	Bypass valve closed
4/4/2012	3:48:46 PM	Bubbler valve closed
4/4/2012	3:48:46 PM	Main Vac valve opened
4/4/2012	3:48:46 PM	Helium MFC set to  0.000000
4/4/2012	3:48:46 PM	H2 MFC set to  0.000000
4/4/2012	3:48:46 PM	BCl3 MFC set to  0.000000
4/4/2012	3:48:46 PM	PH3 MFC set to  0.000000
4/4/2012	3:48:46 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:48:46 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:48:46 PM	Tube furnace set to 0
4/4/2012	3:49:16 PM	H2 valve closed
4/4/2012	3:49:16 PM	BCl3 valve closed
4/4/2012	3:49:16 PM	PH3 valve closed
4/4/2012	3:49:16 PM	SiCl4 pre valve closed
4/4/2012	3:49:16 PM	SiCl4 post valve closed
4/4/2012	3:49:16 PM	Bypass valve closed
4/4/2012	3:49:16 PM	Bubbler valve closed
4/4/2012	3:49:16 PM	Helium valve opened
4/4/2012	3:49:16 PM	Main Vac valve opened
4/4/2012	3:49:16 PM	Helium MFC set to  20.000000
4/4/2012	3:49:16 PM	H2 MFC set to  0.000000
4/4/2012	3:49:16 PM	BCl3 MFC set to  0.000000
4/4/2012	3:49:16 PM	PH3 MFC set to  0.000000
4/4/2012	3:49:16 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:49:16 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:49:16 PM	Tube furnace set to 0
4/4/2012	3:49:46 PM	Helium valve closed
4/4/2012	3:49:46 PM	H2 valve closed
4/4/2012	3:49:46 PM	BCl3 valve closed
4/4/2012	3:49:46 PM	PH3 valve closed
4/4/2012	3:49:46 PM	SiCl4 pre valve closed
4/4/2012	3:49:46 PM	SiCl4 post valve closed
4/4/2012	3:49:46 PM	Bypass valve closed
4/4/2012	3:49:46 PM	Bubbler valve closed
4/4/2012	3:49:46 PM	Main Vac valve opened
4/4/2012	3:49:46 PM	Helium MFC set to  0.000000
4/4/2012	3:49:46 PM	H2 MFC set to  0.000000
4/4/2012	3:49:46 PM	BCl3 MFC set to  0.000000
4/4/2012	3:49:46 PM	PH3 MFC set to  0.000000
4/4/2012	3:49:46 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:49:46 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:49:47 PM	Tube furnace set to 0
4/4/2012	3:50:17 PM	H2 valve closed
4/4/2012	3:50:17 PM	BCl3 valve closed
4/4/2012	3:50:17 PM	PH3 valve closed
4/4/2012	3:50:17 PM	SiCl4 pre valve closed
4/4/2012	3:50:17 PM	SiCl4 post valve closed
4/4/2012	3:50:17 PM	Bypass valve closed
4/4/2012	3:50:17 PM	Bubbler valve closed
4/4/2012	3:50:17 PM	Helium valve opened
4/4/2012	3:50:17 PM	Main Vac valve opened
4/4/2012	3:50:17 PM	Helium MFC set to  20.000000
4/4/2012	3:50:17 PM	H2 MFC set to  0.000000
4/4/2012	3:50:17 PM	BCl3 MFC set to  0.000000
4/4/2012	3:50:17 PM	PH3 MFC set to  0.000000
4/4/2012	3:50:17 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:50:17 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:50:17 PM	Tube furnace set to 0
4/4/2012	3:50:47 PM	Helium valve closed
4/4/2012	3:50:47 PM	H2 valve closed
4/4/2012	3:50:47 PM	BCl3 valve closed
4/4/2012	3:50:47 PM	PH3 valve closed
4/4/2012	3:50:47 PM	SiCl4 pre valve closed
4/4/2012	3:50:47 PM	SiCl4 post valve closed
4/4/2012	3:50:47 PM	Bypass valve closed
4/4/2012	3:50:47 PM	Bubbler valve closed
4/4/2012	3:50:47 PM	Main Vac valve opened
4/4/2012	3:50:47 PM	Helium MFC set to  0.000000
4/4/2012	3:50:47 PM	H2 MFC set to  0.000000
4/4/2012	3:50:47 PM	BCl3 MFC set to  0.000000
4/4/2012	3:50:47 PM	PH3 MFC set to  0.000000
4/4/2012	3:50:47 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:50:47 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:50:47 PM	Tube furnace set to 0
4/4/2012	3:51:17 PM	H2 valve closed
4/4/2012	3:51:17 PM	BCl3 valve closed
4/4/2012	3:51:17 PM	PH3 valve closed
4/4/2012	3:51:17 PM	SiCl4 pre valve closed
4/4/2012	3:51:17 PM	SiCl4 post valve closed
4/4/2012	3:51:17 PM	Bypass valve closed
4/4/2012	3:51:17 PM	Bubbler valve closed
4/4/2012	3:51:17 PM	Helium valve opened
4/4/2012	3:51:17 PM	Main Vac valve opened
4/4/2012	3:51:17 PM	Helium MFC set to  20.000000
4/4/2012	3:51:17 PM	H2 MFC set to  0.000000
4/4/2012	3:51:17 PM	BCl3 MFC set to  0.000000
4/4/2012	3:51:17 PM	PH3 MFC set to  0.000000
4/4/2012	3:51:17 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:51:17 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:51:17 PM	Tube furnace set to 0
4/4/2012	3:51:47 PM	Helium valve closed
4/4/2012	3:51:47 PM	H2 valve closed
4/4/2012	3:51:47 PM	BCl3 valve closed
4/4/2012	3:51:47 PM	PH3 valve closed
4/4/2012	3:51:47 PM	SiCl4 pre valve closed
4/4/2012	3:51:47 PM	SiCl4 post valve closed
4/4/2012	3:51:47 PM	Bypass valve closed
4/4/2012	3:51:47 PM	Bubbler valve closed
4/4/2012	3:51:47 PM	Main Vac valve opened
4/4/2012	3:51:47 PM	Helium MFC set to  0.000000
4/4/2012	3:51:47 PM	H2 MFC set to  0.000000
4/4/2012	3:51:47 PM	BCl3 MFC set to  0.000000
4/4/2012	3:51:47 PM	PH3 MFC set to  0.000000
4/4/2012	3:51:47 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:51:47 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:51:47 PM	Tube furnace set to 200
4/4/2012	3:52:18 PM	H2 valve closed
4/4/2012	3:52:18 PM	BCl3 valve closed
4/4/2012	3:52:18 PM	PH3 valve closed
4/4/2012	3:52:18 PM	SiCl4 pre valve closed
4/4/2012	3:52:18 PM	SiCl4 post valve closed
4/4/2012	3:52:18 PM	Bypass valve closed
4/4/2012	3:52:18 PM	Bubbler valve closed
4/4/2012	3:52:18 PM	Helium valve opened
4/4/2012	3:52:18 PM	Main Vac valve opened
4/4/2012	3:52:18 PM	Helium MFC set to  20.000000
4/4/2012	3:52:18 PM	H2 MFC set to  0.000000
4/4/2012	3:52:18 PM	BCl3 MFC set to  0.000000
4/4/2012	3:52:18 PM	PH3 MFC set to  0.000000
4/4/2012	3:52:18 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:52:18 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:52:18 PM	Tube furnace set to 200
4/4/2012	3:52:48 PM	Helium valve closed
4/4/2012	3:52:48 PM	H2 valve closed
4/4/2012	3:52:48 PM	BCl3 valve closed
4/4/2012	3:52:48 PM	PH3 valve closed
4/4/2012	3:52:48 PM	SiCl4 pre valve closed
4/4/2012	3:52:48 PM	SiCl4 post valve closed
4/4/2012	3:52:48 PM	Bypass valve closed
4/4/2012	3:52:48 PM	Bubbler valve closed
4/4/2012	3:52:48 PM	Main Vac valve opened
4/4/2012	3:52:48 PM	Helium MFC set to  0.000000
4/4/2012	3:52:48 PM	H2 MFC set to  0.000000
4/4/2012	3:52:48 PM	BCl3 MFC set to  0.000000
4/4/2012	3:52:48 PM	PH3 MFC set to  0.000000
4/4/2012	3:52:48 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:52:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:52:48 PM	Tube furnace set to 200
4/4/2012	3:53:18 PM	H2 valve closed
4/4/2012	3:53:18 PM	BCl3 valve closed
4/4/2012	3:53:18 PM	PH3 valve closed
4/4/2012	3:53:18 PM	SiCl4 pre valve closed
4/4/2012	3:53:18 PM	SiCl4 post valve closed
4/4/2012	3:53:18 PM	Bypass valve closed
4/4/2012	3:53:18 PM	Bubbler valve closed
4/4/2012	3:53:18 PM	Helium valve opened
4/4/2012	3:53:18 PM	Main Vac valve opened
4/4/2012	3:53:18 PM	Helium MFC set to  20.000000
4/4/2012	3:53:18 PM	H2 MFC set to  0.000000
4/4/2012	3:53:18 PM	BCl3 MFC set to  0.000000
4/4/2012	3:53:18 PM	PH3 MFC set to  0.000000
4/4/2012	3:53:18 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:53:18 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:53:18 PM	Tube furnace set to 200
4/4/2012	3:53:48 PM	Helium valve closed
4/4/2012	3:53:48 PM	H2 valve closed
4/4/2012	3:53:48 PM	BCl3 valve closed
4/4/2012	3:53:48 PM	PH3 valve closed
4/4/2012	3:53:48 PM	SiCl4 pre valve closed
4/4/2012	3:53:48 PM	SiCl4 post valve closed
4/4/2012	3:53:48 PM	Bypass valve closed
4/4/2012	3:53:48 PM	Bubbler valve closed
4/4/2012	3:53:48 PM	Main Vac valve opened
4/4/2012	3:53:48 PM	Helium MFC set to  0.000000
4/4/2012	3:53:48 PM	H2 MFC set to  0.000000
4/4/2012	3:53:48 PM	BCl3 MFC set to  0.000000
4/4/2012	3:53:48 PM	PH3 MFC set to  0.000000
4/4/2012	3:53:48 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:53:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:53:48 PM	Tube furnace set to 200
4/4/2012	3:54:18 PM	H2 valve closed
4/4/2012	3:54:18 PM	BCl3 valve closed
4/4/2012	3:54:18 PM	PH3 valve closed
4/4/2012	3:54:18 PM	SiCl4 pre valve closed
4/4/2012	3:54:18 PM	SiCl4 post valve closed
4/4/2012	3:54:18 PM	Bypass valve closed
4/4/2012	3:54:18 PM	Bubbler valve closed
4/4/2012	3:54:18 PM	Helium valve opened
4/4/2012	3:54:18 PM	Main Vac valve opened
4/4/2012	3:54:18 PM	Helium MFC set to  20.000000
4/4/2012	3:54:18 PM	H2 MFC set to  0.000000
4/4/2012	3:54:18 PM	BCl3 MFC set to  0.000000
4/4/2012	3:54:19 PM	PH3 MFC set to  0.000000
4/4/2012	3:54:19 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:54:19 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:54:19 PM	Tube furnace set to 200
4/4/2012	3:54:49 PM	Helium valve closed
4/4/2012	3:54:49 PM	H2 valve closed
4/4/2012	3:54:49 PM	BCl3 valve closed
4/4/2012	3:54:49 PM	PH3 valve closed
4/4/2012	3:54:49 PM	SiCl4 pre valve closed
4/4/2012	3:54:49 PM	SiCl4 post valve closed
4/4/2012	3:54:49 PM	Bypass valve closed
4/4/2012	3:54:49 PM	Bubbler valve closed
4/4/2012	3:54:49 PM	Main Vac valve opened
4/4/2012	3:54:49 PM	Helium MFC set to  0.000000
4/4/2012	3:54:49 PM	H2 MFC set to  0.000000
4/4/2012	3:54:49 PM	BCl3 MFC set to  0.000000
4/4/2012	3:54:49 PM	PH3 MFC set to  0.000000
4/4/2012	3:54:49 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:54:49 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:54:49 PM	Tube furnace set to 200
4/4/2012	3:55:19 PM	H2 valve closed
4/4/2012	3:55:19 PM	BCl3 valve closed
4/4/2012	3:55:19 PM	PH3 valve closed
4/4/2012	3:55:19 PM	SiCl4 pre valve closed
4/4/2012	3:55:19 PM	SiCl4 post valve closed
4/4/2012	3:55:19 PM	Bypass valve closed
4/4/2012	3:55:19 PM	Bubbler valve closed
4/4/2012	3:55:19 PM	Helium valve opened
4/4/2012	3:55:19 PM	Main Vac valve opened
4/4/2012	3:55:19 PM	Helium MFC set to  20.000000
4/4/2012	3:55:19 PM	H2 MFC set to  0.000000
4/4/2012	3:55:19 PM	BCl3 MFC set to  0.000000
4/4/2012	3:55:19 PM	PH3 MFC set to  0.000000
4/4/2012	3:55:19 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:55:19 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:55:19 PM	Tube furnace set to 200
4/4/2012	3:55:49 PM	Helium valve closed
4/4/2012	3:55:49 PM	H2 valve closed
4/4/2012	3:55:49 PM	BCl3 valve closed
4/4/2012	3:55:49 PM	PH3 valve closed
4/4/2012	3:55:49 PM	SiCl4 pre valve closed
4/4/2012	3:55:49 PM	SiCl4 post valve closed
4/4/2012	3:55:49 PM	Bypass valve closed
4/4/2012	3:55:49 PM	Bubbler valve closed
4/4/2012	3:55:49 PM	Main Vac valve opened
4/4/2012	3:55:49 PM	Helium MFC set to  0.000000
4/4/2012	3:55:49 PM	H2 MFC set to  0.000000
4/4/2012	3:55:49 PM	BCl3 MFC set to  0.000000
4/4/2012	3:55:49 PM	PH3 MFC set to  0.000000
4/4/2012	3:55:49 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:55:49 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:55:49 PM	Tube furnace set to 200
4/4/2012	3:56:19 PM	H2 valve closed
4/4/2012	3:56:19 PM	BCl3 valve closed
4/4/2012	3:56:19 PM	PH3 valve closed
4/4/2012	3:56:19 PM	SiCl4 pre valve closed
4/4/2012	3:56:19 PM	SiCl4 post valve closed
4/4/2012	3:56:19 PM	Bypass valve closed
4/4/2012	3:56:19 PM	Bubbler valve closed
4/4/2012	3:56:19 PM	Helium valve opened
4/4/2012	3:56:19 PM	Main Vac valve opened
4/4/2012	3:56:19 PM	Helium MFC set to  20.000000
4/4/2012	3:56:19 PM	H2 MFC set to  0.000000
4/4/2012	3:56:19 PM	BCl3 MFC set to  0.000000
4/4/2012	3:56:19 PM	PH3 MFC set to  0.000000
4/4/2012	3:56:19 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:56:19 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:56:20 PM	Tube furnace set to 200
4/4/2012	3:56:50 PM	Helium valve closed
4/4/2012	3:56:50 PM	H2 valve closed
4/4/2012	3:56:50 PM	BCl3 valve closed
4/4/2012	3:56:50 PM	PH3 valve closed
4/4/2012	3:56:50 PM	SiCl4 pre valve closed
4/4/2012	3:56:50 PM	SiCl4 post valve closed
4/4/2012	3:56:50 PM	Bypass valve closed
4/4/2012	3:56:50 PM	Bubbler valve closed
4/4/2012	3:56:50 PM	Main Vac valve opened
4/4/2012	3:56:50 PM	Helium MFC set to  0.000000
4/4/2012	3:56:50 PM	H2 MFC set to  0.000000
4/4/2012	3:56:50 PM	BCl3 MFC set to  0.000000
4/4/2012	3:56:50 PM	PH3 MFC set to  0.000000
4/4/2012	3:56:50 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:56:50 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:56:50 PM	Tube furnace set to 200
4/4/2012	3:57:20 PM	H2 valve closed
4/4/2012	3:57:20 PM	BCl3 valve closed
4/4/2012	3:57:20 PM	PH3 valve closed
4/4/2012	3:57:20 PM	SiCl4 pre valve closed
4/4/2012	3:57:20 PM	SiCl4 post valve closed
4/4/2012	3:57:20 PM	Bypass valve closed
4/4/2012	3:57:20 PM	Bubbler valve closed
4/4/2012	3:57:20 PM	Helium valve opened
4/4/2012	3:57:20 PM	Main Vac valve opened
4/4/2012	3:57:20 PM	Helium MFC set to  20.000000
4/4/2012	3:57:20 PM	H2 MFC set to  0.000000
4/4/2012	3:57:20 PM	BCl3 MFC set to  0.000000
4/4/2012	3:57:20 PM	PH3 MFC set to  0.000000
4/4/2012	3:57:20 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:57:20 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:57:20 PM	Tube furnace set to 200
4/4/2012	3:57:50 PM	Helium valve closed
4/4/2012	3:57:50 PM	H2 valve closed
4/4/2012	3:57:50 PM	BCl3 valve closed
4/4/2012	3:57:50 PM	PH3 valve closed
4/4/2012	3:57:50 PM	SiCl4 pre valve closed
4/4/2012	3:57:50 PM	SiCl4 post valve closed
4/4/2012	3:57:50 PM	Bypass valve closed
4/4/2012	3:57:50 PM	Bubbler valve closed
4/4/2012	3:57:50 PM	Main Vac valve opened
4/4/2012	3:57:50 PM	Helium MFC set to  0.000000
4/4/2012	3:57:50 PM	H2 MFC set to  0.000000
4/4/2012	3:57:50 PM	BCl3 MFC set to  0.000000
4/4/2012	3:57:50 PM	PH3 MFC set to  0.000000
4/4/2012	3:57:50 PM	SiCl4 MFC set to  0.000000
4/4/2012	3:57:50 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	3:57:50 PM	Tube furnace set to 0
4/4/2012	3:57:51 PM	Run finished at 3:57 PM
4/4/2012	4:00:58 PM	Main Vac valve closed
4/4/2012	4:01:09 PM	Main Vac valve opened
4/4/2012	4:01:24 PM	Recipe started at 4:01 PM
4/4/2012	4:01:24 PM	Helium valve closed
4/4/2012	4:01:24 PM	H2 valve closed
4/4/2012	4:01:24 PM	BCl3 valve closed
4/4/2012	4:01:24 PM	PH3 valve closed
4/4/2012	4:01:24 PM	SiCl4 pre valve closed
4/4/2012	4:01:24 PM	SiCl4 post valve closed
4/4/2012	4:01:24 PM	Main Vac valve closed
4/4/2012	4:01:24 PM	Bypass valve closed
4/4/2012	4:01:24 PM	Bubbler valve closed
4/4/2012	4:01:24 PM	Helium MFC set to  0.000000
4/4/2012	4:01:24 PM	H2 MFC set to  0.000000
4/4/2012	4:01:24 PM	BCl3 MFC set to  0.000000
4/4/2012	4:01:24 PM	PH3 MFC set to  0.000000
4/4/2012	4:01:24 PM	SiCl4 MFC set to  0.000000
4/4/2012	4:01:24 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:01:25 PM	Tube furnace set to 0
4/4/2012	4:01:28 PM	Helium valve closed
4/4/2012	4:01:28 PM	BCl3 valve closed
4/4/2012	4:01:28 PM	PH3 valve closed
4/4/2012	4:01:28 PM	SiCl4 pre valve closed
4/4/2012	4:01:28 PM	SiCl4 post valve closed
4/4/2012	4:01:28 PM	Main Vac valve closed
4/4/2012	4:01:28 PM	Bypass valve closed
4/4/2012	4:01:28 PM	Bubbler valve closed
4/4/2012	4:01:28 PM	H2 valve opened
4/4/2012	4:01:28 PM	Helium MFC set to  0.000000
4/4/2012	4:01:28 PM	H2 MFC set to  500.000000
4/4/2012	4:01:28 PM	BCl3 MFC set to  0.000000
4/4/2012	4:01:28 PM	PH3 MFC set to  0.000000
4/4/2012	4:01:28 PM	SiCl4 MFC set to  0.000000
4/4/2012	4:01:28 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:01:28 PM	Tube furnace set to 0
4/4/2012	4:02:32 PM	Helium valve closed
4/4/2012	4:02:32 PM	BCl3 valve closed
4/4/2012	4:02:32 PM	PH3 valve closed
4/4/2012	4:02:32 PM	SiCl4 pre valve closed
4/4/2012	4:02:32 PM	SiCl4 post valve closed
4/4/2012	4:02:32 PM	Main Vac valve closed
4/4/2012	4:02:32 PM	Bypass valve closed
4/4/2012	4:02:32 PM	H2 valve opened
4/4/2012	4:02:32 PM	Bubbler valve opened
4/4/2012	4:02:32 PM	Helium MFC set to  0.000000
4/4/2012	4:02:32 PM	H2 MFC set to  500.000000
4/4/2012	4:02:32 PM	BCl3 MFC set to  0.000000
4/4/2012	4:02:32 PM	PH3 MFC set to  0.000000
4/4/2012	4:02:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	4:02:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:02:32 PM	Tube furnace set to 0
4/4/2012	4:02:33 PM	Helium valve closed
4/4/2012	4:02:33 PM	BCl3 valve closed
4/4/2012	4:02:33 PM	PH3 valve closed
4/4/2012	4:02:33 PM	SiCl4 pre valve closed
4/4/2012	4:02:33 PM	SiCl4 post valve closed
4/4/2012	4:02:33 PM	Main Vac valve closed
4/4/2012	4:02:33 PM	Bypass valve closed
4/4/2012	4:02:33 PM	H2 valve opened
4/4/2012	4:02:33 PM	Bubbler valve opened
4/4/2012	4:02:33 PM	Helium MFC set to  0.000000
4/4/2012	4:02:33 PM	H2 MFC set to  500.000000
4/4/2012	4:02:33 PM	BCl3 MFC set to  0.000000
4/4/2012	4:02:33 PM	PH3 MFC set to  0.000000
4/4/2012	4:02:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	4:02:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:02:33 PM	Tube furnace set to 1000
4/4/2012	4:22:33 PM	Helium valve closed
4/4/2012	4:22:33 PM	PH3 valve closed
4/4/2012	4:22:33 PM	Main Vac valve closed
4/4/2012	4:22:33 PM	Bypass valve closed
4/4/2012	4:22:33 PM	H2 valve opened
4/4/2012	4:22:33 PM	BCl3 valve opened
4/4/2012	4:22:33 PM	SiCl4 pre valve opened
4/4/2012	4:22:33 PM	SiCl4 post valve opened
4/4/2012	4:22:33 PM	Bubbler valve opened
4/4/2012	4:22:33 PM	Helium MFC set to  0.000000
4/4/2012	4:22:33 PM	H2 MFC set to  450.000000
4/4/2012	4:22:33 PM	BCl3 MFC set to  1.500000
4/4/2012	4:22:33 PM	PH3 MFC set to  0.000000
4/4/2012	4:22:33 PM	SiCl4 MFC set to  50.000000
4/4/2012	4:22:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:22:33 PM	Tube furnace set to 1000
4/4/2012	4:37:33 PM	Helium valve closed
4/4/2012	4:37:33 PM	BCl3 valve closed
4/4/2012	4:37:33 PM	PH3 valve closed
4/4/2012	4:37:33 PM	SiCl4 pre valve closed
4/4/2012	4:37:33 PM	SiCl4 post valve closed
4/4/2012	4:37:33 PM	Main Vac valve closed
4/4/2012	4:37:33 PM	Bypass valve closed
4/4/2012	4:37:33 PM	H2 valve opened
4/4/2012	4:37:33 PM	Bubbler valve opened
4/4/2012	4:37:33 PM	Helium MFC set to  0.000000
4/4/2012	4:37:33 PM	H2 MFC set to  500.000000
4/4/2012	4:37:33 PM	BCl3 MFC set to  0.000000
4/4/2012	4:37:33 PM	PH3 MFC set to  0.000000
4/4/2012	4:37:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	4:37:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:37:33 PM	Tube furnace set to 950
4/4/2012	4:39:33 PM	Helium valve closed
4/4/2012	4:39:33 PM	BCl3 valve closed
4/4/2012	4:39:33 PM	PH3 valve closed
4/4/2012	4:39:33 PM	SiCl4 pre valve closed
4/4/2012	4:39:33 PM	SiCl4 post valve closed
4/4/2012	4:39:33 PM	Main Vac valve closed
4/4/2012	4:39:33 PM	Bypass valve closed
4/4/2012	4:39:33 PM	H2 valve opened
4/4/2012	4:39:33 PM	Bubbler valve opened
4/4/2012	4:39:33 PM	Helium MFC set to  0.000000
4/4/2012	4:39:33 PM	H2 MFC set to  500.000000
4/4/2012	4:39:33 PM	BCl3 MFC set to  0.000000
4/4/2012	4:39:33 PM	PH3 MFC set to  0.000000
4/4/2012	4:39:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	4:39:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:39:34 PM	Tube furnace set to 900
4/4/2012	4:41:34 PM	Helium valve closed
4/4/2012	4:41:34 PM	BCl3 valve closed
4/4/2012	4:41:34 PM	PH3 valve closed
4/4/2012	4:41:34 PM	SiCl4 pre valve closed
4/4/2012	4:41:34 PM	SiCl4 post valve closed
4/4/2012	4:41:34 PM	Main Vac valve closed
4/4/2012	4:41:34 PM	Bypass valve closed
4/4/2012	4:41:34 PM	H2 valve opened
4/4/2012	4:41:34 PM	Bubbler valve opened
4/4/2012	4:41:34 PM	Helium MFC set to  0.000000
4/4/2012	4:41:34 PM	H2 MFC set to  500.000000
4/4/2012	4:41:34 PM	BCl3 MFC set to  0.000000
4/4/2012	4:41:34 PM	PH3 MFC set to  0.000000
4/4/2012	4:41:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	4:41:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:41:34 PM	Tube furnace set to 850
4/4/2012	4:43:34 PM	H2 valve closed
4/4/2012	4:43:34 PM	BCl3 valve closed
4/4/2012	4:43:34 PM	PH3 valve closed
4/4/2012	4:43:34 PM	SiCl4 pre valve closed
4/4/2012	4:43:34 PM	SiCl4 post valve closed
4/4/2012	4:43:34 PM	Main Vac valve closed
4/4/2012	4:43:34 PM	Bypass valve closed
4/4/2012	4:43:34 PM	Helium valve opened
4/4/2012	4:43:34 PM	Bubbler valve opened
4/4/2012	4:43:34 PM	Helium MFC set to  500.000000
4/4/2012	4:43:34 PM	H2 MFC set to  0.000000
4/4/2012	4:43:34 PM	BCl3 MFC set to  0.000000
4/4/2012	4:43:34 PM	PH3 MFC set to  0.000000
4/4/2012	4:43:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	4:43:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:43:34 PM	Tube furnace set to 800
4/4/2012	4:45:34 PM	H2 valve closed
4/4/2012	4:45:34 PM	BCl3 valve closed
4/4/2012	4:45:34 PM	PH3 valve closed
4/4/2012	4:45:34 PM	SiCl4 pre valve closed
4/4/2012	4:45:34 PM	SiCl4 post valve closed
4/4/2012	4:45:34 PM	Main Vac valve closed
4/4/2012	4:45:34 PM	Bypass valve closed
4/4/2012	4:45:34 PM	Helium valve opened
4/4/2012	4:45:34 PM	Bubbler valve opened
4/4/2012	4:45:34 PM	Helium MFC set to  500.000000
4/4/2012	4:45:34 PM	H2 MFC set to  0.000000
4/4/2012	4:45:34 PM	BCl3 MFC set to  0.000000
4/4/2012	4:45:34 PM	PH3 MFC set to  0.000000
4/4/2012	4:45:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	4:45:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:45:34 PM	Tube furnace set to 750
4/4/2012	4:47:34 PM	H2 valve closed
4/4/2012	4:47:34 PM	BCl3 valve closed
4/4/2012	4:47:34 PM	PH3 valve closed
4/4/2012	4:47:34 PM	SiCl4 pre valve closed
4/4/2012	4:47:34 PM	SiCl4 post valve closed
4/4/2012	4:47:34 PM	Main Vac valve closed
4/4/2012	4:47:34 PM	Bypass valve closed
4/4/2012	4:47:34 PM	Helium valve opened
4/4/2012	4:47:34 PM	Bubbler valve opened
4/4/2012	4:47:34 PM	Helium MFC set to  500.000000
4/4/2012	4:47:34 PM	H2 MFC set to  0.000000
4/4/2012	4:47:34 PM	BCl3 MFC set to  0.000000
4/4/2012	4:47:34 PM	PH3 MFC set to  0.000000
4/4/2012	4:47:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	4:47:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	4:47:35 PM	Tube furnace set to 0
4/4/2012	5:07:35 PM	Helium valve closed
4/4/2012	5:07:35 PM	H2 valve closed
4/4/2012	5:07:35 PM	BCl3 valve closed
4/4/2012	5:07:35 PM	PH3 valve closed
4/4/2012	5:07:35 PM	SiCl4 pre valve closed
4/4/2012	5:07:35 PM	SiCl4 post valve closed
4/4/2012	5:07:35 PM	Main Vac valve closed
4/4/2012	5:07:35 PM	Bypass valve closed
4/4/2012	5:07:35 PM	Bubbler valve closed
4/4/2012	5:07:35 PM	Helium MFC set to  0.000000
4/4/2012	5:07:35 PM	H2 MFC set to  0.000000
4/4/2012	5:07:35 PM	BCl3 MFC set to  0.000000
4/4/2012	5:07:35 PM	PH3 MFC set to  0.000000
4/4/2012	5:07:35 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:07:35 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:07:35 PM	Tube furnace set to 0
4/4/2012	5:07:36 PM	Run finished at 5:07 PM
4/4/2012	5:22:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	5:22:54 PM	Recipe started at 5:22 PM
4/4/2012	5:22:54 PM	Helium valve closed
4/4/2012	5:22:54 PM	H2 valve closed
4/4/2012	5:22:54 PM	BCl3 valve closed
4/4/2012	5:22:54 PM	PH3 valve closed
4/4/2012	5:22:54 PM	SiCl4 pre valve closed
4/4/2012	5:22:54 PM	SiCl4 post valve closed
4/4/2012	5:22:54 PM	Main Vac valve closed
4/4/2012	5:22:54 PM	Bypass valve closed
4/4/2012	5:22:54 PM	Bubbler valve closed
4/4/2012	5:22:54 PM	Helium MFC set to  0.000000
4/4/2012	5:22:54 PM	H2 MFC set to  0.000000
4/4/2012	5:22:54 PM	BCl3 MFC set to  0.000000
4/4/2012	5:22:54 PM	PH3 MFC set to  0.000000
4/4/2012	5:22:54 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:22:54 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:22:54 PM	Tube furnace set to 0
4/4/2012	5:22:57 PM	H2 valve closed
4/4/2012	5:22:57 PM	BCl3 valve closed
4/4/2012	5:22:57 PM	PH3 valve closed
4/4/2012	5:22:57 PM	SiCl4 pre valve closed
4/4/2012	5:22:57 PM	SiCl4 post valve closed
4/4/2012	5:22:57 PM	Main Vac valve closed
4/4/2012	5:22:57 PM	Bypass valve closed
4/4/2012	5:22:57 PM	Bubbler valve closed
4/4/2012	5:22:57 PM	Helium valve opened
4/4/2012	5:22:57 PM	Helium MFC set to  500.000000
4/4/2012	5:22:57 PM	H2 MFC set to  0.000000
4/4/2012	5:22:57 PM	BCl3 MFC set to  0.000000
4/4/2012	5:22:57 PM	PH3 MFC set to  0.000000
4/4/2012	5:22:57 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:22:57 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:22:58 PM	Tube furnace set to 0
4/4/2012	5:23:01 PM	Helium valve closed
4/4/2012	5:23:01 PM	H2 valve closed
4/4/2012	5:23:01 PM	BCl3 valve closed
4/4/2012	5:23:01 PM	PH3 valve closed
4/4/2012	5:23:01 PM	SiCl4 pre valve closed
4/4/2012	5:23:01 PM	SiCl4 post valve closed
4/4/2012	5:23:01 PM	Main Vac valve closed
4/4/2012	5:23:01 PM	Bypass valve closed
4/4/2012	5:23:01 PM	Bubbler valve closed
4/4/2012	5:23:01 PM	Helium MFC set to  0.000000
4/4/2012	5:23:01 PM	H2 MFC set to  0.000000
4/4/2012	5:23:01 PM	BCl3 MFC set to  0.000000
4/4/2012	5:23:01 PM	PH3 MFC set to  0.000000
4/4/2012	5:23:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:23:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:23:01 PM	Tube furnace set to 0
4/4/2012	5:23:02 PM	Run finished at 5:23 PM
4/4/2012	5:23:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	5:25:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	5:25:43 PM	Recipe started at 5:25 PM
4/4/2012	5:25:43 PM	Helium valve closed
4/4/2012	5:25:43 PM	H2 valve closed
4/4/2012	5:25:43 PM	BCl3 valve closed
4/4/2012	5:25:43 PM	PH3 valve closed
4/4/2012	5:25:43 PM	SiCl4 pre valve closed
4/4/2012	5:25:43 PM	SiCl4 post valve closed
4/4/2012	5:25:43 PM	Main Vac valve closed
4/4/2012	5:25:43 PM	Bubbler valve closed
4/4/2012	5:25:43 PM	Bypass valve opened
4/4/2012	5:25:43 PM	Helium MFC set to  0.000000
4/4/2012	5:25:43 PM	H2 MFC set to  0.000000
4/4/2012	5:25:43 PM	BCl3 MFC set to  0.000000
4/4/2012	5:25:43 PM	PH3 MFC set to  0.000000
4/4/2012	5:25:43 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:25:43 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:25:43 PM	Tube furnace set to 0
4/4/2012	5:26:42 PM	Helium valve closed
4/4/2012	5:26:42 PM	H2 valve closed
4/4/2012	5:26:42 PM	BCl3 valve closed
4/4/2012	5:26:42 PM	PH3 valve closed
4/4/2012	5:26:42 PM	SiCl4 pre valve closed
4/4/2012	5:26:42 PM	SiCl4 post valve closed
4/4/2012	5:26:42 PM	Main Vac valve closed
4/4/2012	5:26:42 PM	Bubbler valve closed
4/4/2012	5:26:42 PM	Bypass valve opened
4/4/2012	5:26:42 PM	Helium MFC set to  0.000000
4/4/2012	5:26:42 PM	H2 MFC set to  0.000000
4/4/2012	5:26:42 PM	BCl3 MFC set to  0.000000
4/4/2012	5:26:42 PM	PH3 MFC set to  0.000000
4/4/2012	5:26:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:26:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:26:42 PM	Tube furnace set to 0
4/4/2012	5:27:42 PM	Helium valve closed
4/4/2012	5:27:42 PM	H2 valve closed
4/4/2012	5:27:42 PM	BCl3 valve closed
4/4/2012	5:27:42 PM	PH3 valve closed
4/4/2012	5:27:42 PM	SiCl4 pre valve closed
4/4/2012	5:27:42 PM	SiCl4 post valve closed
4/4/2012	5:27:42 PM	Bypass valve closed
4/4/2012	5:27:42 PM	Bubbler valve closed
4/4/2012	5:27:42 PM	Main Vac valve opened
4/4/2012	5:27:42 PM	Helium MFC set to  0.000000
4/4/2012	5:27:42 PM	H2 MFC set to  0.000000
4/4/2012	5:27:42 PM	BCl3 MFC set to  0.000000
4/4/2012	5:27:42 PM	PH3 MFC set to  0.000000
4/4/2012	5:27:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:27:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:27:42 PM	Tube furnace set to 0
4/4/2012	5:27:43 PM	Run finished at 5:27 PM
4/4/2012	5:27:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	5:28:27 PM	Recipe started at 5:28 PM
4/4/2012	5:28:27 PM	Helium valve closed
4/4/2012	5:28:27 PM	H2 valve closed
4/4/2012	5:28:27 PM	BCl3 valve closed
4/4/2012	5:28:27 PM	PH3 valve closed
4/4/2012	5:28:27 PM	SiCl4 pre valve closed
4/4/2012	5:28:27 PM	SiCl4 post valve closed
4/4/2012	5:28:27 PM	Bypass valve closed
4/4/2012	5:28:27 PM	Bubbler valve closed
4/4/2012	5:28:27 PM	Main Vac valve opened
4/4/2012	5:28:27 PM	Helium MFC set to  0.000000
4/4/2012	5:28:27 PM	H2 MFC set to  0.000000
4/4/2012	5:28:27 PM	BCl3 MFC set to  0.000000
4/4/2012	5:28:28 PM	PH3 MFC set to  0.000000
4/4/2012	5:28:28 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:28:28 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:28:28 PM	Tube furnace set to 0
4/4/2012	5:28:58 PM	H2 valve closed
4/4/2012	5:28:58 PM	BCl3 valve closed
4/4/2012	5:28:58 PM	PH3 valve closed
4/4/2012	5:28:58 PM	SiCl4 pre valve closed
4/4/2012	5:28:58 PM	SiCl4 post valve closed
4/4/2012	5:28:58 PM	Bypass valve closed
4/4/2012	5:28:58 PM	Bubbler valve closed
4/4/2012	5:28:58 PM	Helium valve opened
4/4/2012	5:28:58 PM	Main Vac valve opened
4/4/2012	5:28:58 PM	Helium MFC set to  20.000000
4/4/2012	5:28:58 PM	H2 MFC set to  0.000000
4/4/2012	5:28:58 PM	BCl3 MFC set to  0.000000
4/4/2012	5:28:58 PM	PH3 MFC set to  0.000000
4/4/2012	5:28:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:28:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:28:58 PM	Tube furnace set to 0
4/4/2012	5:29:28 PM	Helium valve closed
4/4/2012	5:29:28 PM	H2 valve closed
4/4/2012	5:29:28 PM	BCl3 valve closed
4/4/2012	5:29:28 PM	PH3 valve closed
4/4/2012	5:29:28 PM	SiCl4 pre valve closed
4/4/2012	5:29:28 PM	SiCl4 post valve closed
4/4/2012	5:29:28 PM	Bypass valve closed
4/4/2012	5:29:28 PM	Bubbler valve closed
4/4/2012	5:29:28 PM	Main Vac valve opened
4/4/2012	5:29:28 PM	Helium MFC set to  0.000000
4/4/2012	5:29:28 PM	H2 MFC set to  0.000000
4/4/2012	5:29:28 PM	BCl3 MFC set to  0.000000
4/4/2012	5:29:28 PM	PH3 MFC set to  0.000000
4/4/2012	5:29:28 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:29:28 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:29:28 PM	Tube furnace set to 0
4/4/2012	5:29:58 PM	H2 valve closed
4/4/2012	5:29:58 PM	BCl3 valve closed
4/4/2012	5:29:58 PM	PH3 valve closed
4/4/2012	5:29:58 PM	SiCl4 pre valve closed
4/4/2012	5:29:58 PM	SiCl4 post valve closed
4/4/2012	5:29:58 PM	Bypass valve closed
4/4/2012	5:29:58 PM	Bubbler valve closed
4/4/2012	5:29:58 PM	Helium valve opened
4/4/2012	5:29:58 PM	Main Vac valve opened
4/4/2012	5:29:58 PM	Helium MFC set to  20.000000
4/4/2012	5:29:58 PM	H2 MFC set to  0.000000
4/4/2012	5:29:58 PM	BCl3 MFC set to  0.000000
4/4/2012	5:29:58 PM	PH3 MFC set to  0.000000
4/4/2012	5:29:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:29:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:29:58 PM	Tube furnace set to 0
4/4/2012	5:30:28 PM	Helium valve closed
4/4/2012	5:30:28 PM	H2 valve closed
4/4/2012	5:30:28 PM	BCl3 valve closed
4/4/2012	5:30:28 PM	PH3 valve closed
4/4/2012	5:30:28 PM	SiCl4 pre valve closed
4/4/2012	5:30:28 PM	SiCl4 post valve closed
4/4/2012	5:30:28 PM	Bypass valve closed
4/4/2012	5:30:28 PM	Bubbler valve closed
4/4/2012	5:30:28 PM	Main Vac valve opened
4/4/2012	5:30:28 PM	Helium MFC set to  0.000000
4/4/2012	5:30:28 PM	H2 MFC set to  0.000000
4/4/2012	5:30:28 PM	BCl3 MFC set to  0.000000
4/4/2012	5:30:28 PM	PH3 MFC set to  0.000000
4/4/2012	5:30:28 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:30:28 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:30:29 PM	Tube furnace set to 0
4/4/2012	5:30:59 PM	H2 valve closed
4/4/2012	5:30:59 PM	BCl3 valve closed
4/4/2012	5:30:59 PM	PH3 valve closed
4/4/2012	5:30:59 PM	SiCl4 pre valve closed
4/4/2012	5:30:59 PM	SiCl4 post valve closed
4/4/2012	5:30:59 PM	Bypass valve closed
4/4/2012	5:30:59 PM	Bubbler valve closed
4/4/2012	5:30:59 PM	Helium valve opened
4/4/2012	5:30:59 PM	Main Vac valve opened
4/4/2012	5:30:59 PM	Helium MFC set to  20.000000
4/4/2012	5:30:59 PM	H2 MFC set to  0.000000
4/4/2012	5:30:59 PM	BCl3 MFC set to  0.000000
4/4/2012	5:30:59 PM	PH3 MFC set to  0.000000
4/4/2012	5:30:59 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:30:59 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:30:59 PM	Tube furnace set to 0
4/4/2012	5:31:29 PM	Helium valve closed
4/4/2012	5:31:29 PM	H2 valve closed
4/4/2012	5:31:29 PM	BCl3 valve closed
4/4/2012	5:31:29 PM	PH3 valve closed
4/4/2012	5:31:29 PM	SiCl4 pre valve closed
4/4/2012	5:31:29 PM	SiCl4 post valve closed
4/4/2012	5:31:29 PM	Bypass valve closed
4/4/2012	5:31:29 PM	Bubbler valve closed
4/4/2012	5:31:29 PM	Main Vac valve opened
4/4/2012	5:31:29 PM	Helium MFC set to  0.000000
4/4/2012	5:31:29 PM	H2 MFC set to  0.000000
4/4/2012	5:31:29 PM	BCl3 MFC set to  0.000000
4/4/2012	5:31:29 PM	PH3 MFC set to  0.000000
4/4/2012	5:31:29 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:31:29 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:31:29 PM	Tube furnace set to 0
4/4/2012	5:31:59 PM	H2 valve closed
4/4/2012	5:31:59 PM	BCl3 valve closed
4/4/2012	5:31:59 PM	PH3 valve closed
4/4/2012	5:31:59 PM	SiCl4 pre valve closed
4/4/2012	5:31:59 PM	SiCl4 post valve closed
4/4/2012	5:31:59 PM	Bypass valve closed
4/4/2012	5:31:59 PM	Bubbler valve closed
4/4/2012	5:31:59 PM	Helium valve opened
4/4/2012	5:31:59 PM	Main Vac valve opened
4/4/2012	5:31:59 PM	Helium MFC set to  20.000000
4/4/2012	5:31:59 PM	H2 MFC set to  0.000000
4/4/2012	5:31:59 PM	BCl3 MFC set to  0.000000
4/4/2012	5:31:59 PM	PH3 MFC set to  0.000000
4/4/2012	5:31:59 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:31:59 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:31:59 PM	Tube furnace set to 0
4/4/2012	5:32:29 PM	Helium valve closed
4/4/2012	5:32:29 PM	H2 valve closed
4/4/2012	5:32:29 PM	BCl3 valve closed
4/4/2012	5:32:29 PM	PH3 valve closed
4/4/2012	5:32:29 PM	SiCl4 pre valve closed
4/4/2012	5:32:29 PM	SiCl4 post valve closed
4/4/2012	5:32:29 PM	Bypass valve closed
4/4/2012	5:32:29 PM	Bubbler valve closed
4/4/2012	5:32:29 PM	Main Vac valve opened
4/4/2012	5:32:29 PM	Helium MFC set to  0.000000
4/4/2012	5:32:29 PM	H2 MFC set to  0.000000
4/4/2012	5:32:29 PM	BCl3 MFC set to  0.000000
4/4/2012	5:32:29 PM	PH3 MFC set to  0.000000
4/4/2012	5:32:29 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:32:29 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:32:30 PM	Tube furnace set to 0
4/4/2012	5:33:00 PM	H2 valve closed
4/4/2012	5:33:00 PM	BCl3 valve closed
4/4/2012	5:33:00 PM	PH3 valve closed
4/4/2012	5:33:00 PM	SiCl4 pre valve closed
4/4/2012	5:33:00 PM	SiCl4 post valve closed
4/4/2012	5:33:00 PM	Bypass valve closed
4/4/2012	5:33:00 PM	Bubbler valve closed
4/4/2012	5:33:00 PM	Helium valve opened
4/4/2012	5:33:00 PM	Main Vac valve opened
4/4/2012	5:33:00 PM	Helium MFC set to  20.000000
4/4/2012	5:33:00 PM	H2 MFC set to  0.000000
4/4/2012	5:33:00 PM	BCl3 MFC set to  0.000000
4/4/2012	5:33:00 PM	PH3 MFC set to  0.000000
4/4/2012	5:33:00 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:33:00 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:33:00 PM	Tube furnace set to 0
4/4/2012	5:33:30 PM	Helium valve closed
4/4/2012	5:33:30 PM	H2 valve closed
4/4/2012	5:33:30 PM	BCl3 valve closed
4/4/2012	5:33:30 PM	PH3 valve closed
4/4/2012	5:33:30 PM	SiCl4 pre valve closed
4/4/2012	5:33:30 PM	SiCl4 post valve closed
4/4/2012	5:33:30 PM	Bypass valve closed
4/4/2012	5:33:30 PM	Bubbler valve closed
4/4/2012	5:33:30 PM	Main Vac valve opened
4/4/2012	5:33:30 PM	Helium MFC set to  0.000000
4/4/2012	5:33:30 PM	H2 MFC set to  0.000000
4/4/2012	5:33:30 PM	BCl3 MFC set to  0.000000
4/4/2012	5:33:30 PM	PH3 MFC set to  0.000000
4/4/2012	5:33:30 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:33:30 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:33:30 PM	Tube furnace set to 0
4/4/2012	5:34:00 PM	H2 valve closed
4/4/2012	5:34:00 PM	BCl3 valve closed
4/4/2012	5:34:00 PM	PH3 valve closed
4/4/2012	5:34:00 PM	SiCl4 pre valve closed
4/4/2012	5:34:00 PM	SiCl4 post valve closed
4/4/2012	5:34:00 PM	Bypass valve closed
4/4/2012	5:34:00 PM	Bubbler valve closed
4/4/2012	5:34:00 PM	Helium valve opened
4/4/2012	5:34:00 PM	Main Vac valve opened
4/4/2012	5:34:00 PM	Helium MFC set to  20.000000
4/4/2012	5:34:00 PM	H2 MFC set to  0.000000
4/4/2012	5:34:00 PM	BCl3 MFC set to  0.000000
4/4/2012	5:34:00 PM	PH3 MFC set to  0.000000
4/4/2012	5:34:00 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:34:00 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:34:00 PM	Tube furnace set to 0
4/4/2012	5:34:30 PM	Helium valve closed
4/4/2012	5:34:30 PM	H2 valve closed
4/4/2012	5:34:30 PM	BCl3 valve closed
4/4/2012	5:34:30 PM	PH3 valve closed
4/4/2012	5:34:30 PM	SiCl4 pre valve closed
4/4/2012	5:34:30 PM	SiCl4 post valve closed
4/4/2012	5:34:30 PM	Bypass valve closed
4/4/2012	5:34:30 PM	Bubbler valve closed
4/4/2012	5:34:30 PM	Main Vac valve opened
4/4/2012	5:34:30 PM	Helium MFC set to  0.000000
4/4/2012	5:34:30 PM	H2 MFC set to  0.000000
4/4/2012	5:34:30 PM	BCl3 MFC set to  0.000000
4/4/2012	5:34:30 PM	PH3 MFC set to  0.000000
4/4/2012	5:34:30 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:34:30 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:34:30 PM	Tube furnace set to 0
4/4/2012	5:35:01 PM	H2 valve closed
4/4/2012	5:35:01 PM	BCl3 valve closed
4/4/2012	5:35:01 PM	PH3 valve closed
4/4/2012	5:35:01 PM	SiCl4 pre valve closed
4/4/2012	5:35:01 PM	SiCl4 post valve closed
4/4/2012	5:35:01 PM	Bypass valve closed
4/4/2012	5:35:01 PM	Bubbler valve closed
4/4/2012	5:35:01 PM	Helium valve opened
4/4/2012	5:35:01 PM	Main Vac valve opened
4/4/2012	5:35:01 PM	Helium MFC set to  20.000000
4/4/2012	5:35:01 PM	H2 MFC set to  0.000000
4/4/2012	5:35:01 PM	BCl3 MFC set to  0.000000
4/4/2012	5:35:01 PM	PH3 MFC set to  0.000000
4/4/2012	5:35:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:35:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:35:01 PM	Tube furnace set to 0
4/4/2012	5:35:31 PM	Helium valve closed
4/4/2012	5:35:31 PM	H2 valve closed
4/4/2012	5:35:31 PM	BCl3 valve closed
4/4/2012	5:35:31 PM	PH3 valve closed
4/4/2012	5:35:31 PM	SiCl4 pre valve closed
4/4/2012	5:35:31 PM	SiCl4 post valve closed
4/4/2012	5:35:31 PM	Bypass valve closed
4/4/2012	5:35:31 PM	Bubbler valve closed
4/4/2012	5:35:31 PM	Main Vac valve opened
4/4/2012	5:35:31 PM	Helium MFC set to  0.000000
4/4/2012	5:35:31 PM	H2 MFC set to  0.000000
4/4/2012	5:35:31 PM	BCl3 MFC set to  0.000000
4/4/2012	5:35:31 PM	PH3 MFC set to  0.000000
4/4/2012	5:35:31 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:35:31 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:35:31 PM	Tube furnace set to 0
4/4/2012	5:36:01 PM	H2 valve closed
4/4/2012	5:36:01 PM	BCl3 valve closed
4/4/2012	5:36:01 PM	PH3 valve closed
4/4/2012	5:36:01 PM	SiCl4 pre valve closed
4/4/2012	5:36:01 PM	SiCl4 post valve closed
4/4/2012	5:36:01 PM	Bypass valve closed
4/4/2012	5:36:01 PM	Bubbler valve closed
4/4/2012	5:36:01 PM	Helium valve opened
4/4/2012	5:36:01 PM	Main Vac valve opened
4/4/2012	5:36:01 PM	Helium MFC set to  20.000000
4/4/2012	5:36:01 PM	H2 MFC set to  0.000000
4/4/2012	5:36:01 PM	BCl3 MFC set to  0.000000
4/4/2012	5:36:01 PM	PH3 MFC set to  0.000000
4/4/2012	5:36:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:36:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:36:01 PM	Tube furnace set to 0
4/4/2012	5:36:31 PM	Helium valve closed
4/4/2012	5:36:31 PM	H2 valve closed
4/4/2012	5:36:31 PM	BCl3 valve closed
4/4/2012	5:36:31 PM	PH3 valve closed
4/4/2012	5:36:31 PM	SiCl4 pre valve closed
4/4/2012	5:36:31 PM	SiCl4 post valve closed
4/4/2012	5:36:31 PM	Bypass valve closed
4/4/2012	5:36:31 PM	Bubbler valve closed
4/4/2012	5:36:31 PM	Main Vac valve opened
4/4/2012	5:36:31 PM	Helium MFC set to  0.000000
4/4/2012	5:36:31 PM	H2 MFC set to  0.000000
4/4/2012	5:36:31 PM	BCl3 MFC set to  0.000000
4/4/2012	5:36:31 PM	PH3 MFC set to  0.000000
4/4/2012	5:36:31 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:36:31 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:36:31 PM	Tube furnace set to 0
4/4/2012	5:37:01 PM	H2 valve closed
4/4/2012	5:37:01 PM	BCl3 valve closed
4/4/2012	5:37:01 PM	PH3 valve closed
4/4/2012	5:37:01 PM	SiCl4 pre valve closed
4/4/2012	5:37:01 PM	SiCl4 post valve closed
4/4/2012	5:37:01 PM	Bypass valve closed
4/4/2012	5:37:01 PM	Bubbler valve closed
4/4/2012	5:37:01 PM	Helium valve opened
4/4/2012	5:37:01 PM	Main Vac valve opened
4/4/2012	5:37:01 PM	Helium MFC set to  20.000000
4/4/2012	5:37:01 PM	H2 MFC set to  0.000000
4/4/2012	5:37:01 PM	BCl3 MFC set to  0.000000
4/4/2012	5:37:02 PM	PH3 MFC set to  0.000000
4/4/2012	5:37:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:37:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:37:02 PM	Tube furnace set to 0
4/4/2012	5:37:32 PM	Helium valve closed
4/4/2012	5:37:32 PM	H2 valve closed
4/4/2012	5:37:32 PM	BCl3 valve closed
4/4/2012	5:37:32 PM	PH3 valve closed
4/4/2012	5:37:32 PM	SiCl4 pre valve closed
4/4/2012	5:37:32 PM	SiCl4 post valve closed
4/4/2012	5:37:32 PM	Bypass valve closed
4/4/2012	5:37:32 PM	Bubbler valve closed
4/4/2012	5:37:32 PM	Main Vac valve opened
4/4/2012	5:37:32 PM	Helium MFC set to  0.000000
4/4/2012	5:37:32 PM	H2 MFC set to  0.000000
4/4/2012	5:37:32 PM	BCl3 MFC set to  0.000000
4/4/2012	5:37:32 PM	PH3 MFC set to  0.000000
4/4/2012	5:37:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:37:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:37:32 PM	Tube furnace set to 200
4/4/2012	5:38:02 PM	H2 valve closed
4/4/2012	5:38:02 PM	BCl3 valve closed
4/4/2012	5:38:02 PM	PH3 valve closed
4/4/2012	5:38:02 PM	SiCl4 pre valve closed
4/4/2012	5:38:02 PM	SiCl4 post valve closed
4/4/2012	5:38:02 PM	Bypass valve closed
4/4/2012	5:38:02 PM	Bubbler valve closed
4/4/2012	5:38:02 PM	Helium valve opened
4/4/2012	5:38:02 PM	Main Vac valve opened
4/4/2012	5:38:02 PM	Helium MFC set to  20.000000
4/4/2012	5:38:02 PM	H2 MFC set to  0.000000
4/4/2012	5:38:02 PM	BCl3 MFC set to  0.000000
4/4/2012	5:38:02 PM	PH3 MFC set to  0.000000
4/4/2012	5:38:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:38:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:38:02 PM	Tube furnace set to 200
4/4/2012	5:38:32 PM	Helium valve closed
4/4/2012	5:38:32 PM	H2 valve closed
4/4/2012	5:38:32 PM	BCl3 valve closed
4/4/2012	5:38:32 PM	PH3 valve closed
4/4/2012	5:38:32 PM	SiCl4 pre valve closed
4/4/2012	5:38:32 PM	SiCl4 post valve closed
4/4/2012	5:38:32 PM	Bypass valve closed
4/4/2012	5:38:32 PM	Bubbler valve closed
4/4/2012	5:38:32 PM	Main Vac valve opened
4/4/2012	5:38:32 PM	Helium MFC set to  0.000000
4/4/2012	5:38:32 PM	H2 MFC set to  0.000000
4/4/2012	5:38:32 PM	BCl3 MFC set to  0.000000
4/4/2012	5:38:32 PM	PH3 MFC set to  0.000000
4/4/2012	5:38:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:38:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:38:32 PM	Tube furnace set to 200
4/4/2012	5:39:02 PM	H2 valve closed
4/4/2012	5:39:02 PM	BCl3 valve closed
4/4/2012	5:39:02 PM	PH3 valve closed
4/4/2012	5:39:02 PM	SiCl4 pre valve closed
4/4/2012	5:39:02 PM	SiCl4 post valve closed
4/4/2012	5:39:02 PM	Bypass valve closed
4/4/2012	5:39:02 PM	Bubbler valve closed
4/4/2012	5:39:02 PM	Helium valve opened
4/4/2012	5:39:02 PM	Main Vac valve opened
4/4/2012	5:39:02 PM	Helium MFC set to  20.000000
4/4/2012	5:39:02 PM	H2 MFC set to  0.000000
4/4/2012	5:39:02 PM	BCl3 MFC set to  0.000000
4/4/2012	5:39:02 PM	PH3 MFC set to  0.000000
4/4/2012	5:39:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:39:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:39:03 PM	Tube furnace set to 200
4/4/2012	5:39:33 PM	Helium valve closed
4/4/2012	5:39:33 PM	H2 valve closed
4/4/2012	5:39:33 PM	BCl3 valve closed
4/4/2012	5:39:33 PM	PH3 valve closed
4/4/2012	5:39:33 PM	SiCl4 pre valve closed
4/4/2012	5:39:33 PM	SiCl4 post valve closed
4/4/2012	5:39:33 PM	Bypass valve closed
4/4/2012	5:39:33 PM	Bubbler valve closed
4/4/2012	5:39:33 PM	Main Vac valve opened
4/4/2012	5:39:33 PM	Helium MFC set to  0.000000
4/4/2012	5:39:33 PM	H2 MFC set to  0.000000
4/4/2012	5:39:33 PM	BCl3 MFC set to  0.000000
4/4/2012	5:39:33 PM	PH3 MFC set to  0.000000
4/4/2012	5:39:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:39:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:39:33 PM	Tube furnace set to 200
4/4/2012	5:40:03 PM	H2 valve closed
4/4/2012	5:40:03 PM	BCl3 valve closed
4/4/2012	5:40:03 PM	PH3 valve closed
4/4/2012	5:40:03 PM	SiCl4 pre valve closed
4/4/2012	5:40:03 PM	SiCl4 post valve closed
4/4/2012	5:40:03 PM	Bypass valve closed
4/4/2012	5:40:03 PM	Bubbler valve closed
4/4/2012	5:40:03 PM	Helium valve opened
4/4/2012	5:40:03 PM	Main Vac valve opened
4/4/2012	5:40:03 PM	Helium MFC set to  20.000000
4/4/2012	5:40:03 PM	H2 MFC set to  0.000000
4/4/2012	5:40:03 PM	BCl3 MFC set to  0.000000
4/4/2012	5:40:03 PM	PH3 MFC set to  0.000000
4/4/2012	5:40:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:40:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:40:03 PM	Tube furnace set to 200
4/4/2012	5:40:33 PM	Helium valve closed
4/4/2012	5:40:33 PM	H2 valve closed
4/4/2012	5:40:33 PM	BCl3 valve closed
4/4/2012	5:40:33 PM	PH3 valve closed
4/4/2012	5:40:33 PM	SiCl4 pre valve closed
4/4/2012	5:40:33 PM	SiCl4 post valve closed
4/4/2012	5:40:33 PM	Bypass valve closed
4/4/2012	5:40:33 PM	Bubbler valve closed
4/4/2012	5:40:33 PM	Main Vac valve opened
4/4/2012	5:40:33 PM	Helium MFC set to  0.000000
4/4/2012	5:40:33 PM	H2 MFC set to  0.000000
4/4/2012	5:40:33 PM	BCl3 MFC set to  0.000000
4/4/2012	5:40:33 PM	PH3 MFC set to  0.000000
4/4/2012	5:40:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:40:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:40:33 PM	Tube furnace set to 200
4/4/2012	5:41:03 PM	H2 valve closed
4/4/2012	5:41:03 PM	BCl3 valve closed
4/4/2012	5:41:03 PM	PH3 valve closed
4/4/2012	5:41:03 PM	SiCl4 pre valve closed
4/4/2012	5:41:03 PM	SiCl4 post valve closed
4/4/2012	5:41:03 PM	Bypass valve closed
4/4/2012	5:41:03 PM	Bubbler valve closed
4/4/2012	5:41:03 PM	Helium valve opened
4/4/2012	5:41:03 PM	Main Vac valve opened
4/4/2012	5:41:03 PM	Helium MFC set to  20.000000
4/4/2012	5:41:03 PM	H2 MFC set to  0.000000
4/4/2012	5:41:03 PM	BCl3 MFC set to  0.000000
4/4/2012	5:41:03 PM	PH3 MFC set to  0.000000
4/4/2012	5:41:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:41:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:41:04 PM	Tube furnace set to 200
4/4/2012	5:41:34 PM	Helium valve closed
4/4/2012	5:41:34 PM	H2 valve closed
4/4/2012	5:41:34 PM	BCl3 valve closed
4/4/2012	5:41:34 PM	PH3 valve closed
4/4/2012	5:41:34 PM	SiCl4 pre valve closed
4/4/2012	5:41:34 PM	SiCl4 post valve closed
4/4/2012	5:41:34 PM	Bypass valve closed
4/4/2012	5:41:34 PM	Bubbler valve closed
4/4/2012	5:41:34 PM	Main Vac valve opened
4/4/2012	5:41:34 PM	Helium MFC set to  0.000000
4/4/2012	5:41:34 PM	H2 MFC set to  0.000000
4/4/2012	5:41:34 PM	BCl3 MFC set to  0.000000
4/4/2012	5:41:34 PM	PH3 MFC set to  0.000000
4/4/2012	5:41:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:41:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:41:34 PM	Tube furnace set to 200
4/4/2012	5:42:04 PM	H2 valve closed
4/4/2012	5:42:04 PM	BCl3 valve closed
4/4/2012	5:42:04 PM	PH3 valve closed
4/4/2012	5:42:04 PM	SiCl4 pre valve closed
4/4/2012	5:42:04 PM	SiCl4 post valve closed
4/4/2012	5:42:04 PM	Bypass valve closed
4/4/2012	5:42:04 PM	Bubbler valve closed
4/4/2012	5:42:04 PM	Helium valve opened
4/4/2012	5:42:04 PM	Main Vac valve opened
4/4/2012	5:42:04 PM	Helium MFC set to  20.000000
4/4/2012	5:42:04 PM	H2 MFC set to  0.000000
4/4/2012	5:42:04 PM	BCl3 MFC set to  0.000000
4/4/2012	5:42:04 PM	PH3 MFC set to  0.000000
4/4/2012	5:42:04 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:42:04 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:42:04 PM	Tube furnace set to 200
4/4/2012	5:42:34 PM	Helium valve closed
4/4/2012	5:42:34 PM	H2 valve closed
4/4/2012	5:42:34 PM	BCl3 valve closed
4/4/2012	5:42:34 PM	PH3 valve closed
4/4/2012	5:42:34 PM	SiCl4 pre valve closed
4/4/2012	5:42:34 PM	SiCl4 post valve closed
4/4/2012	5:42:34 PM	Bypass valve closed
4/4/2012	5:42:34 PM	Bubbler valve closed
4/4/2012	5:42:34 PM	Main Vac valve opened
4/4/2012	5:42:34 PM	Helium MFC set to  0.000000
4/4/2012	5:42:34 PM	H2 MFC set to  0.000000
4/4/2012	5:42:34 PM	BCl3 MFC set to  0.000000
4/4/2012	5:42:34 PM	PH3 MFC set to  0.000000
4/4/2012	5:42:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:42:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:42:34 PM	Tube furnace set to 200
4/4/2012	5:43:04 PM	H2 valve closed
4/4/2012	5:43:04 PM	BCl3 valve closed
4/4/2012	5:43:04 PM	PH3 valve closed
4/4/2012	5:43:04 PM	SiCl4 pre valve closed
4/4/2012	5:43:04 PM	SiCl4 post valve closed
4/4/2012	5:43:04 PM	Bypass valve closed
4/4/2012	5:43:04 PM	Bubbler valve closed
4/4/2012	5:43:04 PM	Helium valve opened
4/4/2012	5:43:04 PM	Main Vac valve opened
4/4/2012	5:43:04 PM	Helium MFC set to  20.000000
4/4/2012	5:43:04 PM	H2 MFC set to  0.000000
4/4/2012	5:43:04 PM	BCl3 MFC set to  0.000000
4/4/2012	5:43:04 PM	PH3 MFC set to  0.000000
4/4/2012	5:43:04 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:43:04 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:43:04 PM	Tube furnace set to 200
4/4/2012	5:43:34 PM	Helium valve closed
4/4/2012	5:43:34 PM	H2 valve closed
4/4/2012	5:43:35 PM	BCl3 valve closed
4/4/2012	5:43:35 PM	PH3 valve closed
4/4/2012	5:43:35 PM	SiCl4 pre valve closed
4/4/2012	5:43:35 PM	SiCl4 post valve closed
4/4/2012	5:43:35 PM	Bypass valve closed
4/4/2012	5:43:35 PM	Bubbler valve closed
4/4/2012	5:43:35 PM	Main Vac valve opened
4/4/2012	5:43:35 PM	Helium MFC set to  0.000000
4/4/2012	5:43:35 PM	H2 MFC set to  0.000000
4/4/2012	5:43:35 PM	BCl3 MFC set to  0.000000
4/4/2012	5:43:35 PM	PH3 MFC set to  0.000000
4/4/2012	5:43:35 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:43:35 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:43:35 PM	Tube furnace set to 0
4/4/2012	5:43:36 PM	Run finished at 5:43 PM
4/4/2012	5:57:39 PM	Main Vac valve closed
4/4/2012	5:57:47 PM	Main Vac valve opened
4/4/2012	5:57:47 PM	Main Vac valve closed
4/4/2012	5:57:48 PM	Main Vac valve opened
4/4/2012	5:58:01 PM	Recipe started at 5:57 PM
4/4/2012	5:58:01 PM	Helium valve closed
4/4/2012	5:58:01 PM	H2 valve closed
4/4/2012	5:58:01 PM	BCl3 valve closed
4/4/2012	5:58:01 PM	PH3 valve closed
4/4/2012	5:58:01 PM	SiCl4 pre valve closed
4/4/2012	5:58:01 PM	SiCl4 post valve closed
4/4/2012	5:58:01 PM	Bypass valve closed
4/4/2012	5:58:01 PM	Bubbler valve closed
4/4/2012	5:58:01 PM	Main Vac valve opened
4/4/2012	5:58:01 PM	Helium MFC set to  0.000000
4/4/2012	5:58:01 PM	H2 MFC set to  0.000000
4/4/2012	5:58:01 PM	BCl3 MFC set to  0.000000
4/4/2012	5:58:01 PM	PH3 MFC set to  0.000000
4/4/2012	5:58:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:58:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:58:01 PM	Tube furnace set to 0
4/4/2012	5:58:31 PM	H2 valve closed
4/4/2012	5:58:31 PM	BCl3 valve closed
4/4/2012	5:58:31 PM	PH3 valve closed
4/4/2012	5:58:31 PM	SiCl4 pre valve closed
4/4/2012	5:58:31 PM	SiCl4 post valve closed
4/4/2012	5:58:31 PM	Bypass valve closed
4/4/2012	5:58:31 PM	Bubbler valve closed
4/4/2012	5:58:31 PM	Helium valve opened
4/4/2012	5:58:31 PM	Main Vac valve opened
4/4/2012	5:58:31 PM	Helium MFC set to  20.000000
4/4/2012	5:58:31 PM	H2 MFC set to  0.000000
4/4/2012	5:58:31 PM	BCl3 MFC set to  0.000000
4/4/2012	5:58:31 PM	PH3 MFC set to  0.000000
4/4/2012	5:58:31 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:58:31 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:58:31 PM	Tube furnace set to 0
4/4/2012	5:59:01 PM	Helium valve closed
4/4/2012	5:59:01 PM	H2 valve closed
4/4/2012	5:59:01 PM	BCl3 valve closed
4/4/2012	5:59:01 PM	PH3 valve closed
4/4/2012	5:59:01 PM	SiCl4 pre valve closed
4/4/2012	5:59:01 PM	SiCl4 post valve closed
4/4/2012	5:59:01 PM	Bypass valve closed
4/4/2012	5:59:01 PM	Bubbler valve closed
4/4/2012	5:59:01 PM	Main Vac valve opened
4/4/2012	5:59:01 PM	Helium MFC set to  0.000000
4/4/2012	5:59:01 PM	H2 MFC set to  0.000000
4/4/2012	5:59:01 PM	BCl3 MFC set to  0.000000
4/4/2012	5:59:01 PM	PH3 MFC set to  0.000000
4/4/2012	5:59:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:59:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:59:01 PM	Tube furnace set to 0
4/4/2012	5:59:31 PM	H2 valve closed
4/4/2012	5:59:31 PM	BCl3 valve closed
4/4/2012	5:59:31 PM	PH3 valve closed
4/4/2012	5:59:31 PM	SiCl4 pre valve closed
4/4/2012	5:59:31 PM	SiCl4 post valve closed
4/4/2012	5:59:31 PM	Bypass valve closed
4/4/2012	5:59:31 PM	Bubbler valve closed
4/4/2012	5:59:31 PM	Helium valve opened
4/4/2012	5:59:31 PM	Main Vac valve opened
4/4/2012	5:59:31 PM	Helium MFC set to  20.000000
4/4/2012	5:59:31 PM	H2 MFC set to  0.000000
4/4/2012	5:59:31 PM	BCl3 MFC set to  0.000000
4/4/2012	5:59:31 PM	PH3 MFC set to  0.000000
4/4/2012	5:59:31 PM	SiCl4 MFC set to  0.000000
4/4/2012	5:59:31 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	5:59:32 PM	Tube furnace set to 0
4/4/2012	6:00:02 PM	Helium valve closed
4/4/2012	6:00:02 PM	H2 valve closed
4/4/2012	6:00:02 PM	BCl3 valve closed
4/4/2012	6:00:02 PM	PH3 valve closed
4/4/2012	6:00:02 PM	SiCl4 pre valve closed
4/4/2012	6:00:02 PM	SiCl4 post valve closed
4/4/2012	6:00:02 PM	Bypass valve closed
4/4/2012	6:00:02 PM	Bubbler valve closed
4/4/2012	6:00:02 PM	Main Vac valve opened
4/4/2012	6:00:02 PM	Helium MFC set to  0.000000
4/4/2012	6:00:02 PM	H2 MFC set to  0.000000
4/4/2012	6:00:02 PM	BCl3 MFC set to  0.000000
4/4/2012	6:00:02 PM	PH3 MFC set to  0.000000
4/4/2012	6:00:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:00:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:00:02 PM	Tube furnace set to 0
4/4/2012	6:00:32 PM	H2 valve closed
4/4/2012	6:00:32 PM	BCl3 valve closed
4/4/2012	6:00:32 PM	PH3 valve closed
4/4/2012	6:00:32 PM	SiCl4 pre valve closed
4/4/2012	6:00:32 PM	SiCl4 post valve closed
4/4/2012	6:00:32 PM	Bypass valve closed
4/4/2012	6:00:32 PM	Bubbler valve closed
4/4/2012	6:00:32 PM	Helium valve opened
4/4/2012	6:00:32 PM	Main Vac valve opened
4/4/2012	6:00:32 PM	Helium MFC set to  20.000000
4/4/2012	6:00:32 PM	H2 MFC set to  0.000000
4/4/2012	6:00:32 PM	BCl3 MFC set to  0.000000
4/4/2012	6:00:32 PM	PH3 MFC set to  0.000000
4/4/2012	6:00:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:00:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:00:32 PM	Tube furnace set to 0
4/4/2012	6:01:02 PM	Helium valve closed
4/4/2012	6:01:02 PM	H2 valve closed
4/4/2012	6:01:02 PM	BCl3 valve closed
4/4/2012	6:01:02 PM	PH3 valve closed
4/4/2012	6:01:02 PM	SiCl4 pre valve closed
4/4/2012	6:01:02 PM	SiCl4 post valve closed
4/4/2012	6:01:02 PM	Bypass valve closed
4/4/2012	6:01:02 PM	Bubbler valve closed
4/4/2012	6:01:02 PM	Main Vac valve opened
4/4/2012	6:01:02 PM	Helium MFC set to  0.000000
4/4/2012	6:01:02 PM	H2 MFC set to  0.000000
4/4/2012	6:01:02 PM	BCl3 MFC set to  0.000000
4/4/2012	6:01:02 PM	PH3 MFC set to  0.000000
4/4/2012	6:01:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:01:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:01:02 PM	Tube furnace set to 0
4/4/2012	6:01:32 PM	H2 valve closed
4/4/2012	6:01:32 PM	BCl3 valve closed
4/4/2012	6:01:32 PM	PH3 valve closed
4/4/2012	6:01:32 PM	SiCl4 pre valve closed
4/4/2012	6:01:32 PM	SiCl4 post valve closed
4/4/2012	6:01:32 PM	Bypass valve closed
4/4/2012	6:01:32 PM	Bubbler valve closed
4/4/2012	6:01:32 PM	Helium valve opened
4/4/2012	6:01:32 PM	Main Vac valve opened
4/4/2012	6:01:32 PM	Helium MFC set to  20.000000
4/4/2012	6:01:32 PM	H2 MFC set to  0.000000
4/4/2012	6:01:32 PM	BCl3 MFC set to  0.000000
4/4/2012	6:01:32 PM	PH3 MFC set to  0.000000
4/4/2012	6:01:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:01:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:01:33 PM	Tube furnace set to 0
4/4/2012	6:02:03 PM	Helium valve closed
4/4/2012	6:02:03 PM	H2 valve closed
4/4/2012	6:02:03 PM	BCl3 valve closed
4/4/2012	6:02:03 PM	PH3 valve closed
4/4/2012	6:02:03 PM	SiCl4 pre valve closed
4/4/2012	6:02:03 PM	SiCl4 post valve closed
4/4/2012	6:02:03 PM	Bypass valve closed
4/4/2012	6:02:03 PM	Bubbler valve closed
4/4/2012	6:02:03 PM	Main Vac valve opened
4/4/2012	6:02:03 PM	Helium MFC set to  0.000000
4/4/2012	6:02:03 PM	H2 MFC set to  0.000000
4/4/2012	6:02:03 PM	BCl3 MFC set to  0.000000
4/4/2012	6:02:03 PM	PH3 MFC set to  0.000000
4/4/2012	6:02:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:02:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:02:03 PM	Tube furnace set to 0
4/4/2012	6:02:33 PM	H2 valve closed
4/4/2012	6:02:33 PM	BCl3 valve closed
4/4/2012	6:02:33 PM	PH3 valve closed
4/4/2012	6:02:33 PM	SiCl4 pre valve closed
4/4/2012	6:02:33 PM	SiCl4 post valve closed
4/4/2012	6:02:33 PM	Bypass valve closed
4/4/2012	6:02:33 PM	Bubbler valve closed
4/4/2012	6:02:33 PM	Helium valve opened
4/4/2012	6:02:33 PM	Main Vac valve opened
4/4/2012	6:02:33 PM	Helium MFC set to  20.000000
4/4/2012	6:02:33 PM	H2 MFC set to  0.000000
4/4/2012	6:02:33 PM	BCl3 MFC set to  0.000000
4/4/2012	6:02:33 PM	PH3 MFC set to  0.000000
4/4/2012	6:02:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:02:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:02:33 PM	Tube furnace set to 0
4/4/2012	6:03:03 PM	Helium valve closed
4/4/2012	6:03:03 PM	H2 valve closed
4/4/2012	6:03:03 PM	BCl3 valve closed
4/4/2012	6:03:03 PM	PH3 valve closed
4/4/2012	6:03:03 PM	SiCl4 pre valve closed
4/4/2012	6:03:03 PM	SiCl4 post valve closed
4/4/2012	6:03:03 PM	Bypass valve closed
4/4/2012	6:03:03 PM	Bubbler valve closed
4/4/2012	6:03:03 PM	Main Vac valve opened
4/4/2012	6:03:03 PM	Helium MFC set to  0.000000
4/4/2012	6:03:03 PM	H2 MFC set to  0.000000
4/4/2012	6:03:03 PM	BCl3 MFC set to  0.000000
4/4/2012	6:03:03 PM	PH3 MFC set to  0.000000
4/4/2012	6:03:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:03:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:03:03 PM	Tube furnace set to 0
4/4/2012	6:03:33 PM	H2 valve closed
4/4/2012	6:03:33 PM	BCl3 valve closed
4/4/2012	6:03:33 PM	PH3 valve closed
4/4/2012	6:03:33 PM	SiCl4 pre valve closed
4/4/2012	6:03:33 PM	SiCl4 post valve closed
4/4/2012	6:03:33 PM	Bypass valve closed
4/4/2012	6:03:33 PM	Bubbler valve closed
4/4/2012	6:03:33 PM	Helium valve opened
4/4/2012	6:03:33 PM	Main Vac valve opened
4/4/2012	6:03:33 PM	Helium MFC set to  20.000000
4/4/2012	6:03:33 PM	H2 MFC set to  0.000000
4/4/2012	6:03:33 PM	BCl3 MFC set to  0.000000
4/4/2012	6:03:33 PM	PH3 MFC set to  0.000000
4/4/2012	6:03:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:03:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:03:34 PM	Tube furnace set to 0
4/4/2012	6:04:04 PM	Helium valve closed
4/4/2012	6:04:04 PM	H2 valve closed
4/4/2012	6:04:04 PM	BCl3 valve closed
4/4/2012	6:04:04 PM	PH3 valve closed
4/4/2012	6:04:04 PM	SiCl4 pre valve closed
4/4/2012	6:04:04 PM	SiCl4 post valve closed
4/4/2012	6:04:04 PM	Bypass valve closed
4/4/2012	6:04:04 PM	Bubbler valve closed
4/4/2012	6:04:04 PM	Main Vac valve opened
4/4/2012	6:04:04 PM	Helium MFC set to  0.000000
4/4/2012	6:04:04 PM	H2 MFC set to  0.000000
4/4/2012	6:04:04 PM	BCl3 MFC set to  0.000000
4/4/2012	6:04:04 PM	PH3 MFC set to  0.000000
4/4/2012	6:04:04 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:04:04 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:04:04 PM	Tube furnace set to 0
4/4/2012	6:04:34 PM	H2 valve closed
4/4/2012	6:04:34 PM	BCl3 valve closed
4/4/2012	6:04:34 PM	PH3 valve closed
4/4/2012	6:04:34 PM	SiCl4 pre valve closed
4/4/2012	6:04:34 PM	SiCl4 post valve closed
4/4/2012	6:04:34 PM	Bypass valve closed
4/4/2012	6:04:34 PM	Bubbler valve closed
4/4/2012	6:04:34 PM	Helium valve opened
4/4/2012	6:04:34 PM	Main Vac valve opened
4/4/2012	6:04:34 PM	Helium MFC set to  20.000000
4/4/2012	6:04:34 PM	H2 MFC set to  0.000000
4/4/2012	6:04:34 PM	BCl3 MFC set to  0.000000
4/4/2012	6:04:34 PM	PH3 MFC set to  0.000000
4/4/2012	6:04:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:04:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:04:34 PM	Tube furnace set to 0
4/4/2012	6:05:04 PM	Helium valve closed
4/4/2012	6:05:04 PM	H2 valve closed
4/4/2012	6:05:04 PM	BCl3 valve closed
4/4/2012	6:05:04 PM	PH3 valve closed
4/4/2012	6:05:04 PM	SiCl4 pre valve closed
4/4/2012	6:05:04 PM	SiCl4 post valve closed
4/4/2012	6:05:04 PM	Bypass valve closed
4/4/2012	6:05:04 PM	Bubbler valve closed
4/4/2012	6:05:04 PM	Main Vac valve opened
4/4/2012	6:05:04 PM	Helium MFC set to  0.000000
4/4/2012	6:05:04 PM	H2 MFC set to  0.000000
4/4/2012	6:05:04 PM	BCl3 MFC set to  0.000000
4/4/2012	6:05:04 PM	PH3 MFC set to  0.000000
4/4/2012	6:05:04 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:05:04 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:05:04 PM	Tube furnace set to 0
4/4/2012	6:05:34 PM	H2 valve closed
4/4/2012	6:05:34 PM	BCl3 valve closed
4/4/2012	6:05:34 PM	PH3 valve closed
4/4/2012	6:05:34 PM	SiCl4 pre valve closed
4/4/2012	6:05:34 PM	SiCl4 post valve closed
4/4/2012	6:05:34 PM	Bypass valve closed
4/4/2012	6:05:34 PM	Bubbler valve closed
4/4/2012	6:05:34 PM	Helium valve opened
4/4/2012	6:05:34 PM	Main Vac valve opened
4/4/2012	6:05:34 PM	Helium MFC set to  20.000000
4/4/2012	6:05:34 PM	H2 MFC set to  0.000000
4/4/2012	6:05:34 PM	BCl3 MFC set to  0.000000
4/4/2012	6:05:34 PM	PH3 MFC set to  0.000000
4/4/2012	6:05:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:05:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:05:34 PM	Tube furnace set to 0
4/4/2012	6:06:04 PM	Helium valve closed
4/4/2012	6:06:04 PM	H2 valve closed
4/4/2012	6:06:04 PM	BCl3 valve closed
4/4/2012	6:06:04 PM	PH3 valve closed
4/4/2012	6:06:04 PM	SiCl4 pre valve closed
4/4/2012	6:06:04 PM	SiCl4 post valve closed
4/4/2012	6:06:05 PM	Bypass valve closed
4/4/2012	6:06:05 PM	Bubbler valve closed
4/4/2012	6:06:05 PM	Main Vac valve opened
4/4/2012	6:06:05 PM	Helium MFC set to  0.000000
4/4/2012	6:06:05 PM	H2 MFC set to  0.000000
4/4/2012	6:06:05 PM	BCl3 MFC set to  0.000000
4/4/2012	6:06:05 PM	PH3 MFC set to  0.000000
4/4/2012	6:06:05 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:06:05 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:06:05 PM	Tube furnace set to 0
4/4/2012	6:06:35 PM	H2 valve closed
4/4/2012	6:06:35 PM	BCl3 valve closed
4/4/2012	6:06:35 PM	PH3 valve closed
4/4/2012	6:06:35 PM	SiCl4 pre valve closed
4/4/2012	6:06:35 PM	SiCl4 post valve closed
4/4/2012	6:06:35 PM	Bypass valve closed
4/4/2012	6:06:35 PM	Bubbler valve closed
4/4/2012	6:06:35 PM	Helium valve opened
4/4/2012	6:06:35 PM	Main Vac valve opened
4/4/2012	6:06:35 PM	Helium MFC set to  20.000000
4/4/2012	6:06:35 PM	H2 MFC set to  0.000000
4/4/2012	6:06:35 PM	BCl3 MFC set to  0.000000
4/4/2012	6:06:35 PM	PH3 MFC set to  0.000000
4/4/2012	6:06:35 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:06:35 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:06:35 PM	Tube furnace set to 0
4/4/2012	6:07:05 PM	Helium valve closed
4/4/2012	6:07:05 PM	H2 valve closed
4/4/2012	6:07:05 PM	BCl3 valve closed
4/4/2012	6:07:05 PM	PH3 valve closed
4/4/2012	6:07:05 PM	SiCl4 pre valve closed
4/4/2012	6:07:05 PM	SiCl4 post valve closed
4/4/2012	6:07:05 PM	Bypass valve closed
4/4/2012	6:07:05 PM	Bubbler valve closed
4/4/2012	6:07:05 PM	Main Vac valve opened
4/4/2012	6:07:05 PM	Helium MFC set to  0.000000
4/4/2012	6:07:05 PM	H2 MFC set to  0.000000
4/4/2012	6:07:05 PM	BCl3 MFC set to  0.000000
4/4/2012	6:07:05 PM	PH3 MFC set to  0.000000
4/4/2012	6:07:05 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:07:05 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:07:05 PM	Tube furnace set to 200
4/4/2012	6:07:35 PM	H2 valve closed
4/4/2012	6:07:35 PM	BCl3 valve closed
4/4/2012	6:07:35 PM	PH3 valve closed
4/4/2012	6:07:35 PM	SiCl4 pre valve closed
4/4/2012	6:07:35 PM	SiCl4 post valve closed
4/4/2012	6:07:35 PM	Bypass valve closed
4/4/2012	6:07:35 PM	Bubbler valve closed
4/4/2012	6:07:35 PM	Helium valve opened
4/4/2012	6:07:35 PM	Main Vac valve opened
4/4/2012	6:07:35 PM	Helium MFC set to  20.000000
4/4/2012	6:07:35 PM	H2 MFC set to  0.000000
4/4/2012	6:07:35 PM	BCl3 MFC set to  0.000000
4/4/2012	6:07:35 PM	PH3 MFC set to  0.000000
4/4/2012	6:07:35 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:07:35 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:07:35 PM	Tube furnace set to 200
4/4/2012	6:08:05 PM	Helium valve closed
4/4/2012	6:08:05 PM	H2 valve closed
4/4/2012	6:08:05 PM	BCl3 valve closed
4/4/2012	6:08:05 PM	PH3 valve closed
4/4/2012	6:08:05 PM	SiCl4 pre valve closed
4/4/2012	6:08:05 PM	SiCl4 post valve closed
4/4/2012	6:08:05 PM	Bypass valve closed
4/4/2012	6:08:05 PM	Bubbler valve closed
4/4/2012	6:08:05 PM	Main Vac valve opened
4/4/2012	6:08:05 PM	Helium MFC set to  0.000000
4/4/2012	6:08:05 PM	H2 MFC set to  0.000000
4/4/2012	6:08:05 PM	BCl3 MFC set to  0.000000
4/4/2012	6:08:05 PM	PH3 MFC set to  0.000000
4/4/2012	6:08:05 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:08:05 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:08:06 PM	Tube furnace set to 200
4/4/2012	6:08:36 PM	H2 valve closed
4/4/2012	6:08:36 PM	BCl3 valve closed
4/4/2012	6:08:36 PM	PH3 valve closed
4/4/2012	6:08:36 PM	SiCl4 pre valve closed
4/4/2012	6:08:36 PM	SiCl4 post valve closed
4/4/2012	6:08:36 PM	Bypass valve closed
4/4/2012	6:08:36 PM	Bubbler valve closed
4/4/2012	6:08:36 PM	Helium valve opened
4/4/2012	6:08:36 PM	Main Vac valve opened
4/4/2012	6:08:36 PM	Helium MFC set to  20.000000
4/4/2012	6:08:36 PM	H2 MFC set to  0.000000
4/4/2012	6:08:36 PM	BCl3 MFC set to  0.000000
4/4/2012	6:08:36 PM	PH3 MFC set to  0.000000
4/4/2012	6:08:36 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:08:36 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:08:36 PM	Tube furnace set to 200
4/4/2012	6:09:06 PM	Helium valve closed
4/4/2012	6:09:06 PM	H2 valve closed
4/4/2012	6:09:06 PM	BCl3 valve closed
4/4/2012	6:09:06 PM	PH3 valve closed
4/4/2012	6:09:06 PM	SiCl4 pre valve closed
4/4/2012	6:09:06 PM	SiCl4 post valve closed
4/4/2012	6:09:06 PM	Bypass valve closed
4/4/2012	6:09:06 PM	Bubbler valve closed
4/4/2012	6:09:06 PM	Main Vac valve opened
4/4/2012	6:09:06 PM	Helium MFC set to  0.000000
4/4/2012	6:09:06 PM	H2 MFC set to  0.000000
4/4/2012	6:09:06 PM	BCl3 MFC set to  0.000000
4/4/2012	6:09:06 PM	PH3 MFC set to  0.000000
4/4/2012	6:09:06 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:09:06 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:09:06 PM	Tube furnace set to 200
4/4/2012	6:09:36 PM	H2 valve closed
4/4/2012	6:09:36 PM	BCl3 valve closed
4/4/2012	6:09:36 PM	PH3 valve closed
4/4/2012	6:09:36 PM	SiCl4 pre valve closed
4/4/2012	6:09:36 PM	SiCl4 post valve closed
4/4/2012	6:09:36 PM	Bypass valve closed
4/4/2012	6:09:36 PM	Bubbler valve closed
4/4/2012	6:09:36 PM	Helium valve opened
4/4/2012	6:09:36 PM	Main Vac valve opened
4/4/2012	6:09:36 PM	Helium MFC set to  20.000000
4/4/2012	6:09:36 PM	H2 MFC set to  0.000000
4/4/2012	6:09:36 PM	BCl3 MFC set to  0.000000
4/4/2012	6:09:36 PM	PH3 MFC set to  0.000000
4/4/2012	6:09:36 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:09:36 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:09:36 PM	Tube furnace set to 200
4/4/2012	6:10:06 PM	Helium valve closed
4/4/2012	6:10:06 PM	H2 valve closed
4/4/2012	6:10:06 PM	BCl3 valve closed
4/4/2012	6:10:06 PM	PH3 valve closed
4/4/2012	6:10:06 PM	SiCl4 pre valve closed
4/4/2012	6:10:06 PM	SiCl4 post valve closed
4/4/2012	6:10:06 PM	Bypass valve closed
4/4/2012	6:10:06 PM	Bubbler valve closed
4/4/2012	6:10:06 PM	Main Vac valve opened
4/4/2012	6:10:06 PM	Helium MFC set to  0.000000
4/4/2012	6:10:06 PM	H2 MFC set to  0.000000
4/4/2012	6:10:06 PM	BCl3 MFC set to  0.000000
4/4/2012	6:10:06 PM	PH3 MFC set to  0.000000
4/4/2012	6:10:06 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:10:06 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:10:07 PM	Tube furnace set to 200
4/4/2012	6:10:37 PM	H2 valve closed
4/4/2012	6:10:37 PM	BCl3 valve closed
4/4/2012	6:10:37 PM	PH3 valve closed
4/4/2012	6:10:37 PM	SiCl4 pre valve closed
4/4/2012	6:10:37 PM	SiCl4 post valve closed
4/4/2012	6:10:37 PM	Bypass valve closed
4/4/2012	6:10:37 PM	Bubbler valve closed
4/4/2012	6:10:37 PM	Helium valve opened
4/4/2012	6:10:37 PM	Main Vac valve opened
4/4/2012	6:10:37 PM	Helium MFC set to  20.000000
4/4/2012	6:10:37 PM	H2 MFC set to  0.000000
4/4/2012	6:10:37 PM	BCl3 MFC set to  0.000000
4/4/2012	6:10:37 PM	PH3 MFC set to  0.000000
4/4/2012	6:10:37 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:10:37 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:10:37 PM	Tube furnace set to 200
4/4/2012	6:11:07 PM	Helium valve closed
4/4/2012	6:11:07 PM	H2 valve closed
4/4/2012	6:11:07 PM	BCl3 valve closed
4/4/2012	6:11:07 PM	PH3 valve closed
4/4/2012	6:11:07 PM	SiCl4 pre valve closed
4/4/2012	6:11:07 PM	SiCl4 post valve closed
4/4/2012	6:11:07 PM	Bypass valve closed
4/4/2012	6:11:07 PM	Bubbler valve closed
4/4/2012	6:11:07 PM	Main Vac valve opened
4/4/2012	6:11:07 PM	Helium MFC set to  0.000000
4/4/2012	6:11:07 PM	H2 MFC set to  0.000000
4/4/2012	6:11:07 PM	BCl3 MFC set to  0.000000
4/4/2012	6:11:07 PM	PH3 MFC set to  0.000000
4/4/2012	6:11:07 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:11:07 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:11:07 PM	Tube furnace set to 200
4/4/2012	6:11:37 PM	H2 valve closed
4/4/2012	6:11:37 PM	BCl3 valve closed
4/4/2012	6:11:37 PM	PH3 valve closed
4/4/2012	6:11:37 PM	SiCl4 pre valve closed
4/4/2012	6:11:37 PM	SiCl4 post valve closed
4/4/2012	6:11:37 PM	Bypass valve closed
4/4/2012	6:11:37 PM	Bubbler valve closed
4/4/2012	6:11:37 PM	Helium valve opened
4/4/2012	6:11:37 PM	Main Vac valve opened
4/4/2012	6:11:37 PM	Helium MFC set to  20.000000
4/4/2012	6:11:37 PM	H2 MFC set to  0.000000
4/4/2012	6:11:37 PM	BCl3 MFC set to  0.000000
4/4/2012	6:11:37 PM	PH3 MFC set to  0.000000
4/4/2012	6:11:37 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:11:37 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:11:37 PM	Tube furnace set to 200
4/4/2012	6:12:07 PM	Helium valve closed
4/4/2012	6:12:07 PM	H2 valve closed
4/4/2012	6:12:07 PM	BCl3 valve closed
4/4/2012	6:12:07 PM	PH3 valve closed
4/4/2012	6:12:07 PM	SiCl4 pre valve closed
4/4/2012	6:12:07 PM	SiCl4 post valve closed
4/4/2012	6:12:07 PM	Bypass valve closed
4/4/2012	6:12:07 PM	Bubbler valve closed
4/4/2012	6:12:07 PM	Main Vac valve opened
4/4/2012	6:12:07 PM	Helium MFC set to  0.000000
4/4/2012	6:12:07 PM	H2 MFC set to  0.000000
4/4/2012	6:12:07 PM	BCl3 MFC set to  0.000000
4/4/2012	6:12:07 PM	PH3 MFC set to  0.000000
4/4/2012	6:12:07 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:12:07 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:12:07 PM	Tube furnace set to 200
4/4/2012	6:12:38 PM	H2 valve closed
4/4/2012	6:12:38 PM	BCl3 valve closed
4/4/2012	6:12:38 PM	PH3 valve closed
4/4/2012	6:12:38 PM	SiCl4 pre valve closed
4/4/2012	6:12:38 PM	SiCl4 post valve closed
4/4/2012	6:12:38 PM	Bypass valve closed
4/4/2012	6:12:38 PM	Bubbler valve closed
4/4/2012	6:12:38 PM	Helium valve opened
4/4/2012	6:12:38 PM	Main Vac valve opened
4/4/2012	6:12:38 PM	Helium MFC set to  20.000000
4/4/2012	6:12:38 PM	H2 MFC set to  0.000000
4/4/2012	6:12:38 PM	BCl3 MFC set to  0.000000
4/4/2012	6:12:38 PM	PH3 MFC set to  0.000000
4/4/2012	6:12:38 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:12:38 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:12:38 PM	Tube furnace set to 200
4/4/2012	6:13:08 PM	Helium valve closed
4/4/2012	6:13:08 PM	H2 valve closed
4/4/2012	6:13:08 PM	BCl3 valve closed
4/4/2012	6:13:08 PM	PH3 valve closed
4/4/2012	6:13:08 PM	SiCl4 pre valve closed
4/4/2012	6:13:08 PM	SiCl4 post valve closed
4/4/2012	6:13:08 PM	Bypass valve closed
4/4/2012	6:13:08 PM	Bubbler valve closed
4/4/2012	6:13:08 PM	Main Vac valve opened
4/4/2012	6:13:08 PM	Helium MFC set to  0.000000
4/4/2012	6:13:08 PM	H2 MFC set to  0.000000
4/4/2012	6:13:08 PM	BCl3 MFC set to  0.000000
4/4/2012	6:13:08 PM	PH3 MFC set to  0.000000
4/4/2012	6:13:08 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:13:08 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:13:08 PM	Tube furnace set to 0
4/4/2012	6:13:09 PM	Run finished at 6:13 PM
4/4/2012	6:18:50 PM	Main Vac valve closed
4/4/2012	6:18:59 PM	Main Vac valve opened
4/4/2012	6:27:59 PM	Recipe started at 6:27 PM
4/4/2012	6:27:59 PM	Helium valve closed
4/4/2012	6:27:59 PM	H2 valve closed
4/4/2012	6:27:59 PM	BCl3 valve closed
4/4/2012	6:27:59 PM	PH3 valve closed
4/4/2012	6:27:59 PM	SiCl4 pre valve closed
4/4/2012	6:27:59 PM	SiCl4 post valve closed
4/4/2012	6:27:59 PM	Main Vac valve closed
4/4/2012	6:27:59 PM	Bypass valve closed
4/4/2012	6:27:59 PM	Bubbler valve closed
4/4/2012	6:27:59 PM	Helium MFC set to  0.000000
4/4/2012	6:27:59 PM	H2 MFC set to  0.000000
4/4/2012	6:27:59 PM	BCl3 MFC set to  0.000000
4/4/2012	6:27:59 PM	PH3 MFC set to  0.000000
4/4/2012	6:27:59 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:27:59 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:27:59 PM	Tube furnace set to 0
4/4/2012	6:28:02 PM	Helium valve closed
4/4/2012	6:28:02 PM	BCl3 valve closed
4/4/2012	6:28:02 PM	PH3 valve closed
4/4/2012	6:28:02 PM	SiCl4 pre valve closed
4/4/2012	6:28:02 PM	SiCl4 post valve closed
4/4/2012	6:28:02 PM	Main Vac valve closed
4/4/2012	6:28:02 PM	Bypass valve closed
4/4/2012	6:28:02 PM	Bubbler valve closed
4/4/2012	6:28:02 PM	H2 valve opened
4/4/2012	6:28:02 PM	Helium MFC set to  0.000000
4/4/2012	6:28:02 PM	H2 MFC set to  500.000000
4/4/2012	6:28:02 PM	BCl3 MFC set to  0.000000
4/4/2012	6:28:02 PM	PH3 MFC set to  0.000000
4/4/2012	6:28:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:28:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:28:03 PM	Tube furnace set to 0
4/4/2012	6:29:07 PM	Helium valve closed
4/4/2012	6:29:07 PM	BCl3 valve closed
4/4/2012	6:29:07 PM	PH3 valve closed
4/4/2012	6:29:07 PM	SiCl4 pre valve closed
4/4/2012	6:29:07 PM	SiCl4 post valve closed
4/4/2012	6:29:07 PM	Main Vac valve closed
4/4/2012	6:29:07 PM	Bypass valve closed
4/4/2012	6:29:07 PM	H2 valve opened
4/4/2012	6:29:07 PM	Bubbler valve opened
4/4/2012	6:29:07 PM	Helium MFC set to  0.000000
4/4/2012	6:29:07 PM	H2 MFC set to  500.000000
4/4/2012	6:29:07 PM	BCl3 MFC set to  0.000000
4/4/2012	6:29:07 PM	PH3 MFC set to  0.000000
4/4/2012	6:29:07 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:29:07 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:29:07 PM	Tube furnace set to 0
4/4/2012	6:29:08 PM	Helium valve closed
4/4/2012	6:29:08 PM	BCl3 valve closed
4/4/2012	6:29:08 PM	PH3 valve closed
4/4/2012	6:29:08 PM	SiCl4 pre valve closed
4/4/2012	6:29:08 PM	SiCl4 post valve closed
4/4/2012	6:29:08 PM	Main Vac valve closed
4/4/2012	6:29:08 PM	Bypass valve closed
4/4/2012	6:29:08 PM	H2 valve opened
4/4/2012	6:29:08 PM	Bubbler valve opened
4/4/2012	6:29:08 PM	Helium MFC set to  0.000000
4/4/2012	6:29:08 PM	H2 MFC set to  500.000000
4/4/2012	6:29:08 PM	BCl3 MFC set to  0.000000
4/4/2012	6:29:08 PM	PH3 MFC set to  0.000000
4/4/2012	6:29:08 PM	SiCl4 MFC set to  0.000000
4/4/2012	6:29:08 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:29:08 PM	Tube furnace set to 1000
4/4/2012	6:49:08 PM	Helium valve closed
4/4/2012	6:49:08 PM	PH3 valve closed
4/4/2012	6:49:08 PM	Main Vac valve closed
4/4/2012	6:49:08 PM	Bypass valve closed
4/4/2012	6:49:08 PM	H2 valve opened
4/4/2012	6:49:08 PM	BCl3 valve opened
4/4/2012	6:49:08 PM	SiCl4 pre valve opened
4/4/2012	6:49:08 PM	SiCl4 post valve opened
4/4/2012	6:49:08 PM	Bubbler valve opened
4/4/2012	6:49:08 PM	Helium MFC set to  0.000000
4/4/2012	6:49:08 PM	H2 MFC set to  450.000000
4/4/2012	6:49:08 PM	BCl3 MFC set to  1.500000
4/4/2012	6:49:08 PM	PH3 MFC set to  0.000000
4/4/2012	6:49:08 PM	SiCl4 MFC set to  50.000000
4/4/2012	6:49:08 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	6:49:08 PM	Tube furnace set to 1000
4/4/2012	7:06:08 PM	Helium valve closed
4/4/2012	7:06:08 PM	BCl3 valve closed
4/4/2012	7:06:08 PM	PH3 valve closed
4/4/2012	7:06:08 PM	SiCl4 pre valve closed
4/4/2012	7:06:08 PM	SiCl4 post valve closed
4/4/2012	7:06:08 PM	Main Vac valve closed
4/4/2012	7:06:08 PM	Bypass valve closed
4/4/2012	7:06:08 PM	H2 valve opened
4/4/2012	7:06:08 PM	Bubbler valve opened
4/4/2012	7:06:08 PM	Helium MFC set to  0.000000
4/4/2012	7:06:08 PM	H2 MFC set to  500.000000
4/4/2012	7:06:08 PM	BCl3 MFC set to  0.000000
4/4/2012	7:06:08 PM	PH3 MFC set to  0.000000
4/4/2012	7:06:08 PM	SiCl4 MFC set to  0.000000
4/4/2012	7:06:08 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	7:06:09 PM	Tube furnace set to 950
4/4/2012	7:08:09 PM	Helium valve closed
4/4/2012	7:08:09 PM	BCl3 valve closed
4/4/2012	7:08:09 PM	PH3 valve closed
4/4/2012	7:08:09 PM	SiCl4 pre valve closed
4/4/2012	7:08:09 PM	SiCl4 post valve closed
4/4/2012	7:08:09 PM	Main Vac valve closed
4/4/2012	7:08:09 PM	Bypass valve closed
4/4/2012	7:08:09 PM	H2 valve opened
4/4/2012	7:08:09 PM	Bubbler valve opened
4/4/2012	7:08:09 PM	Helium MFC set to  0.000000
4/4/2012	7:08:09 PM	H2 MFC set to  500.000000
4/4/2012	7:08:09 PM	BCl3 MFC set to  0.000000
4/4/2012	7:08:09 PM	PH3 MFC set to  0.000000
4/4/2012	7:08:09 PM	SiCl4 MFC set to  0.000000
4/4/2012	7:08:09 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	7:08:09 PM	Tube furnace set to 900
4/4/2012	7:10:09 PM	Helium valve closed
4/4/2012	7:10:09 PM	BCl3 valve closed
4/4/2012	7:10:09 PM	PH3 valve closed
4/4/2012	7:10:09 PM	SiCl4 pre valve closed
4/4/2012	7:10:09 PM	SiCl4 post valve closed
4/4/2012	7:10:09 PM	Main Vac valve closed
4/4/2012	7:10:09 PM	Bypass valve closed
4/4/2012	7:10:09 PM	H2 valve opened
4/4/2012	7:10:09 PM	Bubbler valve opened
4/4/2012	7:10:09 PM	Helium MFC set to  0.000000
4/4/2012	7:10:09 PM	H2 MFC set to  500.000000
4/4/2012	7:10:09 PM	BCl3 MFC set to  0.000000
4/4/2012	7:10:09 PM	PH3 MFC set to  0.000000
4/4/2012	7:10:09 PM	SiCl4 MFC set to  0.000000
4/4/2012	7:10:09 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	7:10:09 PM	Tube furnace set to 850
4/4/2012	7:12:09 PM	H2 valve closed
4/4/2012	7:12:09 PM	BCl3 valve closed
4/4/2012	7:12:09 PM	PH3 valve closed
4/4/2012	7:12:09 PM	SiCl4 pre valve closed
4/4/2012	7:12:09 PM	SiCl4 post valve closed
4/4/2012	7:12:09 PM	Main Vac valve closed
4/4/2012	7:12:09 PM	Bypass valve closed
4/4/2012	7:12:09 PM	Helium valve opened
4/4/2012	7:12:09 PM	Bubbler valve opened
4/4/2012	7:12:09 PM	Helium MFC set to  500.000000
4/4/2012	7:12:09 PM	H2 MFC set to  0.000000
4/4/2012	7:12:09 PM	BCl3 MFC set to  0.000000
4/4/2012	7:12:09 PM	PH3 MFC set to  0.000000
4/4/2012	7:12:09 PM	SiCl4 MFC set to  0.000000
4/4/2012	7:12:09 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	7:12:09 PM	Tube furnace set to 800
4/4/2012	7:14:09 PM	H2 valve closed
4/4/2012	7:14:09 PM	BCl3 valve closed
4/4/2012	7:14:09 PM	PH3 valve closed
4/4/2012	7:14:09 PM	SiCl4 pre valve closed
4/4/2012	7:14:09 PM	SiCl4 post valve closed
4/4/2012	7:14:09 PM	Main Vac valve closed
4/4/2012	7:14:09 PM	Bypass valve closed
4/4/2012	7:14:09 PM	Helium valve opened
4/4/2012	7:14:09 PM	Bubbler valve opened
4/4/2012	7:14:09 PM	Helium MFC set to  500.000000
4/4/2012	7:14:09 PM	H2 MFC set to  0.000000
4/4/2012	7:14:09 PM	BCl3 MFC set to  0.000000
4/4/2012	7:14:09 PM	PH3 MFC set to  0.000000
4/4/2012	7:14:09 PM	SiCl4 MFC set to  0.000000
4/4/2012	7:14:09 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	7:14:10 PM	Tube furnace set to 750
4/4/2012	7:16:10 PM	H2 valve closed
4/4/2012	7:16:10 PM	BCl3 valve closed
4/4/2012	7:16:10 PM	PH3 valve closed
4/4/2012	7:16:10 PM	SiCl4 pre valve closed
4/4/2012	7:16:10 PM	SiCl4 post valve closed
4/4/2012	7:16:10 PM	Main Vac valve closed
4/4/2012	7:16:10 PM	Bypass valve closed
4/4/2012	7:16:10 PM	Helium valve opened
4/4/2012	7:16:10 PM	Bubbler valve opened
4/4/2012	7:16:10 PM	Helium MFC set to  500.000000
4/4/2012	7:16:10 PM	H2 MFC set to  0.000000
4/4/2012	7:16:10 PM	BCl3 MFC set to  0.000000
4/4/2012	7:16:10 PM	PH3 MFC set to  0.000000
4/4/2012	7:16:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	7:16:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	7:16:10 PM	Tube furnace set to 0
4/4/2012	7:36:10 PM	Helium valve closed
4/4/2012	7:36:10 PM	H2 valve closed
4/4/2012	7:36:10 PM	BCl3 valve closed
4/4/2012	7:36:10 PM	PH3 valve closed
4/4/2012	7:36:10 PM	SiCl4 pre valve closed
4/4/2012	7:36:10 PM	SiCl4 post valve closed
4/4/2012	7:36:10 PM	Main Vac valve closed
4/4/2012	7:36:10 PM	Bypass valve closed
4/4/2012	7:36:10 PM	Bubbler valve closed
4/4/2012	7:36:10 PM	Helium MFC set to  0.000000
4/4/2012	7:36:10 PM	H2 MFC set to  0.000000
4/4/2012	7:36:10 PM	BCl3 MFC set to  0.000000
4/4/2012	7:36:10 PM	PH3 MFC set to  0.000000
4/4/2012	7:36:10 PM	SiCl4 MFC set to  0.000000
4/4/2012	7:36:10 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	7:36:10 PM	Tube furnace set to 0
4/4/2012	7:36:11 PM	Run finished at 7:36 PM
4/4/2012	8:14:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	8:14:15 PM	Recipe started at 8:14 PM
4/4/2012	8:14:15 PM	Helium valve closed
4/4/2012	8:14:15 PM	H2 valve closed
4/4/2012	8:14:15 PM	BCl3 valve closed
4/4/2012	8:14:15 PM	PH3 valve closed
4/4/2012	8:14:15 PM	SiCl4 pre valve closed
4/4/2012	8:14:15 PM	SiCl4 post valve closed
4/4/2012	8:14:15 PM	Main Vac valve closed
4/4/2012	8:14:15 PM	Bypass valve closed
4/4/2012	8:14:15 PM	Bubbler valve closed
4/4/2012	8:14:15 PM	Helium MFC set to  0.000000
4/4/2012	8:14:15 PM	H2 MFC set to  0.000000
4/4/2012	8:14:15 PM	BCl3 MFC set to  0.000000
4/4/2012	8:14:15 PM	PH3 MFC set to  0.000000
4/4/2012	8:14:15 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:14:15 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:14:15 PM	Tube furnace set to 0
4/4/2012	8:14:18 PM	H2 valve closed
4/4/2012	8:14:18 PM	BCl3 valve closed
4/4/2012	8:14:18 PM	PH3 valve closed
4/4/2012	8:14:18 PM	SiCl4 pre valve closed
4/4/2012	8:14:18 PM	SiCl4 post valve closed
4/4/2012	8:14:18 PM	Main Vac valve closed
4/4/2012	8:14:18 PM	Bypass valve closed
4/4/2012	8:14:18 PM	Bubbler valve closed
4/4/2012	8:14:18 PM	Helium valve opened
4/4/2012	8:14:18 PM	Helium MFC set to  500.000000
4/4/2012	8:14:18 PM	H2 MFC set to  0.000000
4/4/2012	8:14:18 PM	BCl3 MFC set to  0.000000
4/4/2012	8:14:18 PM	PH3 MFC set to  0.000000
4/4/2012	8:14:18 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:14:18 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:14:18 PM	Tube furnace set to 0
4/4/2012	8:14:24 PM	Helium valve closed
4/4/2012	8:14:24 PM	H2 valve closed
4/4/2012	8:14:24 PM	BCl3 valve closed
4/4/2012	8:14:24 PM	PH3 valve closed
4/4/2012	8:14:24 PM	SiCl4 pre valve closed
4/4/2012	8:14:24 PM	SiCl4 post valve closed
4/4/2012	8:14:24 PM	Main Vac valve closed
4/4/2012	8:14:24 PM	Bypass valve closed
4/4/2012	8:14:24 PM	Bubbler valve closed
4/4/2012	8:14:24 PM	Helium MFC set to  0.000000
4/4/2012	8:14:24 PM	H2 MFC set to  0.000000
4/4/2012	8:14:24 PM	BCl3 MFC set to  0.000000
4/4/2012	8:14:24 PM	PH3 MFC set to  0.000000
4/4/2012	8:14:24 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:14:24 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:14:24 PM	Tube furnace set to 0
4/4/2012	8:14:25 PM	Run finished at 8:14 PM
4/4/2012	8:14:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	8:16:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	8:16:05 PM	Recipe started at 8:16 PM
4/4/2012	8:16:05 PM	Helium valve closed
4/4/2012	8:16:05 PM	H2 valve closed
4/4/2012	8:16:05 PM	BCl3 valve closed
4/4/2012	8:16:05 PM	PH3 valve closed
4/4/2012	8:16:05 PM	SiCl4 pre valve closed
4/4/2012	8:16:05 PM	SiCl4 post valve closed
4/4/2012	8:16:05 PM	Main Vac valve closed
4/4/2012	8:16:05 PM	Bubbler valve closed
4/4/2012	8:16:05 PM	Bypass valve opened
4/4/2012	8:16:05 PM	Helium MFC set to  0.000000
4/4/2012	8:16:05 PM	H2 MFC set to  0.000000
4/4/2012	8:16:05 PM	BCl3 MFC set to  0.000000
4/4/2012	8:16:05 PM	PH3 MFC set to  0.000000
4/4/2012	8:16:05 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:16:05 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:16:05 PM	Tube furnace set to 0
4/4/2012	8:17:03 PM	Helium valve closed
4/4/2012	8:17:03 PM	H2 valve closed
4/4/2012	8:17:03 PM	BCl3 valve closed
4/4/2012	8:17:03 PM	PH3 valve closed
4/4/2012	8:17:03 PM	SiCl4 pre valve closed
4/4/2012	8:17:03 PM	SiCl4 post valve closed
4/4/2012	8:17:03 PM	Main Vac valve closed
4/4/2012	8:17:03 PM	Bubbler valve closed
4/4/2012	8:17:03 PM	Bypass valve opened
4/4/2012	8:17:03 PM	Helium MFC set to  0.000000
4/4/2012	8:17:03 PM	H2 MFC set to  0.000000
4/4/2012	8:17:03 PM	BCl3 MFC set to  0.000000
4/4/2012	8:17:03 PM	PH3 MFC set to  0.000000
4/4/2012	8:17:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:17:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:17:04 PM	Tube furnace set to 0
4/4/2012	8:18:04 PM	Helium valve closed
4/4/2012	8:18:04 PM	H2 valve closed
4/4/2012	8:18:04 PM	BCl3 valve closed
4/4/2012	8:18:04 PM	PH3 valve closed
4/4/2012	8:18:04 PM	SiCl4 pre valve closed
4/4/2012	8:18:04 PM	SiCl4 post valve closed
4/4/2012	8:18:04 PM	Bypass valve closed
4/4/2012	8:18:04 PM	Bubbler valve closed
4/4/2012	8:18:04 PM	Main Vac valve opened
4/4/2012	8:18:04 PM	Helium MFC set to  0.000000
4/4/2012	8:18:04 PM	H2 MFC set to  0.000000
4/4/2012	8:18:04 PM	BCl3 MFC set to  0.000000
4/4/2012	8:18:04 PM	PH3 MFC set to  0.000000
4/4/2012	8:18:04 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:18:04 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:18:04 PM	Tube furnace set to 0
4/4/2012	8:18:05 PM	Run finished at 8:18 PM
4/4/2012	8:18:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	8:26:56 PM	Recipe started at 8:26 PM
4/4/2012	8:26:56 PM	Helium valve closed
4/4/2012	8:26:56 PM	H2 valve closed
4/4/2012	8:26:56 PM	BCl3 valve closed
4/4/2012	8:26:56 PM	PH3 valve closed
4/4/2012	8:26:56 PM	SiCl4 pre valve closed
4/4/2012	8:26:56 PM	SiCl4 post valve closed
4/4/2012	8:26:56 PM	Bypass valve closed
4/4/2012	8:26:56 PM	Bubbler valve closed
4/4/2012	8:26:56 PM	Main Vac valve opened
4/4/2012	8:26:56 PM	Helium MFC set to  0.000000
4/4/2012	8:26:56 PM	H2 MFC set to  0.000000
4/4/2012	8:26:56 PM	BCl3 MFC set to  0.000000
4/4/2012	8:26:56 PM	PH3 MFC set to  0.000000
4/4/2012	8:26:56 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:26:56 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:26:56 PM	Tube furnace set to 0
4/4/2012	8:27:26 PM	H2 valve closed
4/4/2012	8:27:26 PM	BCl3 valve closed
4/4/2012	8:27:26 PM	PH3 valve closed
4/4/2012	8:27:26 PM	SiCl4 pre valve closed
4/4/2012	8:27:27 PM	SiCl4 post valve closed
4/4/2012	8:27:27 PM	Bypass valve closed
4/4/2012	8:27:27 PM	Bubbler valve closed
4/4/2012	8:27:27 PM	Helium valve opened
4/4/2012	8:27:27 PM	Main Vac valve opened
4/4/2012	8:27:27 PM	Helium MFC set to  20.000000
4/4/2012	8:27:27 PM	H2 MFC set to  0.000000
4/4/2012	8:27:27 PM	BCl3 MFC set to  0.000000
4/4/2012	8:27:27 PM	PH3 MFC set to  0.000000
4/4/2012	8:27:27 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:27:27 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:27:27 PM	Tube furnace set to 0
4/4/2012	8:27:57 PM	Helium valve closed
4/4/2012	8:27:57 PM	H2 valve closed
4/4/2012	8:27:57 PM	BCl3 valve closed
4/4/2012	8:27:57 PM	PH3 valve closed
4/4/2012	8:27:57 PM	SiCl4 pre valve closed
4/4/2012	8:27:57 PM	SiCl4 post valve closed
4/4/2012	8:27:57 PM	Bypass valve closed
4/4/2012	8:27:57 PM	Bubbler valve closed
4/4/2012	8:27:57 PM	Main Vac valve opened
4/4/2012	8:27:57 PM	Helium MFC set to  0.000000
4/4/2012	8:27:57 PM	H2 MFC set to  0.000000
4/4/2012	8:27:57 PM	BCl3 MFC set to  0.000000
4/4/2012	8:27:57 PM	PH3 MFC set to  0.000000
4/4/2012	8:27:57 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:27:57 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:27:57 PM	Tube furnace set to 0
4/4/2012	8:28:27 PM	H2 valve closed
4/4/2012	8:28:27 PM	BCl3 valve closed
4/4/2012	8:28:27 PM	PH3 valve closed
4/4/2012	8:28:27 PM	SiCl4 pre valve closed
4/4/2012	8:28:27 PM	SiCl4 post valve closed
4/4/2012	8:28:27 PM	Bypass valve closed
4/4/2012	8:28:27 PM	Bubbler valve closed
4/4/2012	8:28:27 PM	Helium valve opened
4/4/2012	8:28:27 PM	Main Vac valve opened
4/4/2012	8:28:27 PM	Helium MFC set to  20.000000
4/4/2012	8:28:27 PM	H2 MFC set to  0.000000
4/4/2012	8:28:27 PM	BCl3 MFC set to  0.000000
4/4/2012	8:28:27 PM	PH3 MFC set to  0.000000
4/4/2012	8:28:27 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:28:27 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:28:27 PM	Tube furnace set to 0
4/4/2012	8:28:57 PM	Helium valve closed
4/4/2012	8:28:57 PM	H2 valve closed
4/4/2012	8:28:57 PM	BCl3 valve closed
4/4/2012	8:28:57 PM	PH3 valve closed
4/4/2012	8:28:57 PM	SiCl4 pre valve closed
4/4/2012	8:28:57 PM	SiCl4 post valve closed
4/4/2012	8:28:57 PM	Bypass valve closed
4/4/2012	8:28:57 PM	Bubbler valve closed
4/4/2012	8:28:57 PM	Main Vac valve opened
4/4/2012	8:28:57 PM	Helium MFC set to  0.000000
4/4/2012	8:28:57 PM	H2 MFC set to  0.000000
4/4/2012	8:28:57 PM	BCl3 MFC set to  0.000000
4/4/2012	8:28:57 PM	PH3 MFC set to  0.000000
4/4/2012	8:28:57 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:28:57 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:28:57 PM	Tube furnace set to 0
4/4/2012	8:29:27 PM	H2 valve closed
4/4/2012	8:29:27 PM	BCl3 valve closed
4/4/2012	8:29:27 PM	PH3 valve closed
4/4/2012	8:29:27 PM	SiCl4 pre valve closed
4/4/2012	8:29:27 PM	SiCl4 post valve closed
4/4/2012	8:29:27 PM	Bypass valve closed
4/4/2012	8:29:27 PM	Bubbler valve closed
4/4/2012	8:29:27 PM	Helium valve opened
4/4/2012	8:29:27 PM	Main Vac valve opened
4/4/2012	8:29:27 PM	Helium MFC set to  20.000000
4/4/2012	8:29:27 PM	H2 MFC set to  0.000000
4/4/2012	8:29:27 PM	BCl3 MFC set to  0.000000
4/4/2012	8:29:27 PM	PH3 MFC set to  0.000000
4/4/2012	8:29:27 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:29:27 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:29:28 PM	Tube furnace set to 0
4/4/2012	8:29:58 PM	Helium valve closed
4/4/2012	8:29:58 PM	H2 valve closed
4/4/2012	8:29:58 PM	BCl3 valve closed
4/4/2012	8:29:58 PM	PH3 valve closed
4/4/2012	8:29:58 PM	SiCl4 pre valve closed
4/4/2012	8:29:58 PM	SiCl4 post valve closed
4/4/2012	8:29:58 PM	Bypass valve closed
4/4/2012	8:29:58 PM	Bubbler valve closed
4/4/2012	8:29:58 PM	Main Vac valve opened
4/4/2012	8:29:58 PM	Helium MFC set to  0.000000
4/4/2012	8:29:58 PM	H2 MFC set to  0.000000
4/4/2012	8:29:58 PM	BCl3 MFC set to  0.000000
4/4/2012	8:29:58 PM	PH3 MFC set to  0.000000
4/4/2012	8:29:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:29:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:29:58 PM	Tube furnace set to 0
4/4/2012	8:30:28 PM	H2 valve closed
4/4/2012	8:30:28 PM	BCl3 valve closed
4/4/2012	8:30:28 PM	PH3 valve closed
4/4/2012	8:30:28 PM	SiCl4 pre valve closed
4/4/2012	8:30:28 PM	SiCl4 post valve closed
4/4/2012	8:30:28 PM	Bypass valve closed
4/4/2012	8:30:28 PM	Bubbler valve closed
4/4/2012	8:30:28 PM	Helium valve opened
4/4/2012	8:30:28 PM	Main Vac valve opened
4/4/2012	8:30:28 PM	Helium MFC set to  20.000000
4/4/2012	8:30:28 PM	H2 MFC set to  0.000000
4/4/2012	8:30:28 PM	BCl3 MFC set to  0.000000
4/4/2012	8:30:28 PM	PH3 MFC set to  0.000000
4/4/2012	8:30:28 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:30:28 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:30:28 PM	Tube furnace set to 0
4/4/2012	8:30:58 PM	Helium valve closed
4/4/2012	8:30:58 PM	H2 valve closed
4/4/2012	8:30:58 PM	BCl3 valve closed
4/4/2012	8:30:58 PM	PH3 valve closed
4/4/2012	8:30:58 PM	SiCl4 pre valve closed
4/4/2012	8:30:58 PM	SiCl4 post valve closed
4/4/2012	8:30:58 PM	Bypass valve closed
4/4/2012	8:30:58 PM	Bubbler valve closed
4/4/2012	8:30:58 PM	Main Vac valve opened
4/4/2012	8:30:58 PM	Helium MFC set to  0.000000
4/4/2012	8:30:58 PM	H2 MFC set to  0.000000
4/4/2012	8:30:58 PM	BCl3 MFC set to  0.000000
4/4/2012	8:30:58 PM	PH3 MFC set to  0.000000
4/4/2012	8:30:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:30:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:30:58 PM	Tube furnace set to 0
4/4/2012	8:31:28 PM	H2 valve closed
4/4/2012	8:31:28 PM	BCl3 valve closed
4/4/2012	8:31:28 PM	PH3 valve closed
4/4/2012	8:31:28 PM	SiCl4 pre valve closed
4/4/2012	8:31:28 PM	SiCl4 post valve closed
4/4/2012	8:31:28 PM	Bypass valve closed
4/4/2012	8:31:28 PM	Bubbler valve closed
4/4/2012	8:31:28 PM	Helium valve opened
4/4/2012	8:31:28 PM	Main Vac valve opened
4/4/2012	8:31:28 PM	Helium MFC set to  20.000000
4/4/2012	8:31:28 PM	H2 MFC set to  0.000000
4/4/2012	8:31:28 PM	BCl3 MFC set to  0.000000
4/4/2012	8:31:28 PM	PH3 MFC set to  0.000000
4/4/2012	8:31:28 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:31:28 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:31:29 PM	Tube furnace set to 0
4/4/2012	8:31:59 PM	Helium valve closed
4/4/2012	8:31:59 PM	H2 valve closed
4/4/2012	8:31:59 PM	BCl3 valve closed
4/4/2012	8:31:59 PM	PH3 valve closed
4/4/2012	8:31:59 PM	SiCl4 pre valve closed
4/4/2012	8:31:59 PM	SiCl4 post valve closed
4/4/2012	8:31:59 PM	Bypass valve closed
4/4/2012	8:31:59 PM	Bubbler valve closed
4/4/2012	8:31:59 PM	Main Vac valve opened
4/4/2012	8:31:59 PM	Helium MFC set to  0.000000
4/4/2012	8:31:59 PM	H2 MFC set to  0.000000
4/4/2012	8:31:59 PM	BCl3 MFC set to  0.000000
4/4/2012	8:31:59 PM	PH3 MFC set to  0.000000
4/4/2012	8:31:59 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:31:59 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:31:59 PM	Tube furnace set to 0
4/4/2012	8:32:29 PM	H2 valve closed
4/4/2012	8:32:29 PM	BCl3 valve closed
4/4/2012	8:32:29 PM	PH3 valve closed
4/4/2012	8:32:29 PM	SiCl4 pre valve closed
4/4/2012	8:32:29 PM	SiCl4 post valve closed
4/4/2012	8:32:29 PM	Bypass valve closed
4/4/2012	8:32:29 PM	Bubbler valve closed
4/4/2012	8:32:29 PM	Helium valve opened
4/4/2012	8:32:29 PM	Main Vac valve opened
4/4/2012	8:32:29 PM	Helium MFC set to  20.000000
4/4/2012	8:32:29 PM	H2 MFC set to  0.000000
4/4/2012	8:32:29 PM	BCl3 MFC set to  0.000000
4/4/2012	8:32:29 PM	PH3 MFC set to  0.000000
4/4/2012	8:32:29 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:32:29 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:32:29 PM	Tube furnace set to 0
4/4/2012	8:32:59 PM	Helium valve closed
4/4/2012	8:32:59 PM	H2 valve closed
4/4/2012	8:32:59 PM	BCl3 valve closed
4/4/2012	8:32:59 PM	PH3 valve closed
4/4/2012	8:32:59 PM	SiCl4 pre valve closed
4/4/2012	8:32:59 PM	SiCl4 post valve closed
4/4/2012	8:32:59 PM	Bypass valve closed
4/4/2012	8:32:59 PM	Bubbler valve closed
4/4/2012	8:32:59 PM	Main Vac valve opened
4/4/2012	8:32:59 PM	Helium MFC set to  0.000000
4/4/2012	8:32:59 PM	H2 MFC set to  0.000000
4/4/2012	8:32:59 PM	BCl3 MFC set to  0.000000
4/4/2012	8:32:59 PM	PH3 MFC set to  0.000000
4/4/2012	8:32:59 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:32:59 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:32:59 PM	Tube furnace set to 0
4/4/2012	8:33:29 PM	H2 valve closed
4/4/2012	8:33:29 PM	BCl3 valve closed
4/4/2012	8:33:29 PM	PH3 valve closed
4/4/2012	8:33:29 PM	SiCl4 pre valve closed
4/4/2012	8:33:29 PM	SiCl4 post valve closed
4/4/2012	8:33:29 PM	Bypass valve closed
4/4/2012	8:33:29 PM	Bubbler valve closed
4/4/2012	8:33:29 PM	Helium valve opened
4/4/2012	8:33:29 PM	Main Vac valve opened
4/4/2012	8:33:29 PM	Helium MFC set to  20.000000
4/4/2012	8:33:29 PM	H2 MFC set to  0.000000
4/4/2012	8:33:29 PM	BCl3 MFC set to  0.000000
4/4/2012	8:33:29 PM	PH3 MFC set to  0.000000
4/4/2012	8:33:29 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:33:29 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:33:30 PM	Tube furnace set to 0
4/4/2012	8:34:00 PM	Helium valve closed
4/4/2012	8:34:00 PM	H2 valve closed
4/4/2012	8:34:00 PM	BCl3 valve closed
4/4/2012	8:34:00 PM	PH3 valve closed
4/4/2012	8:34:00 PM	SiCl4 pre valve closed
4/4/2012	8:34:00 PM	SiCl4 post valve closed
4/4/2012	8:34:00 PM	Bypass valve closed
4/4/2012	8:34:00 PM	Bubbler valve closed
4/4/2012	8:34:00 PM	Main Vac valve opened
4/4/2012	8:34:00 PM	Helium MFC set to  0.000000
4/4/2012	8:34:00 PM	H2 MFC set to  0.000000
4/4/2012	8:34:00 PM	BCl3 MFC set to  0.000000
4/4/2012	8:34:00 PM	PH3 MFC set to  0.000000
4/4/2012	8:34:00 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:34:00 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:34:00 PM	Tube furnace set to 0
4/4/2012	8:34:30 PM	H2 valve closed
4/4/2012	8:34:30 PM	BCl3 valve closed
4/4/2012	8:34:30 PM	PH3 valve closed
4/4/2012	8:34:30 PM	SiCl4 pre valve closed
4/4/2012	8:34:30 PM	SiCl4 post valve closed
4/4/2012	8:34:30 PM	Bypass valve closed
4/4/2012	8:34:30 PM	Bubbler valve closed
4/4/2012	8:34:30 PM	Helium valve opened
4/4/2012	8:34:30 PM	Main Vac valve opened
4/4/2012	8:34:30 PM	Helium MFC set to  20.000000
4/4/2012	8:34:30 PM	H2 MFC set to  0.000000
4/4/2012	8:34:30 PM	BCl3 MFC set to  0.000000
4/4/2012	8:34:30 PM	PH3 MFC set to  0.000000
4/4/2012	8:34:30 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:34:30 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:34:30 PM	Tube furnace set to 0
4/4/2012	8:35:00 PM	Helium valve closed
4/4/2012	8:35:00 PM	H2 valve closed
4/4/2012	8:35:00 PM	BCl3 valve closed
4/4/2012	8:35:00 PM	PH3 valve closed
4/4/2012	8:35:00 PM	SiCl4 pre valve closed
4/4/2012	8:35:00 PM	SiCl4 post valve closed
4/4/2012	8:35:00 PM	Bypass valve closed
4/4/2012	8:35:00 PM	Bubbler valve closed
4/4/2012	8:35:00 PM	Main Vac valve opened
4/4/2012	8:35:00 PM	Helium MFC set to  0.000000
4/4/2012	8:35:00 PM	H2 MFC set to  0.000000
4/4/2012	8:35:00 PM	BCl3 MFC set to  0.000000
4/4/2012	8:35:00 PM	PH3 MFC set to  0.000000
4/4/2012	8:35:00 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:35:00 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:35:00 PM	Tube furnace set to 0
4/4/2012	8:35:30 PM	H2 valve closed
4/4/2012	8:35:30 PM	BCl3 valve closed
4/4/2012	8:35:30 PM	PH3 valve closed
4/4/2012	8:35:30 PM	SiCl4 pre valve closed
4/4/2012	8:35:30 PM	SiCl4 post valve closed
4/4/2012	8:35:30 PM	Bypass valve closed
4/4/2012	8:35:30 PM	Bubbler valve closed
4/4/2012	8:35:30 PM	Helium valve opened
4/4/2012	8:35:30 PM	Main Vac valve opened
4/4/2012	8:35:30 PM	Helium MFC set to  20.000000
4/4/2012	8:35:30 PM	H2 MFC set to  0.000000
4/4/2012	8:35:30 PM	BCl3 MFC set to  0.000000
4/4/2012	8:35:30 PM	PH3 MFC set to  0.000000
4/4/2012	8:35:30 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:35:30 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:35:30 PM	Tube furnace set to 0
4/4/2012	8:36:00 PM	Helium valve closed
4/4/2012	8:36:00 PM	H2 valve closed
4/4/2012	8:36:00 PM	BCl3 valve closed
4/4/2012	8:36:00 PM	PH3 valve closed
4/4/2012	8:36:01 PM	SiCl4 pre valve closed
4/4/2012	8:36:01 PM	SiCl4 post valve closed
4/4/2012	8:36:01 PM	Bypass valve closed
4/4/2012	8:36:01 PM	Bubbler valve closed
4/4/2012	8:36:01 PM	Main Vac valve opened
4/4/2012	8:36:01 PM	Helium MFC set to  0.000000
4/4/2012	8:36:01 PM	H2 MFC set to  0.000000
4/4/2012	8:36:01 PM	BCl3 MFC set to  0.000000
4/4/2012	8:36:01 PM	PH3 MFC set to  0.000000
4/4/2012	8:36:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:36:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:36:01 PM	Tube furnace set to 200
4/4/2012	8:36:31 PM	H2 valve closed
4/4/2012	8:36:31 PM	BCl3 valve closed
4/4/2012	8:36:31 PM	PH3 valve closed
4/4/2012	8:36:31 PM	SiCl4 pre valve closed
4/4/2012	8:36:31 PM	SiCl4 post valve closed
4/4/2012	8:36:31 PM	Bypass valve closed
4/4/2012	8:36:31 PM	Bubbler valve closed
4/4/2012	8:36:31 PM	Helium valve opened
4/4/2012	8:36:31 PM	Main Vac valve opened
4/4/2012	8:36:31 PM	Helium MFC set to  20.000000
4/4/2012	8:36:31 PM	H2 MFC set to  0.000000
4/4/2012	8:36:31 PM	BCl3 MFC set to  0.000000
4/4/2012	8:36:31 PM	PH3 MFC set to  0.000000
4/4/2012	8:36:31 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:36:31 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:36:31 PM	Tube furnace set to 200
4/4/2012	8:37:01 PM	Helium valve closed
4/4/2012	8:37:01 PM	H2 valve closed
4/4/2012	8:37:01 PM	BCl3 valve closed
4/4/2012	8:37:01 PM	PH3 valve closed
4/4/2012	8:37:01 PM	SiCl4 pre valve closed
4/4/2012	8:37:01 PM	SiCl4 post valve closed
4/4/2012	8:37:01 PM	Bypass valve closed
4/4/2012	8:37:01 PM	Bubbler valve closed
4/4/2012	8:37:01 PM	Main Vac valve opened
4/4/2012	8:37:01 PM	Helium MFC set to  0.000000
4/4/2012	8:37:01 PM	H2 MFC set to  0.000000
4/4/2012	8:37:01 PM	BCl3 MFC set to  0.000000
4/4/2012	8:37:01 PM	PH3 MFC set to  0.000000
4/4/2012	8:37:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:37:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:37:01 PM	Tube furnace set to 200
4/4/2012	8:37:31 PM	H2 valve closed
4/4/2012	8:37:31 PM	BCl3 valve closed
4/4/2012	8:37:31 PM	PH3 valve closed
4/4/2012	8:37:31 PM	SiCl4 pre valve closed
4/4/2012	8:37:31 PM	SiCl4 post valve closed
4/4/2012	8:37:31 PM	Bypass valve closed
4/4/2012	8:37:31 PM	Bubbler valve closed
4/4/2012	8:37:31 PM	Helium valve opened
4/4/2012	8:37:31 PM	Main Vac valve opened
4/4/2012	8:37:31 PM	Helium MFC set to  20.000000
4/4/2012	8:37:31 PM	H2 MFC set to  0.000000
4/4/2012	8:37:31 PM	BCl3 MFC set to  0.000000
4/4/2012	8:37:31 PM	PH3 MFC set to  0.000000
4/4/2012	8:37:31 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:37:31 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:37:31 PM	Tube furnace set to 200
4/4/2012	8:38:01 PM	Helium valve closed
4/4/2012	8:38:01 PM	H2 valve closed
4/4/2012	8:38:01 PM	BCl3 valve closed
4/4/2012	8:38:01 PM	PH3 valve closed
4/4/2012	8:38:01 PM	SiCl4 pre valve closed
4/4/2012	8:38:01 PM	SiCl4 post valve closed
4/4/2012	8:38:01 PM	Bypass valve closed
4/4/2012	8:38:01 PM	Bubbler valve closed
4/4/2012	8:38:01 PM	Main Vac valve opened
4/4/2012	8:38:01 PM	Helium MFC set to  0.000000
4/4/2012	8:38:01 PM	H2 MFC set to  0.000000
4/4/2012	8:38:01 PM	BCl3 MFC set to  0.000000
4/4/2012	8:38:01 PM	PH3 MFC set to  0.000000
4/4/2012	8:38:01 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:38:01 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:38:02 PM	Tube furnace set to 200
4/4/2012	8:38:32 PM	H2 valve closed
4/4/2012	8:38:32 PM	BCl3 valve closed
4/4/2012	8:38:32 PM	PH3 valve closed
4/4/2012	8:38:32 PM	SiCl4 pre valve closed
4/4/2012	8:38:32 PM	SiCl4 post valve closed
4/4/2012	8:38:32 PM	Bypass valve closed
4/4/2012	8:38:32 PM	Bubbler valve closed
4/4/2012	8:38:32 PM	Helium valve opened
4/4/2012	8:38:32 PM	Main Vac valve opened
4/4/2012	8:38:32 PM	Helium MFC set to  20.000000
4/4/2012	8:38:32 PM	H2 MFC set to  0.000000
4/4/2012	8:38:32 PM	BCl3 MFC set to  0.000000
4/4/2012	8:38:32 PM	PH3 MFC set to  0.000000
4/4/2012	8:38:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:38:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:38:32 PM	Tube furnace set to 200
4/4/2012	8:39:02 PM	Helium valve closed
4/4/2012	8:39:02 PM	H2 valve closed
4/4/2012	8:39:02 PM	BCl3 valve closed
4/4/2012	8:39:02 PM	PH3 valve closed
4/4/2012	8:39:02 PM	SiCl4 pre valve closed
4/4/2012	8:39:02 PM	SiCl4 post valve closed
4/4/2012	8:39:02 PM	Bypass valve closed
4/4/2012	8:39:02 PM	Bubbler valve closed
4/4/2012	8:39:02 PM	Main Vac valve opened
4/4/2012	8:39:02 PM	Helium MFC set to  0.000000
4/4/2012	8:39:02 PM	H2 MFC set to  0.000000
4/4/2012	8:39:02 PM	BCl3 MFC set to  0.000000
4/4/2012	8:39:02 PM	PH3 MFC set to  0.000000
4/4/2012	8:39:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:39:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:39:02 PM	Tube furnace set to 200
4/4/2012	8:39:32 PM	H2 valve closed
4/4/2012	8:39:32 PM	BCl3 valve closed
4/4/2012	8:39:32 PM	PH3 valve closed
4/4/2012	8:39:32 PM	SiCl4 pre valve closed
4/4/2012	8:39:32 PM	SiCl4 post valve closed
4/4/2012	8:39:32 PM	Bypass valve closed
4/4/2012	8:39:32 PM	Bubbler valve closed
4/4/2012	8:39:32 PM	Helium valve opened
4/4/2012	8:39:32 PM	Main Vac valve opened
4/4/2012	8:39:32 PM	Helium MFC set to  20.000000
4/4/2012	8:39:32 PM	H2 MFC set to  0.000000
4/4/2012	8:39:32 PM	BCl3 MFC set to  0.000000
4/4/2012	8:39:32 PM	PH3 MFC set to  0.000000
4/4/2012	8:39:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:39:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:39:32 PM	Tube furnace set to 200
4/4/2012	8:40:02 PM	Helium valve closed
4/4/2012	8:40:02 PM	H2 valve closed
4/4/2012	8:40:02 PM	BCl3 valve closed
4/4/2012	8:40:02 PM	PH3 valve closed
4/4/2012	8:40:02 PM	SiCl4 pre valve closed
4/4/2012	8:40:02 PM	SiCl4 post valve closed
4/4/2012	8:40:02 PM	Bypass valve closed
4/4/2012	8:40:02 PM	Bubbler valve closed
4/4/2012	8:40:02 PM	Main Vac valve opened
4/4/2012	8:40:02 PM	Helium MFC set to  0.000000
4/4/2012	8:40:02 PM	H2 MFC set to  0.000000
4/4/2012	8:40:02 PM	BCl3 MFC set to  0.000000
4/4/2012	8:40:02 PM	PH3 MFC set to  0.000000
4/4/2012	8:40:02 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:40:02 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:40:03 PM	Tube furnace set to 200
4/4/2012	8:40:33 PM	H2 valve closed
4/4/2012	8:40:33 PM	BCl3 valve closed
4/4/2012	8:40:33 PM	PH3 valve closed
4/4/2012	8:40:33 PM	SiCl4 pre valve closed
4/4/2012	8:40:33 PM	SiCl4 post valve closed
4/4/2012	8:40:33 PM	Bypass valve closed
4/4/2012	8:40:33 PM	Bubbler valve closed
4/4/2012	8:40:33 PM	Helium valve opened
4/4/2012	8:40:33 PM	Main Vac valve opened
4/4/2012	8:40:33 PM	Helium MFC set to  20.000000
4/4/2012	8:40:33 PM	H2 MFC set to  0.000000
4/4/2012	8:40:33 PM	BCl3 MFC set to  0.000000
4/4/2012	8:40:33 PM	PH3 MFC set to  0.000000
4/4/2012	8:40:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:40:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:40:33 PM	Tube furnace set to 200
4/4/2012	8:41:03 PM	Helium valve closed
4/4/2012	8:41:03 PM	H2 valve closed
4/4/2012	8:41:03 PM	BCl3 valve closed
4/4/2012	8:41:03 PM	PH3 valve closed
4/4/2012	8:41:03 PM	SiCl4 pre valve closed
4/4/2012	8:41:03 PM	SiCl4 post valve closed
4/4/2012	8:41:03 PM	Bypass valve closed
4/4/2012	8:41:03 PM	Bubbler valve closed
4/4/2012	8:41:03 PM	Main Vac valve opened
4/4/2012	8:41:03 PM	Helium MFC set to  0.000000
4/4/2012	8:41:03 PM	H2 MFC set to  0.000000
4/4/2012	8:41:03 PM	BCl3 MFC set to  0.000000
4/4/2012	8:41:03 PM	PH3 MFC set to  0.000000
4/4/2012	8:41:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:41:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:41:03 PM	Tube furnace set to 200
4/4/2012	8:41:33 PM	H2 valve closed
4/4/2012	8:41:33 PM	BCl3 valve closed
4/4/2012	8:41:33 PM	PH3 valve closed
4/4/2012	8:41:33 PM	SiCl4 pre valve closed
4/4/2012	8:41:33 PM	SiCl4 post valve closed
4/4/2012	8:41:33 PM	Bypass valve closed
4/4/2012	8:41:33 PM	Bubbler valve closed
4/4/2012	8:41:33 PM	Helium valve opened
4/4/2012	8:41:33 PM	Main Vac valve opened
4/4/2012	8:41:33 PM	Helium MFC set to  20.000000
4/4/2012	8:41:33 PM	H2 MFC set to  0.000000
4/4/2012	8:41:33 PM	BCl3 MFC set to  0.000000
4/4/2012	8:41:33 PM	PH3 MFC set to  0.000000
4/4/2012	8:41:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:41:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:41:33 PM	Tube furnace set to 200
4/4/2012	8:42:03 PM	Helium valve closed
4/4/2012	8:42:03 PM	H2 valve closed
4/4/2012	8:42:03 PM	BCl3 valve closed
4/4/2012	8:42:03 PM	PH3 valve closed
4/4/2012	8:42:03 PM	SiCl4 pre valve closed
4/4/2012	8:42:03 PM	SiCl4 post valve closed
4/4/2012	8:42:03 PM	Bypass valve closed
4/4/2012	8:42:03 PM	Bubbler valve closed
4/4/2012	8:42:03 PM	Main Vac valve opened
4/4/2012	8:42:03 PM	Helium MFC set to  0.000000
4/4/2012	8:42:03 PM	H2 MFC set to  0.000000
4/4/2012	8:42:03 PM	BCl3 MFC set to  0.000000
4/4/2012	8:42:03 PM	PH3 MFC set to  0.000000
4/4/2012	8:42:03 PM	SiCl4 MFC set to  0.000000
4/4/2012	8:42:03 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	8:42:04 PM	Tube furnace set to 0
4/4/2012	8:42:05 PM	Run finished at 8:42 PM
4/4/2012	9:37:28 PM	Recipe started at 9:37 PM
4/4/2012	9:37:28 PM	Helium valve closed
4/4/2012	9:37:28 PM	H2 valve closed
4/4/2012	9:37:28 PM	BCl3 valve closed
4/4/2012	9:37:28 PM	PH3 valve closed
4/4/2012	9:37:28 PM	SiCl4 pre valve closed
4/4/2012	9:37:28 PM	SiCl4 post valve closed
4/4/2012	9:37:28 PM	Bypass valve closed
4/4/2012	9:37:28 PM	Bubbler valve closed
4/4/2012	9:37:28 PM	Main Vac valve opened
4/4/2012	9:37:28 PM	Helium MFC set to  0.000000
4/4/2012	9:37:28 PM	H2 MFC set to  0.000000
4/4/2012	9:37:28 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:28 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:28 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:28 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:28 PM	Tube furnace set to 0
4/4/2012	9:37:30 PM	H2 valve closed
4/4/2012	9:37:30 PM	BCl3 valve closed
4/4/2012	9:37:30 PM	PH3 valve closed
4/4/2012	9:37:30 PM	SiCl4 pre valve closed
4/4/2012	9:37:30 PM	SiCl4 post valve closed
4/4/2012	9:37:30 PM	Bypass valve closed
4/4/2012	9:37:30 PM	Bubbler valve closed
4/4/2012	9:37:30 PM	Helium valve opened
4/4/2012	9:37:30 PM	Main Vac valve opened
4/4/2012	9:37:30 PM	Helium MFC set to  20.000000
4/4/2012	9:37:30 PM	H2 MFC set to  0.000000
4/4/2012	9:37:30 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:30 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:30 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:30 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:30 PM	Tube furnace set to 0
4/4/2012	9:37:30 PM	Helium valve closed
4/4/2012	9:37:30 PM	H2 valve closed
4/4/2012	9:37:30 PM	BCl3 valve closed
4/4/2012	9:37:30 PM	PH3 valve closed
4/4/2012	9:37:30 PM	SiCl4 pre valve closed
4/4/2012	9:37:30 PM	SiCl4 post valve closed
4/4/2012	9:37:30 PM	Bypass valve closed
4/4/2012	9:37:30 PM	Bubbler valve closed
4/4/2012	9:37:30 PM	Main Vac valve opened
4/4/2012	9:37:30 PM	Helium MFC set to  0.000000
4/4/2012	9:37:30 PM	H2 MFC set to  0.000000
4/4/2012	9:37:30 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:30 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:30 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:30 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:30 PM	Tube furnace set to 0
4/4/2012	9:37:31 PM	H2 valve closed
4/4/2012	9:37:31 PM	BCl3 valve closed
4/4/2012	9:37:31 PM	PH3 valve closed
4/4/2012	9:37:31 PM	SiCl4 pre valve closed
4/4/2012	9:37:31 PM	SiCl4 post valve closed
4/4/2012	9:37:31 PM	Bypass valve closed
4/4/2012	9:37:31 PM	Bubbler valve closed
4/4/2012	9:37:31 PM	Helium valve opened
4/4/2012	9:37:31 PM	Main Vac valve opened
4/4/2012	9:37:31 PM	Helium MFC set to  20.000000
4/4/2012	9:37:31 PM	H2 MFC set to  0.000000
4/4/2012	9:37:31 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:31 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:31 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:31 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:31 PM	Tube furnace set to 0
4/4/2012	9:37:31 PM	Helium valve closed
4/4/2012	9:37:31 PM	H2 valve closed
4/4/2012	9:37:31 PM	BCl3 valve closed
4/4/2012	9:37:31 PM	PH3 valve closed
4/4/2012	9:37:31 PM	SiCl4 pre valve closed
4/4/2012	9:37:31 PM	SiCl4 post valve closed
4/4/2012	9:37:32 PM	Bypass valve closed
4/4/2012	9:37:32 PM	Bubbler valve closed
4/4/2012	9:37:32 PM	Main Vac valve opened
4/4/2012	9:37:32 PM	Helium MFC set to  0.000000
4/4/2012	9:37:32 PM	H2 MFC set to  0.000000
4/4/2012	9:37:32 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:32 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:32 PM	Tube furnace set to 0
4/4/2012	9:37:32 PM	H2 valve closed
4/4/2012	9:37:32 PM	BCl3 valve closed
4/4/2012	9:37:32 PM	PH3 valve closed
4/4/2012	9:37:32 PM	SiCl4 pre valve closed
4/4/2012	9:37:32 PM	SiCl4 post valve closed
4/4/2012	9:37:32 PM	Bypass valve closed
4/4/2012	9:37:32 PM	Bubbler valve closed
4/4/2012	9:37:32 PM	Helium valve opened
4/4/2012	9:37:32 PM	Main Vac valve opened
4/4/2012	9:37:32 PM	Helium MFC set to  20.000000
4/4/2012	9:37:32 PM	H2 MFC set to  0.000000
4/4/2012	9:37:32 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:32 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:32 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:32 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:32 PM	Tube furnace set to 0
4/4/2012	9:37:32 PM	Helium valve closed
4/4/2012	9:37:32 PM	H2 valve closed
4/4/2012	9:37:32 PM	BCl3 valve closed
4/4/2012	9:37:32 PM	PH3 valve closed
4/4/2012	9:37:32 PM	SiCl4 pre valve closed
4/4/2012	9:37:32 PM	SiCl4 post valve closed
4/4/2012	9:37:32 PM	Bypass valve closed
4/4/2012	9:37:32 PM	Bubbler valve closed
4/4/2012	9:37:32 PM	Main Vac valve opened
4/4/2012	9:37:32 PM	Helium MFC set to  0.000000
4/4/2012	9:37:32 PM	H2 MFC set to  0.000000
4/4/2012	9:37:32 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:32 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:33 PM	Tube furnace set to 0
4/4/2012	9:37:33 PM	H2 valve closed
4/4/2012	9:37:33 PM	BCl3 valve closed
4/4/2012	9:37:33 PM	PH3 valve closed
4/4/2012	9:37:33 PM	SiCl4 pre valve closed
4/4/2012	9:37:33 PM	SiCl4 post valve closed
4/4/2012	9:37:33 PM	Bypass valve closed
4/4/2012	9:37:33 PM	Bubbler valve closed
4/4/2012	9:37:33 PM	Helium valve opened
4/4/2012	9:37:33 PM	Main Vac valve opened
4/4/2012	9:37:33 PM	Helium MFC set to  20.000000
4/4/2012	9:37:33 PM	H2 MFC set to  0.000000
4/4/2012	9:37:33 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:33 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:33 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:33 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:33 PM	Tube furnace set to 0
4/4/2012	9:37:34 PM	Helium valve closed
4/4/2012	9:37:34 PM	H2 valve closed
4/4/2012	9:37:34 PM	BCl3 valve closed
4/4/2012	9:37:34 PM	PH3 valve closed
4/4/2012	9:37:34 PM	SiCl4 pre valve closed
4/4/2012	9:37:34 PM	SiCl4 post valve closed
4/4/2012	9:37:34 PM	Bypass valve closed
4/4/2012	9:37:34 PM	Bubbler valve closed
4/4/2012	9:37:34 PM	Main Vac valve opened
4/4/2012	9:37:34 PM	Helium MFC set to  0.000000
4/4/2012	9:37:34 PM	H2 MFC set to  0.000000
4/4/2012	9:37:34 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:34 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:34 PM	Tube furnace set to 0
4/4/2012	9:37:34 PM	H2 valve closed
4/4/2012	9:37:34 PM	BCl3 valve closed
4/4/2012	9:37:34 PM	PH3 valve closed
4/4/2012	9:37:34 PM	SiCl4 pre valve closed
4/4/2012	9:37:34 PM	SiCl4 post valve closed
4/4/2012	9:37:34 PM	Bypass valve closed
4/4/2012	9:37:34 PM	Bubbler valve closed
4/4/2012	9:37:34 PM	Helium valve opened
4/4/2012	9:37:34 PM	Main Vac valve opened
4/4/2012	9:37:34 PM	Helium MFC set to  20.000000
4/4/2012	9:37:34 PM	H2 MFC set to  0.000000
4/4/2012	9:37:34 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:34 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:34 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:34 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:35 PM	Tube furnace set to 0
4/4/2012	9:37:35 PM	Helium valve closed
4/4/2012	9:37:35 PM	H2 valve closed
4/4/2012	9:37:35 PM	BCl3 valve closed
4/4/2012	9:37:35 PM	PH3 valve closed
4/4/2012	9:37:35 PM	SiCl4 pre valve closed
4/4/2012	9:37:35 PM	SiCl4 post valve closed
4/4/2012	9:37:35 PM	Bypass valve closed
4/4/2012	9:37:35 PM	Bubbler valve closed
4/4/2012	9:37:35 PM	Main Vac valve opened
4/4/2012	9:37:35 PM	Helium MFC set to  0.000000
4/4/2012	9:37:35 PM	H2 MFC set to  0.000000
4/4/2012	9:37:35 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:35 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:35 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:35 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:36 PM	Tube furnace set to 0
4/4/2012	9:37:39 PM	H2 valve closed
4/4/2012	9:37:39 PM	BCl3 valve closed
4/4/2012	9:37:39 PM	PH3 valve closed
4/4/2012	9:37:39 PM	SiCl4 pre valve closed
4/4/2012	9:37:39 PM	SiCl4 post valve closed
4/4/2012	9:37:39 PM	Bypass valve closed
4/4/2012	9:37:39 PM	Bubbler valve closed
4/4/2012	9:37:39 PM	Helium valve opened
4/4/2012	9:37:39 PM	Main Vac valve opened
4/4/2012	9:37:39 PM	Helium MFC set to  20.000000
4/4/2012	9:37:39 PM	H2 MFC set to  0.000000
4/4/2012	9:37:39 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:39 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:39 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:39 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:39 PM	Tube furnace set to 0
4/4/2012	9:37:39 PM	Helium valve closed
4/4/2012	9:37:39 PM	H2 valve closed
4/4/2012	9:37:39 PM	BCl3 valve closed
4/4/2012	9:37:39 PM	PH3 valve closed
4/4/2012	9:37:39 PM	SiCl4 pre valve closed
4/4/2012	9:37:39 PM	SiCl4 post valve closed
4/4/2012	9:37:39 PM	Bypass valve closed
4/4/2012	9:37:39 PM	Bubbler valve closed
4/4/2012	9:37:39 PM	Main Vac valve opened
4/4/2012	9:37:39 PM	Helium MFC set to  0.000000
4/4/2012	9:37:39 PM	H2 MFC set to  0.000000
4/4/2012	9:37:39 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:39 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:39 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:39 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:40 PM	Tube furnace set to 0
4/4/2012	9:37:40 PM	H2 valve closed
4/4/2012	9:37:40 PM	BCl3 valve closed
4/4/2012	9:37:40 PM	PH3 valve closed
4/4/2012	9:37:40 PM	SiCl4 pre valve closed
4/4/2012	9:37:40 PM	SiCl4 post valve closed
4/4/2012	9:37:40 PM	Bypass valve closed
4/4/2012	9:37:40 PM	Bubbler valve closed
4/4/2012	9:37:40 PM	Helium valve opened
4/4/2012	9:37:40 PM	Main Vac valve opened
4/4/2012	9:37:40 PM	Helium MFC set to  20.000000
4/4/2012	9:37:40 PM	H2 MFC set to  0.000000
4/4/2012	9:37:40 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:40 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:40 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:40 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:40 PM	Tube furnace set to 0
4/4/2012	9:37:40 PM	Helium valve closed
4/4/2012	9:37:40 PM	H2 valve closed
4/4/2012	9:37:40 PM	BCl3 valve closed
4/4/2012	9:37:40 PM	PH3 valve closed
4/4/2012	9:37:40 PM	SiCl4 pre valve closed
4/4/2012	9:37:40 PM	SiCl4 post valve closed
4/4/2012	9:37:40 PM	Bypass valve closed
4/4/2012	9:37:40 PM	Bubbler valve closed
4/4/2012	9:37:40 PM	Main Vac valve opened
4/4/2012	9:37:40 PM	Helium MFC set to  0.000000
4/4/2012	9:37:40 PM	H2 MFC set to  0.000000
4/4/2012	9:37:40 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:40 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:40 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:40 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:41 PM	Tube furnace set to 0
4/4/2012	9:37:41 PM	H2 valve closed
4/4/2012	9:37:41 PM	BCl3 valve closed
4/4/2012	9:37:41 PM	PH3 valve closed
4/4/2012	9:37:41 PM	SiCl4 pre valve closed
4/4/2012	9:37:41 PM	SiCl4 post valve closed
4/4/2012	9:37:41 PM	Bypass valve closed
4/4/2012	9:37:41 PM	Bubbler valve closed
4/4/2012	9:37:41 PM	Helium valve opened
4/4/2012	9:37:41 PM	Main Vac valve opened
4/4/2012	9:37:41 PM	Helium MFC set to  20.000000
4/4/2012	9:37:41 PM	H2 MFC set to  0.000000
4/4/2012	9:37:41 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:41 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:41 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:41 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:41 PM	Tube furnace set to 0
4/4/2012	9:37:42 PM	Helium valve closed
4/4/2012	9:37:42 PM	H2 valve closed
4/4/2012	9:37:42 PM	BCl3 valve closed
4/4/2012	9:37:42 PM	PH3 valve closed
4/4/2012	9:37:42 PM	SiCl4 pre valve closed
4/4/2012	9:37:42 PM	SiCl4 post valve closed
4/4/2012	9:37:42 PM	Bypass valve closed
4/4/2012	9:37:42 PM	Bubbler valve closed
4/4/2012	9:37:42 PM	Main Vac valve opened
4/4/2012	9:37:42 PM	Helium MFC set to  0.000000
4/4/2012	9:37:42 PM	H2 MFC set to  0.000000
4/4/2012	9:37:42 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:42 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:42 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:42 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:42 PM	Tube furnace set to 0
4/4/2012	9:37:44 PM	H2 valve closed
4/4/2012	9:37:44 PM	BCl3 valve closed
4/4/2012	9:37:44 PM	PH3 valve closed
4/4/2012	9:37:44 PM	SiCl4 pre valve closed
4/4/2012	9:37:44 PM	SiCl4 post valve closed
4/4/2012	9:37:44 PM	Bypass valve closed
4/4/2012	9:37:44 PM	Bubbler valve closed
4/4/2012	9:37:44 PM	Helium valve opened
4/4/2012	9:37:44 PM	Main Vac valve opened
4/4/2012	9:37:44 PM	Helium MFC set to  20.000000
4/4/2012	9:37:44 PM	H2 MFC set to  0.000000
4/4/2012	9:37:44 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:44 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:44 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:44 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:45 PM	Tube furnace set to 0
4/4/2012	9:37:45 PM	Helium valve closed
4/4/2012	9:37:45 PM	H2 valve closed
4/4/2012	9:37:45 PM	BCl3 valve closed
4/4/2012	9:37:45 PM	PH3 valve closed
4/4/2012	9:37:45 PM	SiCl4 pre valve closed
4/4/2012	9:37:45 PM	SiCl4 post valve closed
4/4/2012	9:37:45 PM	Bypass valve closed
4/4/2012	9:37:45 PM	Bubbler valve closed
4/4/2012	9:37:45 PM	Main Vac valve opened
4/4/2012	9:37:45 PM	Helium MFC set to  0.000000
4/4/2012	9:37:45 PM	H2 MFC set to  0.000000
4/4/2012	9:37:45 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:45 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:45 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:45 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:45 PM	Tube furnace set to 200
4/4/2012	9:37:47 PM	H2 valve closed
4/4/2012	9:37:47 PM	BCl3 valve closed
4/4/2012	9:37:47 PM	PH3 valve closed
4/4/2012	9:37:47 PM	SiCl4 pre valve closed
4/4/2012	9:37:47 PM	SiCl4 post valve closed
4/4/2012	9:37:47 PM	Bypass valve closed
4/4/2012	9:37:47 PM	Bubbler valve closed
4/4/2012	9:37:47 PM	Helium valve opened
4/4/2012	9:37:47 PM	Main Vac valve opened
4/4/2012	9:37:47 PM	Helium MFC set to  20.000000
4/4/2012	9:37:47 PM	H2 MFC set to  0.000000
4/4/2012	9:37:47 PM	BCl3 MFC set to  0.000000
4/4/2012	9:37:47 PM	PH3 MFC set to  0.000000
4/4/2012	9:37:47 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:37:47 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:37:47 PM	Tube furnace set to 200
4/4/2012	9:38:17 PM	Helium valve closed
4/4/2012	9:38:17 PM	H2 valve closed
4/4/2012	9:38:17 PM	BCl3 valve closed
4/4/2012	9:38:17 PM	PH3 valve closed
4/4/2012	9:38:17 PM	SiCl4 pre valve closed
4/4/2012	9:38:17 PM	SiCl4 post valve closed
4/4/2012	9:38:17 PM	Bypass valve closed
4/4/2012	9:38:17 PM	Bubbler valve closed
4/4/2012	9:38:17 PM	Main Vac valve opened
4/4/2012	9:38:17 PM	Helium MFC set to  0.000000
4/4/2012	9:38:17 PM	H2 MFC set to  0.000000
4/4/2012	9:38:17 PM	BCl3 MFC set to  0.000000
4/4/2012	9:38:17 PM	PH3 MFC set to  0.000000
4/4/2012	9:38:17 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:38:17 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:38:17 PM	Tube furnace set to 200
4/4/2012	9:38:47 PM	H2 valve closed
4/4/2012	9:38:47 PM	BCl3 valve closed
4/4/2012	9:38:47 PM	PH3 valve closed
4/4/2012	9:38:47 PM	SiCl4 pre valve closed
4/4/2012	9:38:47 PM	SiCl4 post valve closed
4/4/2012	9:38:47 PM	Bypass valve closed
4/4/2012	9:38:47 PM	Bubbler valve closed
4/4/2012	9:38:47 PM	Helium valve opened
4/4/2012	9:38:47 PM	Main Vac valve opened
4/4/2012	9:38:47 PM	Helium MFC set to  20.000000
4/4/2012	9:38:47 PM	H2 MFC set to  0.000000
4/4/2012	9:38:47 PM	BCl3 MFC set to  0.000000
4/4/2012	9:38:47 PM	PH3 MFC set to  0.000000
4/4/2012	9:38:47 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:38:47 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:38:47 PM	Tube furnace set to 200
4/4/2012	9:39:17 PM	Helium valve closed
4/4/2012	9:39:17 PM	H2 valve closed
4/4/2012	9:39:17 PM	BCl3 valve closed
4/4/2012	9:39:17 PM	PH3 valve closed
4/4/2012	9:39:17 PM	SiCl4 pre valve closed
4/4/2012	9:39:17 PM	SiCl4 post valve closed
4/4/2012	9:39:17 PM	Bypass valve closed
4/4/2012	9:39:17 PM	Bubbler valve closed
4/4/2012	9:39:17 PM	Main Vac valve opened
4/4/2012	9:39:17 PM	Helium MFC set to  0.000000
4/4/2012	9:39:17 PM	H2 MFC set to  0.000000
4/4/2012	9:39:17 PM	BCl3 MFC set to  0.000000
4/4/2012	9:39:17 PM	PH3 MFC set to  0.000000
4/4/2012	9:39:17 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:39:17 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:39:17 PM	Tube furnace set to 200
4/4/2012	9:39:47 PM	H2 valve closed
4/4/2012	9:39:47 PM	BCl3 valve closed
4/4/2012	9:39:47 PM	PH3 valve closed
4/4/2012	9:39:47 PM	SiCl4 pre valve closed
4/4/2012	9:39:47 PM	SiCl4 post valve closed
4/4/2012	9:39:47 PM	Bypass valve closed
4/4/2012	9:39:47 PM	Bubbler valve closed
4/4/2012	9:39:47 PM	Helium valve opened
4/4/2012	9:39:47 PM	Main Vac valve opened
4/4/2012	9:39:47 PM	Helium MFC set to  20.000000
4/4/2012	9:39:48 PM	H2 MFC set to  0.000000
4/4/2012	9:39:48 PM	BCl3 MFC set to  0.000000
4/4/2012	9:39:48 PM	PH3 MFC set to  0.000000
4/4/2012	9:39:48 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:39:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:39:48 PM	Tube furnace set to 200
4/4/2012	9:40:18 PM	Helium valve closed
4/4/2012	9:40:18 PM	H2 valve closed
4/4/2012	9:40:18 PM	BCl3 valve closed
4/4/2012	9:40:18 PM	PH3 valve closed
4/4/2012	9:40:18 PM	SiCl4 pre valve closed
4/4/2012	9:40:18 PM	SiCl4 post valve closed
4/4/2012	9:40:18 PM	Bypass valve closed
4/4/2012	9:40:18 PM	Bubbler valve closed
4/4/2012	9:40:18 PM	Main Vac valve opened
4/4/2012	9:40:18 PM	Helium MFC set to  0.000000
4/4/2012	9:40:18 PM	H2 MFC set to  0.000000
4/4/2012	9:40:18 PM	BCl3 MFC set to  0.000000
4/4/2012	9:40:18 PM	PH3 MFC set to  0.000000
4/4/2012	9:40:18 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:40:18 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:40:18 PM	Tube furnace set to 200
4/4/2012	9:40:48 PM	H2 valve closed
4/4/2012	9:40:48 PM	BCl3 valve closed
4/4/2012	9:40:48 PM	PH3 valve closed
4/4/2012	9:40:48 PM	SiCl4 pre valve closed
4/4/2012	9:40:48 PM	SiCl4 post valve closed
4/4/2012	9:40:48 PM	Bypass valve closed
4/4/2012	9:40:48 PM	Bubbler valve closed
4/4/2012	9:40:48 PM	Helium valve opened
4/4/2012	9:40:48 PM	Main Vac valve opened
4/4/2012	9:40:48 PM	Helium MFC set to  20.000000
4/4/2012	9:40:48 PM	H2 MFC set to  0.000000
4/4/2012	9:40:48 PM	BCl3 MFC set to  0.000000
4/4/2012	9:40:48 PM	PH3 MFC set to  0.000000
4/4/2012	9:40:48 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:40:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:40:48 PM	Tube furnace set to 200
4/4/2012	9:41:18 PM	Helium valve closed
4/4/2012	9:41:18 PM	H2 valve closed
4/4/2012	9:41:18 PM	BCl3 valve closed
4/4/2012	9:41:18 PM	PH3 valve closed
4/4/2012	9:41:18 PM	SiCl4 pre valve closed
4/4/2012	9:41:18 PM	SiCl4 post valve closed
4/4/2012	9:41:18 PM	Bypass valve closed
4/4/2012	9:41:18 PM	Bubbler valve closed
4/4/2012	9:41:18 PM	Main Vac valve opened
4/4/2012	9:41:18 PM	Helium MFC set to  0.000000
4/4/2012	9:41:18 PM	H2 MFC set to  0.000000
4/4/2012	9:41:18 PM	BCl3 MFC set to  0.000000
4/4/2012	9:41:18 PM	PH3 MFC set to  0.000000
4/4/2012	9:41:18 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:41:18 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:41:18 PM	Tube furnace set to 200
4/4/2012	9:41:48 PM	H2 valve closed
4/4/2012	9:41:48 PM	BCl3 valve closed
4/4/2012	9:41:48 PM	PH3 valve closed
4/4/2012	9:41:48 PM	SiCl4 pre valve closed
4/4/2012	9:41:48 PM	SiCl4 post valve closed
4/4/2012	9:41:48 PM	Bypass valve closed
4/4/2012	9:41:48 PM	Bubbler valve closed
4/4/2012	9:41:48 PM	Helium valve opened
4/4/2012	9:41:48 PM	Main Vac valve opened
4/4/2012	9:41:48 PM	Helium MFC set to  20.000000
4/4/2012	9:41:48 PM	H2 MFC set to  0.000000
4/4/2012	9:41:48 PM	BCl3 MFC set to  0.000000
4/4/2012	9:41:48 PM	PH3 MFC set to  0.000000
4/4/2012	9:41:48 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:41:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:41:49 PM	Tube furnace set to 200
4/4/2012	9:42:19 PM	Helium valve closed
4/4/2012	9:42:19 PM	H2 valve closed
4/4/2012	9:42:19 PM	BCl3 valve closed
4/4/2012	9:42:19 PM	PH3 valve closed
4/4/2012	9:42:19 PM	SiCl4 pre valve closed
4/4/2012	9:42:19 PM	SiCl4 post valve closed
4/4/2012	9:42:19 PM	Bypass valve closed
4/4/2012	9:42:19 PM	Bubbler valve closed
4/4/2012	9:42:19 PM	Main Vac valve opened
4/4/2012	9:42:19 PM	Helium MFC set to  0.000000
4/4/2012	9:42:19 PM	H2 MFC set to  0.000000
4/4/2012	9:42:19 PM	BCl3 MFC set to  0.000000
4/4/2012	9:42:19 PM	PH3 MFC set to  0.000000
4/4/2012	9:42:19 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:42:19 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:42:19 PM	Tube furnace set to 200
4/4/2012	9:42:49 PM	H2 valve closed
4/4/2012	9:42:49 PM	BCl3 valve closed
4/4/2012	9:42:49 PM	PH3 valve closed
4/4/2012	9:42:49 PM	SiCl4 pre valve closed
4/4/2012	9:42:49 PM	SiCl4 post valve closed
4/4/2012	9:42:49 PM	Bypass valve closed
4/4/2012	9:42:49 PM	Bubbler valve closed
4/4/2012	9:42:49 PM	Helium valve opened
4/4/2012	9:42:49 PM	Main Vac valve opened
4/4/2012	9:42:49 PM	Helium MFC set to  20.000000
4/4/2012	9:42:49 PM	H2 MFC set to  0.000000
4/4/2012	9:42:49 PM	BCl3 MFC set to  0.000000
4/4/2012	9:42:49 PM	PH3 MFC set to  0.000000
4/4/2012	9:42:49 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:42:49 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:42:49 PM	Tube furnace set to 200
4/4/2012	9:43:19 PM	Helium valve closed
4/4/2012	9:43:19 PM	H2 valve closed
4/4/2012	9:43:19 PM	BCl3 valve closed
4/4/2012	9:43:19 PM	PH3 valve closed
4/4/2012	9:43:19 PM	SiCl4 pre valve closed
4/4/2012	9:43:19 PM	SiCl4 post valve closed
4/4/2012	9:43:19 PM	Bypass valve closed
4/4/2012	9:43:19 PM	Bubbler valve closed
4/4/2012	9:43:19 PM	Main Vac valve opened
4/4/2012	9:43:19 PM	Helium MFC set to  0.000000
4/4/2012	9:43:19 PM	H2 MFC set to  0.000000
4/4/2012	9:43:19 PM	BCl3 MFC set to  0.000000
4/4/2012	9:43:19 PM	PH3 MFC set to  0.000000
4/4/2012	9:43:19 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:43:19 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:43:19 PM	Tube furnace set to 0
4/4/2012	9:43:20 PM	Run finished at 9:43 PM
4/4/2012	9:50:32 PM	Main Vac valve closed
4/4/2012	9:50:42 PM	Main Vac valve opened
4/4/2012	9:59:47 PM	Recipe started at 9:59 PM
4/4/2012	9:59:48 PM	Helium valve closed
4/4/2012	9:59:48 PM	H2 valve closed
4/4/2012	9:59:48 PM	BCl3 valve closed
4/4/2012	9:59:48 PM	PH3 valve closed
4/4/2012	9:59:48 PM	SiCl4 pre valve closed
4/4/2012	9:59:48 PM	SiCl4 post valve closed
4/4/2012	9:59:48 PM	Main Vac valve closed
4/4/2012	9:59:48 PM	Bypass valve closed
4/4/2012	9:59:48 PM	Bubbler valve closed
4/4/2012	9:59:48 PM	Helium MFC set to  0.000000
4/4/2012	9:59:48 PM	H2 MFC set to  0.000000
4/4/2012	9:59:48 PM	BCl3 MFC set to  0.000000
4/4/2012	9:59:48 PM	PH3 MFC set to  0.000000
4/4/2012	9:59:48 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:59:48 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:59:48 PM	Tube furnace set to 0
4/4/2012	9:59:51 PM	Helium valve closed
4/4/2012	9:59:51 PM	BCl3 valve closed
4/4/2012	9:59:51 PM	PH3 valve closed
4/4/2012	9:59:51 PM	SiCl4 pre valve closed
4/4/2012	9:59:51 PM	SiCl4 post valve closed
4/4/2012	9:59:51 PM	Main Vac valve closed
4/4/2012	9:59:51 PM	Bypass valve closed
4/4/2012	9:59:51 PM	Bubbler valve closed
4/4/2012	9:59:51 PM	H2 valve opened
4/4/2012	9:59:51 PM	Helium MFC set to  0.000000
4/4/2012	9:59:51 PM	H2 MFC set to  500.000000
4/4/2012	9:59:51 PM	BCl3 MFC set to  0.000000
4/4/2012	9:59:51 PM	PH3 MFC set to  0.000000
4/4/2012	9:59:51 PM	SiCl4 MFC set to  0.000000
4/4/2012	9:59:51 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	9:59:51 PM	Tube furnace set to 0
4/4/2012	10:00:56 PM	Helium valve closed
4/4/2012	10:00:56 PM	BCl3 valve closed
4/4/2012	10:00:56 PM	PH3 valve closed
4/4/2012	10:00:56 PM	SiCl4 pre valve closed
4/4/2012	10:00:56 PM	SiCl4 post valve closed
4/4/2012	10:00:56 PM	Main Vac valve closed
4/4/2012	10:00:56 PM	Bypass valve closed
4/4/2012	10:00:56 PM	H2 valve opened
4/4/2012	10:00:56 PM	Bubbler valve opened
4/4/2012	10:00:56 PM	Helium MFC set to  0.000000
4/4/2012	10:00:56 PM	H2 MFC set to  500.000000
4/4/2012	10:00:56 PM	BCl3 MFC set to  0.000000
4/4/2012	10:00:56 PM	PH3 MFC set to  0.000000
4/4/2012	10:00:56 PM	SiCl4 MFC set to  0.000000
4/4/2012	10:00:56 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:00:56 PM	Tube furnace set to 0
4/4/2012	10:00:57 PM	Helium valve closed
4/4/2012	10:00:57 PM	BCl3 valve closed
4/4/2012	10:00:57 PM	PH3 valve closed
4/4/2012	10:00:57 PM	SiCl4 pre valve closed
4/4/2012	10:00:57 PM	SiCl4 post valve closed
4/4/2012	10:00:57 PM	Main Vac valve closed
4/4/2012	10:00:57 PM	Bypass valve closed
4/4/2012	10:00:57 PM	H2 valve opened
4/4/2012	10:00:57 PM	Bubbler valve opened
4/4/2012	10:00:57 PM	Helium MFC set to  0.000000
4/4/2012	10:00:57 PM	H2 MFC set to  500.000000
4/4/2012	10:00:57 PM	BCl3 MFC set to  0.000000
4/4/2012	10:00:57 PM	PH3 MFC set to  0.000000
4/4/2012	10:00:57 PM	SiCl4 MFC set to  0.000000
4/4/2012	10:00:57 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:00:57 PM	Tube furnace set to 1000
4/4/2012	10:20:57 PM	Helium valve closed
4/4/2012	10:20:57 PM	PH3 valve closed
4/4/2012	10:20:57 PM	Main Vac valve closed
4/4/2012	10:20:57 PM	Bypass valve closed
4/4/2012	10:20:57 PM	H2 valve opened
4/4/2012	10:20:57 PM	BCl3 valve opened
4/4/2012	10:20:57 PM	SiCl4 pre valve opened
4/4/2012	10:20:57 PM	SiCl4 post valve opened
4/4/2012	10:20:57 PM	Bubbler valve opened
4/4/2012	10:20:57 PM	Helium MFC set to  0.000000
4/4/2012	10:20:57 PM	H2 MFC set to  450.000000
4/4/2012	10:20:57 PM	BCl3 MFC set to  1.500000
4/4/2012	10:20:57 PM	PH3 MFC set to  0.000000
4/4/2012	10:20:57 PM	SiCl4 MFC set to  50.000000
4/4/2012	10:20:57 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:20:57 PM	Tube furnace set to 1000
4/4/2012	10:38:57 PM	Helium valve closed
4/4/2012	10:38:57 PM	BCl3 valve closed
4/4/2012	10:38:57 PM	PH3 valve closed
4/4/2012	10:38:57 PM	SiCl4 pre valve closed
4/4/2012	10:38:57 PM	SiCl4 post valve closed
4/4/2012	10:38:57 PM	Main Vac valve closed
4/4/2012	10:38:57 PM	Bypass valve closed
4/4/2012	10:38:57 PM	H2 valve opened
4/4/2012	10:38:57 PM	Bubbler valve opened
4/4/2012	10:38:57 PM	Helium MFC set to  0.000000
4/4/2012	10:38:57 PM	H2 MFC set to  500.000000
4/4/2012	10:38:57 PM	BCl3 MFC set to  0.000000
4/4/2012	10:38:57 PM	PH3 MFC set to  0.000000
4/4/2012	10:38:57 PM	SiCl4 MFC set to  0.000000
4/4/2012	10:38:57 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:38:57 PM	Tube furnace set to 950
4/4/2012	10:40:57 PM	Helium valve closed
4/4/2012	10:40:57 PM	BCl3 valve closed
4/4/2012	10:40:57 PM	PH3 valve closed
4/4/2012	10:40:58 PM	SiCl4 pre valve closed
4/4/2012	10:40:58 PM	SiCl4 post valve closed
4/4/2012	10:40:58 PM	Main Vac valve closed
4/4/2012	10:40:58 PM	Bypass valve closed
4/4/2012	10:40:58 PM	H2 valve opened
4/4/2012	10:40:58 PM	Bubbler valve opened
4/4/2012	10:40:58 PM	Helium MFC set to  0.000000
4/4/2012	10:40:58 PM	H2 MFC set to  500.000000
4/4/2012	10:40:58 PM	BCl3 MFC set to  0.000000
4/4/2012	10:40:58 PM	PH3 MFC set to  0.000000
4/4/2012	10:40:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	10:40:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:40:58 PM	Tube furnace set to 900
4/4/2012	10:42:58 PM	Helium valve closed
4/4/2012	10:42:58 PM	BCl3 valve closed
4/4/2012	10:42:58 PM	PH3 valve closed
4/4/2012	10:42:58 PM	SiCl4 pre valve closed
4/4/2012	10:42:58 PM	SiCl4 post valve closed
4/4/2012	10:42:58 PM	Main Vac valve closed
4/4/2012	10:42:58 PM	Bypass valve closed
4/4/2012	10:42:58 PM	H2 valve opened
4/4/2012	10:42:58 PM	Bubbler valve opened
4/4/2012	10:42:58 PM	Helium MFC set to  0.000000
4/4/2012	10:42:58 PM	H2 MFC set to  500.000000
4/4/2012	10:42:58 PM	BCl3 MFC set to  0.000000
4/4/2012	10:42:58 PM	PH3 MFC set to  0.000000
4/4/2012	10:42:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	10:42:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:42:58 PM	Tube furnace set to 850
4/4/2012	10:44:58 PM	H2 valve closed
4/4/2012	10:44:58 PM	BCl3 valve closed
4/4/2012	10:44:58 PM	PH3 valve closed
4/4/2012	10:44:58 PM	SiCl4 pre valve closed
4/4/2012	10:44:58 PM	SiCl4 post valve closed
4/4/2012	10:44:58 PM	Main Vac valve closed
4/4/2012	10:44:58 PM	Bypass valve closed
4/4/2012	10:44:58 PM	Helium valve opened
4/4/2012	10:44:58 PM	Bubbler valve opened
4/4/2012	10:44:58 PM	Helium MFC set to  500.000000
4/4/2012	10:44:58 PM	H2 MFC set to  0.000000
4/4/2012	10:44:58 PM	BCl3 MFC set to  0.000000
4/4/2012	10:44:58 PM	PH3 MFC set to  0.000000
4/4/2012	10:44:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	10:44:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:44:58 PM	Tube furnace set to 800
4/4/2012	10:46:58 PM	H2 valve closed
4/4/2012	10:46:58 PM	BCl3 valve closed
4/4/2012	10:46:58 PM	PH3 valve closed
4/4/2012	10:46:58 PM	SiCl4 pre valve closed
4/4/2012	10:46:58 PM	SiCl4 post valve closed
4/4/2012	10:46:58 PM	Main Vac valve closed
4/4/2012	10:46:58 PM	Bypass valve closed
4/4/2012	10:46:58 PM	Helium valve opened
4/4/2012	10:46:58 PM	Bubbler valve opened
4/4/2012	10:46:58 PM	Helium MFC set to  500.000000
4/4/2012	10:46:58 PM	H2 MFC set to  0.000000
4/4/2012	10:46:58 PM	BCl3 MFC set to  0.000000
4/4/2012	10:46:58 PM	PH3 MFC set to  0.000000
4/4/2012	10:46:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	10:46:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:46:58 PM	Tube furnace set to 750
4/4/2012	10:48:58 PM	H2 valve closed
4/4/2012	10:48:58 PM	BCl3 valve closed
4/4/2012	10:48:58 PM	PH3 valve closed
4/4/2012	10:48:58 PM	SiCl4 pre valve closed
4/4/2012	10:48:58 PM	SiCl4 post valve closed
4/4/2012	10:48:58 PM	Main Vac valve closed
4/4/2012	10:48:58 PM	Bypass valve closed
4/4/2012	10:48:58 PM	Helium valve opened
4/4/2012	10:48:58 PM	Bubbler valve opened
4/4/2012	10:48:58 PM	Helium MFC set to  500.000000
4/4/2012	10:48:58 PM	H2 MFC set to  0.000000
4/4/2012	10:48:58 PM	BCl3 MFC set to  0.000000
4/4/2012	10:48:58 PM	PH3 MFC set to  0.000000
4/4/2012	10:48:58 PM	SiCl4 MFC set to  0.000000
4/4/2012	10:48:58 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	10:48:59 PM	Tube furnace set to 0
4/4/2012	11:08:59 PM	Helium valve closed
4/4/2012	11:08:59 PM	H2 valve closed
4/4/2012	11:08:59 PM	BCl3 valve closed
4/4/2012	11:08:59 PM	PH3 valve closed
4/4/2012	11:08:59 PM	SiCl4 pre valve closed
4/4/2012	11:08:59 PM	SiCl4 post valve closed
4/4/2012	11:08:59 PM	Main Vac valve closed
4/4/2012	11:08:59 PM	Bypass valve closed
4/4/2012	11:08:59 PM	Bubbler valve closed
4/4/2012	11:08:59 PM	Helium MFC set to  0.000000
4/4/2012	11:08:59 PM	H2 MFC set to  0.000000
4/4/2012	11:08:59 PM	BCl3 MFC set to  0.000000
4/4/2012	11:08:59 PM	PH3 MFC set to  0.000000
4/4/2012	11:08:59 PM	SiCl4 MFC set to  0.000000
4/4/2012	11:08:59 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:08:59 PM	Tube furnace set to 0
4/4/2012	11:09:00 PM	Run finished at 11:09 PM
4/4/2012	11:41:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	11:41:56 PM	Recipe started at 11:41 PM
4/4/2012	11:41:56 PM	Helium valve closed
4/4/2012	11:41:56 PM	H2 valve closed
4/4/2012	11:41:56 PM	BCl3 valve closed
4/4/2012	11:41:56 PM	PH3 valve closed
4/4/2012	11:41:56 PM	SiCl4 pre valve closed
4/4/2012	11:41:56 PM	SiCl4 post valve closed
4/4/2012	11:41:56 PM	Main Vac valve closed
4/4/2012	11:41:56 PM	Bypass valve closed
4/4/2012	11:41:56 PM	Bubbler valve closed
4/4/2012	11:41:56 PM	Helium MFC set to  0.000000
4/4/2012	11:41:56 PM	H2 MFC set to  0.000000
4/4/2012	11:41:56 PM	BCl3 MFC set to  0.000000
4/4/2012	11:41:56 PM	PH3 MFC set to  0.000000
4/4/2012	11:41:56 PM	SiCl4 MFC set to  0.000000
4/4/2012	11:41:56 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:41:56 PM	Tube furnace set to 0
4/4/2012	11:41:59 PM	H2 valve closed
4/4/2012	11:41:59 PM	BCl3 valve closed
4/4/2012	11:41:59 PM	PH3 valve closed
4/4/2012	11:41:59 PM	SiCl4 pre valve closed
4/4/2012	11:41:59 PM	SiCl4 post valve closed
4/4/2012	11:41:59 PM	Main Vac valve closed
4/4/2012	11:41:59 PM	Bypass valve closed
4/4/2012	11:41:59 PM	Bubbler valve closed
4/4/2012	11:41:59 PM	Helium valve opened
4/4/2012	11:41:59 PM	Helium MFC set to  500.000000
4/4/2012	11:41:59 PM	H2 MFC set to  0.000000
4/4/2012	11:41:59 PM	BCl3 MFC set to  0.000000
4/4/2012	11:41:59 PM	PH3 MFC set to  0.000000
4/4/2012	11:41:59 PM	SiCl4 MFC set to  0.000000
4/4/2012	11:41:59 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:41:59 PM	Tube furnace set to 0
4/4/2012	11:42:05 PM	Helium valve closed
4/4/2012	11:42:05 PM	H2 valve closed
4/4/2012	11:42:05 PM	BCl3 valve closed
4/4/2012	11:42:05 PM	PH3 valve closed
4/4/2012	11:42:05 PM	SiCl4 pre valve closed
4/4/2012	11:42:05 PM	SiCl4 post valve closed
4/4/2012	11:42:05 PM	Main Vac valve closed
4/4/2012	11:42:05 PM	Bypass valve closed
4/4/2012	11:42:05 PM	Bubbler valve closed
4/4/2012	11:42:05 PM	Helium MFC set to  0.000000
4/4/2012	11:42:05 PM	H2 MFC set to  0.000000
4/4/2012	11:42:05 PM	BCl3 MFC set to  0.000000
4/4/2012	11:42:05 PM	PH3 MFC set to  0.000000
4/4/2012	11:42:05 PM	SiCl4 MFC set to  0.000000
4/4/2012	11:42:05 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:42:05 PM	Tube furnace set to 0
4/4/2012	11:42:06 PM	Run finished at 11:42 PM
4/4/2012	11:42:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/4/2012	11:43:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/4/2012	11:43:38 PM	Recipe started at 11:43 PM
4/4/2012	11:43:38 PM	Helium valve closed
4/4/2012	11:43:38 PM	H2 valve closed
4/4/2012	11:43:38 PM	BCl3 valve closed
4/4/2012	11:43:38 PM	PH3 valve closed
4/4/2012	11:43:38 PM	SiCl4 pre valve closed
4/4/2012	11:43:38 PM	SiCl4 post valve closed
4/4/2012	11:43:38 PM	Main Vac valve closed
4/4/2012	11:43:38 PM	Bubbler valve closed
4/4/2012	11:43:38 PM	Bypass valve opened
4/4/2012	11:43:38 PM	Helium MFC set to  0.000000
4/4/2012	11:43:38 PM	H2 MFC set to  0.000000
4/4/2012	11:43:38 PM	BCl3 MFC set to  0.000000
4/4/2012	11:43:38 PM	PH3 MFC set to  0.000000
4/4/2012	11:43:38 PM	SiCl4 MFC set to  0.000000
4/4/2012	11:43:38 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:43:38 PM	Tube furnace set to 0
4/4/2012	11:44:37 PM	Helium valve closed
4/4/2012	11:44:37 PM	H2 valve closed
4/4/2012	11:44:37 PM	BCl3 valve closed
4/4/2012	11:44:37 PM	PH3 valve closed
4/4/2012	11:44:37 PM	SiCl4 pre valve closed
4/4/2012	11:44:37 PM	SiCl4 post valve closed
4/4/2012	11:44:37 PM	Main Vac valve closed
4/4/2012	11:44:37 PM	Bubbler valve closed
4/4/2012	11:44:37 PM	Bypass valve opened
4/4/2012	11:44:37 PM	Helium MFC set to  0.000000
4/4/2012	11:44:37 PM	H2 MFC set to  0.000000
4/4/2012	11:44:37 PM	BCl3 MFC set to  0.000000
4/4/2012	11:44:37 PM	PH3 MFC set to  0.000000
4/4/2012	11:44:37 PM	SiCl4 MFC set to  0.000000
4/4/2012	11:44:37 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:44:37 PM	Tube furnace set to 0
4/4/2012	11:45:38 PM	Helium valve closed
4/4/2012	11:45:38 PM	H2 valve closed
4/4/2012	11:45:38 PM	BCl3 valve closed
4/4/2012	11:45:38 PM	PH3 valve closed
4/4/2012	11:45:38 PM	SiCl4 pre valve closed
4/4/2012	11:45:38 PM	SiCl4 post valve closed
4/4/2012	11:45:38 PM	Bypass valve closed
4/4/2012	11:45:38 PM	Bubbler valve closed
4/4/2012	11:45:38 PM	Main Vac valve opened
4/4/2012	11:45:38 PM	Helium MFC set to  0.000000
4/4/2012	11:45:38 PM	H2 MFC set to  0.000000
4/4/2012	11:45:38 PM	BCl3 MFC set to  0.000000
4/4/2012	11:45:38 PM	PH3 MFC set to  0.000000
4/4/2012	11:45:38 PM	SiCl4 MFC set to  0.000000
4/4/2012	11:45:38 PM	Bypass solenoid MFC set to  0.000000
4/4/2012	11:45:38 PM	Tube furnace set to 0
4/4/2012	11:45:39 PM	Run finished at 11:45 PM
4/4/2012	11:45:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
